Modular F.R.L. Pressure Control Equipment

Refer to page 449 for details of the replacement. 10 Straight type Elbow type Fitting size One-touch fittings for regulator block Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 V W X Y Note) The O-ring is attached.

MVGQ

MVGQM, MVGQL Common Dimensions ML2B Applicable solenoid valve B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) TA TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

•

Refer to pages 7 to 10.

LG1H

LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

40 Work load: W [kg] Work load: W [kg] 20 Lead 16: LEKFS32EA 30 Lead 16: LEKFS32EA 20 Lead 24: LEKFS32EH 10 Lead 24: LEKFS32EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40EB Lead 10: LEKFS40EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEKFS40EA 30 Lead 30: LEKFS40EH

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

Air Slide Table

10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke

MXW

MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 A2: Moment center position distance compensation amount Mr (mm) (mm) W Mp MXW8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 MXW8 MXW12 MXW16 MXW20 MXW25 10 10 14 20 28 W W 8-7-2 3 Long Stroke Slide Table Series MXW Dynamic Moment Moment due to impact of load at end of stroke.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C D d F G GA GB J K M MA MM NA NB P Q R S T V W E 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 17 23 10 60 44 18 25 14 17.5 9.5 M8 x 1.25 18 13 20 M14 x 1.5 30 22 1/4 5 37 106

TABLE OF CONTENTS

) Manual Overide version (DC 586-3WMP J-1.6MM only) (Multi-Purpose) 19 10-32 Ports (Metal body only) plastic S-Extended PSI rates for 21 10-32 Ports metal S.S.(430F) bodies/housing only 22 10-32 Ports Brass 23 10-32 Ports S.S(303F) 24 10-32 spud mount S.S.(430F) 25 10-32 spud mount brass 26 10-32 spud mount S.S(303) 27 M5 ports S.S. (430F) 28 M5 ports brass 29 M5 ports S.S.(303) EXAMPLE G

Stopper Cylinder

0 w q e r t u !

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

CQS

(mm) 20 25 14 10 4 14 10 10 6 22.5 10 8 [10.5] 6 -X 25 27 16 11 6 16 12 11 7 24.5 12 10 [12.5] 7 20Auto switch model D-F9BAL Data Symbol A B W HS Double Acting, Single Rod; Single Acting, Single Rod, Spring Return/Spring Extend 12 4.5 3.5 14.5 16.5 Bore size (mm) 16 5 3 15 18.5 20 9 6.5 11.5 22 25 10 8.5 9.5 24 Long Stroke 12 8 10 8 16.5 16 8.5 9.5 8.5 18.5 Bore size (mm) 20 12 15 3 22 25

Table of Contents

Function Coil voltage Light/Surge voltage suppressor AC Symbol Specifications DC (1.0 W) (1) Standard type Nil 1 3 5 6 100 VAC (50/60 Hz) 110 VAC (50/60 Hz) 24 VDC 12 VDC (1.5 W) (0.5 W) Yes None Nil High pressure type H (2) E Low wattage type Y (2) Note 1) For power consumption of AC type, refer to page 2-4-10.

CJ5-S

Applicable bore size (mm) Flat type + 0.048 0 + 0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 40 22 32 12 9 Round type CJ-T016SUS 16 Data 5 5.5 35 20 6.4 2.5 48 28 38 16 14 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 7 12 10 M5 x 0.8 10-14-9 10 Stainless Steel Cylinder Series CG5-S 20, 25, 32, 40, 50, 63, 80, 100 How to Order Stainless steel cylinder

CJ5-S

Applicable bore size (mm) Flat type + 0.048 0 + 0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 40 22 32 12 9 Round type CJ-T016SUS 16 Data 5 5.5 35 20 6.4 2.5 48 28 38 16 14 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 7 12 10 M5 x 0.8 10-14-9 10 Stainless Steel Cylinder Series CG5-S 20, 25, 32, 40, 50, 63, 80, 100 How to Order Stainless steel cylinder

REC

Stroke Against Lateral Load D RS H A 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 RZQ Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 MI W S 52 66 75 81 0.7 50 CEP1 33 43 49 53 0.3 23 31 36 39 T 0.5 10 CE1 5 18 25 29 31 0.7 REC40 REC32 REC25 REC20 CE2 Rod side flange style: F Head side flange style: G 182 167 148 118 0.3 Foot style : L 1 L ML2B 140 128 114

HRL

W: 13 [kW] w Derive the heat generation amount from the power supply output.