CXS

400mm/s 2 20 50 CXSM CXSL CXSM CXSL 10 Weight m (kg) Weight m (kg) 10 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s 4 Graph V = up to 600mm/s 3 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS1001FM AS2001FM AS2051FM Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number of needle rotations 725 AS-FM Series Construction Component Parts No.

Thermo-chiller/Rack Mount Type

Q = m x C x (T0 Tt) it = r x V x C x iT it = 1 x 20 x 4.2 x 103 x 12 900 = 1120 [J/s] 1120 [W] Q = m x C x (T0 Tt) it x 860 = c x V x 60 x C x iT it x 860 Cooling capacity = Considering a safety factor of 20%, 1120 [W] x 1.2 = 1344 [W] = 1 x 20 x 60 x 1.0 x 103 x 12 15 x 860 1120 [W] Thermo-chiller Q x t: Heat capacity [kJ] 20C Water bath Cooling capacity = Considering a safety factor

energy saving effect

-A-20/40HRSH150-W-20/4025 25 Facility water temperature 32C Ambient temperature 32C 20 20 Cooling capacity [kW] Cooling capacity [kW] 15.7 15.7 15 15 Ambient temperature 43C 10 10 Facility water temperature 40C Ambient temperature 45C 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH200-A-20/40HRSH200-W-20/4030 30 Ambient

CHKD/CHKG

J A + Stroke M M Rod end male thread CHKDB20, 25 CHKDB32 to 100 Water resistant type S N g C B + Stroke h + Stroke A + Stroke Rod end male thread (mm) B C D E F G H J K L M P Q R A Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6 11 depth 6.5 63 1/4 19.5

MXH Series Compact Slide

20 23 5 20 6.5 6.5 5 NS 12.5 13 11 7.5 35 + Stroke 46.5 + Stroke 11.5 20 4-M4 x 0.7 Depth 6 5 + Stroke 12 Stroke (mm) LT NS LA LB J 5 14 49 4 10 10 49 14 10 4 15 24 59 4 20 20 59 24 20 4 25 30 69 4 30 30 69 30 30 4 40 45 20 79 6 20 50 89 55 25 25 6 60 60 30 99 6 30 34 Compact Slide MXH Series Dimensions 16 LT (mm) 8 24 16 LA LB 14 J-M4 x 0.7 Depth 9 3-M5 x 0.8 through Bottom hole

MXH

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9.5 34 6 24.5 63.5 64.5 34 34 32 7 32 7 6 20 20 11 6 15 NS 15.5 52.5 + Stroke 68 + Stroke 32 4-M5 x 0.8 depth 8 10 + Stroke 15 20 (mm) Stroke (mm) LB LT NS LA J 5 64 20 4 10 10 20 64 4 10 15 25 20 74 4 20 74 25 20 4 25 84 40 4 30 30 40 84 4 30 40 50 20 20 94 6 50 25 104 70 25 6 60 114 70 30 6 30 8-2-18 17

Thermo-chiller

25C Ambient temperature 2C 0.5 0.5 Ambient temperature 2C 0 0 15 20 25 Circulating fluid temperature [C] 15 20 25 Circulating fluid temperature [C] HRLE050-W-20 HRLE050-W-20 [50 Hz] [60 Hz] 2 2 Heating capacity [kW] Heating capacity [kW] 1.5 1.5 Facility water temperature 25C, 32C, 40C Facility water temperature 25C, 32C, 40C 1 1 0.5 0.5 0 0 15 20 25 Circulating fluid temperature [C] 15

MY1

20 10 10 1.

MY1

20 1.

Thermo-chiller

x Width 925 x Depth 955] HRS150-W -20-A 459 [208] HRS150-A-20 4.

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P S U W E B K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20

Basic Type/Direct Mount Type

Bore size 6, 10, 15 Symbol Type M thread Rc NPT G 15 15 mm 20 Nil 20 mm 20, 25, 32, 40 25 25 mm TN TF 50, 63 Switch rail 32 32 mm Nil 40 With switch rail 40 mm N 50 Without switch rail 50 mm Note 1) A type with switch rail has built-in auto switch magnets. Note 2) 15 has built-in auto switch magnets even without switch rail.

240

NS 20 20 30 30 40 40 50 60 60 LT 58 58 68 68 78 78 88 98 108 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 26 Compact Slide MXH Series Dimensions: 20 LT MXH MXH 20 31 MXS MXQ 14 LA LB J x M5 x 0.8 Depth 6.5 MXQ MXF 3 x M6 x 1.0 through 2 x 2 x M5 x 0.8 Cylinder port (With plug for port) MXW Pilot hole dia 5.1 2 x 3 x 9.3 counterbore depth

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1W63 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 58 58 70 88 104 128 152 7 10 12 14 17 20 26 6 6 7 12 12 15 15 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-G 2-H E E F A B C D Side support B MY-SB 2-J 2-H C D A B (mm) A B C 15 25 35 45 E F G D H J M4

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

10 12 14 17 20 26 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-G 2-H E E F A B C D Side support B MY-SB 2-J Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-H C D A B (mm) A B C 15 25 35 45 E F G D H J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 Applicable

HRS100/150

[C] HRS100-W-20/40(60 Hz) HRS100-W-20/40(50 Hz) 14 14 Facility water temperature 32C 12 12 Cooling capacity [kW] Cooling capacity [kW] Facility water temperature 32C 10 10 8 8 6 6 4 4 Facility water temperature 40C Facility water temperature 40C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRS150-A-20/40(50 Hz) HRS150-

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 11-/22-MXP10-10 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-20 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 835 MXP/MXPJ6 1122Air Slide Table Dimensions: MXP12 1122Z 3 Metal stopper V K Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

2.5 3 20 0.05 Prepared hole diameter 3.3 +0.030 0 15 W 0.50.05 B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 28 27 10 4.5 depth 1.5 3 J 6 +0.030 0 10 9.5 4 Section AA Mounting base side B D +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2-M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6-M3 x 0.5 depth 4 2-M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W