MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G A W B C D J K MM L MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

144 32 20 to 110 97.5 13 115 to 190 116.5 195 to 300 134 [mm] LEYGlM, LEYGlL Common Size Stroke range [mm] A B C DA EA EB EH EV FA FB FC G GA H J K M NA NB NC 15 to 35 141.5 116 50 20 46 85 103 52.3 11 14.5 12.5 5.4 40.3 98.8 30.8 29 34 M5 x 0.8 8 6.5 40 to 100 67.5 105 to 120 166.5 141 125 to 200 84.5 205 to 300 102 25 20 to 35 160.5 130 55 25 60 101 123 63.8 12 18.5 16.5 5.4 50.3 125.3

Series VQ Metal Seal/Rubber Seal Body Ported

The direction of the L and M connectors of a pilot valve is opposite to that of the single and double style. (1) (1) L M G L M G VQ111P (H) (Y) VQ111P (H) (Y) X18 {A side( Bottom side)} {B side(Top side)} X18 {A side( Bottom side)} {B side(Top side)} 3 position (VQ1000 only) 3 position (VQ1000 only) Voltage 1 to 6 Voltage 1 to 6 Note 1) (H): 1.5W, (Y): 0.5W, G type: DC only Note 1) (H

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Type 40/Type 41 How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A R port 1/4 R port 1/8 P, R port thread type Manifold type Stations 40 41 Type 40 Type 41 Nil Rc G NPT NPTF 2 stations : 20 stations 02 : 20 F N T A A A A 01 1/8 A port size P port 1/8 P port 1/4 A port 1/8 Note) If there are more than 6 stations

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Y m x g m x g Vertical mounting Mounting orientation Ceiling m Wall m Vertical m Note) Horizontal m Static load m M m x g x X m x g x X m x g x Z M Static moment M m x g x Y m x g x Y m x g x Z M z y Y Z m x g x X m x g x Y M m x g Note) m is a mass movable by thrust.

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Confirm that the value is within the operating range of the point of application L = 50 mm RHC MK(2) RS Q G 20 = 2 x 9.8 x 15/1000 x 60 12 = 32.5 (m/min) 20 L = 60 mm RS H A 20 Work piece weight (kg) L = 50 mm Work piece weight (kg) Obtain the intersection of the collision speed V and the total weight of the workpiece m.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

1 Escapements Series MIW/MIS 8, 12, 20, 25, 32 RE A B REC CX CY MQQ M RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J Ideal for separating and feeding individual parts from vibratory feeders, magazines, and hoppers.

SZ3000

Press the manifold. 1-3-19 20 Series SZ3000 Dimensions: SZ3000 Plug-in 1 2 SS5Z3-60FD Stations UWith external pilot 2n2One-touch fitting [4(A), 2(B) port] 13.3 (Pitch) P = 10.5 Applicable tubing O.D.: 4 6 13.3 24 24 16.2 16.2 34 17 36.7 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 A 4 2One-touch fitting [1(P), 3(R) port] Applicable tubing

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Type 30 Passage pipe assembly VVCW20 2 C 1 01 Types 10, 20 VVDW 2 0 6A Material Brass Stainless steel C S Thread type Materials Series Symbol Nil A G H Rc G NPT Nil F N Pipe material 1 2 10 20 Seal material NBR FKM NBR FKM Stations Brass For 2 stations For 3 stations OUT port size 1 2 Stainless steel Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Type 30 VVCW20 6A Materials Symbol Nil A G H Seal

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

4 x M2.5 x 0.45 thread depth 2.5 12.5 K Bottom view of MXQ6-30 13223 6.5 20 16 13 3.5 0.3 19.2 20 Z ZZ G (NN 1) x H H 10.5 5.5 10.5 5.5 A B 3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16

IDG

IDG5H (Type A products group) IDG3H (Type A products group) P1 = 0.3 MPa 0 P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa P1 = 0.5 MPa P1 = 0.7 MPa 10 10 P1 = 0.7 MPa 20 20 30 30 40 40 0 40 30 20 10 20 40 60 80 0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)

0.5

max Ambient temperature 0 to 40C, Stored: 20 to 65C Ambient humidity Operating, Stored: 5 to 95%RH (No condensation) Weight 375 g (including AC cord, connector) IZF21 IZF31 Body 430 g 605 g Bracket 146 g 220 g Automatic cleaning unit 96 g 127 g Louver 33 g 58 g Filter 15 g 26 g Applicable standard/directive CE/cUL Functions and Indications No.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

PG: Flat cable (20 pins) PH: Flat cable (10 pins) External pilot specifications Note) A total of up to 3 supply/exhaust blocks can be mounted. Contact P/A if 4 or more will be mounted.

CQS

Foot Without auto switch With auto switch Without/with auto switch Long stroke Standard stroke (mm) Standard stroke (mm) Long stroke (mm) Bore (mm) LS B 20 20 29 29 A 32 32 41 44 LS 50.3 50.3 62.7 66.2 B 10 10 17.5 17.5 A 22 22 29.5 32.5 LS 40.3 40.3 51.2 54.7 B 5 5 7.5 7.5 A 17 17 19.5 22.5 12 16 20 25 35.3 35.3 41.2 44.7 35 to 100 35 to 100 75 to 200 75 to 300 5 to 30 5 to 30 5 to 50 5

Shock Absorbers and Rate Controls

(SMAII BORE} UFM10 x t ) UF r/220 uF s/16 18 + UF I-72 [ ' Dtr_ C l' I j rIl l l T F I r H o .L 8 a.22 & _l -! g.3t g 1 R r I -1 .2( 20 F G (otolog llo.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

stations 20 Port size {4(A), 2(B) port} Note 1)Order DIN rail separately.

1

10 to 70C Size Applicable cylinder Nominal thread size 20 For 20 M8 x 1.25 32 For 25 M10 x 1.25 For 32 M10 x 1.25 40 For 40 M14 x 1.5 Dimensions M, P D M E F C G A B H Standard Pneumatic: Up to 0.7 MPa [mm] Model Connection thread M A B C D E mF G Width across flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28