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surface)) Low-noise fan: 48 dB(A) (Measured at a distance of 300 mm from the workpiece), Rapid static neutralizing fan: 57 dB(A) Offset voltage (Ion balance): 13 V With alarms for Incorrect high voltage, Maintenance warning With flow rate adjustment function (IZF10R) Based on ANSI/ESD-STM3.1-2006 standards 6 C O N T E N T S IZF21/31 IZF10/IZF10R Technical Data IZF21/31 Series IZF10/IZF10R

1 2 Holding block (A) 1 2 1 Switch block (A) 1 1 Switch block (B) 1 1 Holding block (A) 1 No.

Phase A RESET GND FG 4 RESET Yellow Yellow Brown 5 FG Green Green 15.3 Actuator cable (1) How to Order L A T H 1 1 Cable length (L) 1 1m 3 3m Note) There is direction for the actuator cable. 5 5m Connect the actuator side to the card motor.

ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 3 17.5 22 13 ZPG13U-7A-X2 13 15 13 ZPG13C-7A-X2 13 15 1.8 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20U-7A-X2 20 23 ZPG20C-7A-X2 20 23 1.7 19.5 24 4 19.5 24 15 ZPG25U

14 A Current consumption 5 A (100 V) to 2.5 A (240 V) 9 A (100 V) to 4 A (240 V) 10 A (100 V) to 4 A (240 V) 8 A (200 V) Power consumption 440 W*1 850 W*1 900 W*2 1500 W*2 Alarm Refer to Alarm.

12 to 24 16 to 32 MLU With long spacer 23 to 34.5 24 to 36 32 to 48 Stroke adjustment range is applicable for one side when mounted on a cylinder.

A 72 27 B 41.8 15.8 SFD100-02 23 Hole shape for bracket mounting 26.2 SMC 23 14.7 90 1.5 3 51 17 Use a countersunk head screw (M3) for bracket mounting. 72 27 3.5 SFD200-C SFD200-C Dimensions Model A 125 B SFD200C08 C10 C12 8 10 126 12 126 SMC 42 24 Bracket mounting dimensions 96.5 36 4 x 3.5 114.5 4 x 7 Applicable tubing O.D.

(mm) P = Operating pressure [MPa] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4.9 4 2.5 l = Length of piping [mm] 12.6 6 4 a = Internal cross section of piping [mm ] 19.6 8 5 QC = Air consumption required for one reciprocation of rotary actuator [l (ANR)] 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 12 16 127 12.7 133

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

B Auto switch a b d c Proper mounting positions (mm) A B Bore size (mm) 63 80 100 10 13 17.5 14 18.5 23.5 Proper mounting positions (mm) a b 14 18 17 c 20 24 23 d D-A9 type D-F9 type D-F9 W type 2 6 5 8 12 11 In order that adjacent switches do not misoperate, they should be set within 1mm of the proper mounting positions indicated in the table above.

21.5 (29.5) A B 20.5 (28.5) A B 15 (22.5) A B 17.5 (25.5) A B 19.5 (27.5) A B 18 (26) A B 16 (24) B 20 27.5 27 24.5 31 25.5 27.5 29 27 24 30 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18 (26) 16 (24) 25 30 29.5 27 31 25.5 27.5 29 27 24 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 19 (27) 17 (25) 32 33.5 33 30.5 32 26.5 28.5 30 28 25 31 25 (34) 24 (33) 18 (

3-N 18 21,41SA SS5YJ7SY3000-37-81A-3-6 3 14 SY3000-37-81A-3-7 3 58 Ass'y Assy Assy SY3000-37-80A-5 A 18 21,32SA SS5YJ3SY3000-37-80A-2 B SY3000-37-80A-7 A 916 SY3000-37-80A-4 B SY3000-37-80A-5 A 18 SY3000-37-80A-2 B 20,40, 42,43SA SS5YJ5SY3000-37-80A-7 A 912 SY3000-37-80A-4 B SY3000-37-80A-9 A 1316 SY3000-37-80A-7 B SY3000-37-80A-7 A 18 SY3000-37-80A-3 B 21,41SA SS5YJ7SY3000

For a facility having a small installation area (that can not vent the air naturally): Make a forced air exhaust vent on a wall at a high level and an air inlet on a wall at a low level. 3.

cable 6.8 to 9.6) Auto Switch Proper Mounting Positions (mm) Solid state auto switch Reed auto switch D-G5/K59 D-G5W/K59W D-G59F/G5BA D-G5NT A 10 8 15 19.5 D-H7 D-H7W/H7C D-H7NF/H7BA D-M9(V) D-M9W(V) D-M9A(V) D-C7/C80 D-C73C/C80C Bore size (mm) D-A9(V) D-B5/B64 D-A3/A44 D-G39/K39 D-B59W A 8 6 13 17.5 A 8.5 6.5 13.5 18 A 11.5 9.5 16 21 A 8 6 13 17.5 A 18 16 23 27.5 B 17 19 18 23.5 A 13.5

(Nm) T (Nm) Bore size (mm) Stroke (mm) Bearing type 25 50 75 100 125 150 175 200 MGPWM MGPWL/A MGPWM MGPWL/A MGPWM MGPWL/A MGPWM MGPWL/A MGPWM MGPWL/A MGPWM MGPWL/A 1.63 1.74 1.51 1.34 1.08 0.99 1.20 2.10 20 4.36 3.46 2.87 3.93 3.07 2.76 3.45 3.97 2.74 3.28 2.90 2.59 2.14 1.97 2.34 3.53 25 6.78 5.43 4.51 6.27 4.90 4.40 5.51 6.88 6.39 7.00 6.19 5.54 4.59 4.22 5.02 7.98 32 8.48 11.14 9.36 12.46

(Roller center position) Conveyor lower limit position V Y U CD T R Stroke A H B FT GA 2 x P D QA Head side pressure port (When piping on flange side) Rod side pressure port (When piping on flange side) 2 x P QB W WB E GB A (mm) Circumscribed circle O QA Stroke A B CD CT CZ D E FT FX FZ GA GB H L N 212.5 LANote 5) Model RS2H50 RS2H63 RS2H80 30 84.5 20 8 36 32 64 20 73 93 16 16 128 85 44

When air with high purity is required, please either mount the above separator on the outlet side or use a made-to-order product (refer to page 14-19-50), which is provided with a micro mist separator (Series AWD) instead of a regulator. 3.