Plug-in Unit

rated voltage) None Insulation Short circuit protection Operates at 1A Typ.

VEX1

At that time, the lower poppet valve y fully opens. Construction Component Parts Description No. q w e r t y u i o !0 !1 !

3 Position Cylinder Series RZQ

Change of the return point at the time of power failure At the time of power failure, circuits A to C return the piston to the retraction end. To return the piston to the intermediate point at the time of power failure, add changes to the 3 port valve on the cylinder rear side so that it will be normally open.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

40 60 80 100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 Data 8-9-9 9 Series MXY Table Deflection Table deflection due to pitch moment load Displacement at A when load is applied F Table deflection due to yaw moment load Displacement at A when load is applied F Table deflection due to roll moment load Displacement at A when load is applied F A A F A F F L L L L dimension mm L dimension

Ozone Resistant

40 30 20 10 0 Initial value Measuring point 6 4.

IDX-OM-U010

(Humidity) 20 to 45oC (Relative humidity 85% or less) At outlet pressure dew point of 20oC 4.7m3/min 7.8m3/min 10.9m3/min 15.4m3/min Air Flow capacity At outlet pressure dew point of 10oC 2.8m3/min 4.7m3/min 6.5m3/min 9.2m3/min Rated conditions (Note2) At outlet pressure dew point of 3oC 0.9m3/min 1.6m3/min 2.2m3/min 3.1m3/min Inlet air pressure MPa 0.7 Inlet air temperature oC 50 Ambient

Air preparation filter

12 3.2 AFF,AM,AMD 90D 148 93.5 58.5 110 22 11 20 12 3.2 -22- Doc. no.

Shock Absorbers and Rate Controls

resred lIr) flor. l{rn/rytle (lloloq l{0. tt odell OEtl l ,5lllx l 20 25.0 0.3.3.J 260 126,000 t3,000 19 58 2,890 0.9 lR0tl.5lltxl 20 25.0 0.08-t.3 260 t26,000 13,000 49 68 6,660 0.9 Offll.5Xtx2 20 50.0 0.3-3.5 520 167.000 t3,000 JI 68 2,890 1.0 tR0tXll.5ltlx2 20 50.0 0.08-1.3 520 1o,000 r3,000 49 80 6,660 L0 0tlSl.5flr3 20 75.0 0.3-3.5 7S0 201,000 ,000 32 80 2,890 1.2 0IIlt2.0tltx2 30 50.0

Prevents Micro-Bubbles

0 Insert pin assembly replacement screw Cut the end of the tubing y at a right angle and pass it through the fitting nut u.

MLGP

20 CNS 25 CLS 20 25 CLQ 20 MLGP RLQ 1 10 50 51 100 300 200 1 10 50 51 100 300 200 MLU Stroke (mm) Stroke (mm) ML1C (27) l2 = 50 mm V = 400 mm/s (28) l2 = 100 mm V = 400 mm/s D50 50 -X 100 100 100 100 80 80 80 2063 80 63 63 Data 63 50 50 50 50 10 10 Load weight m (kg) 40 40 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.5 10 50 51 100 300 200 0.5 10 50 51 100 300 200 Stroke (mm) Stroke (

MLGP

20 CNS 25 CLS 20 25 CLQ 20 MLGP RLQ 1 10 50 51 100 300 200 1 10 50 51 100 300 200 MLU Stroke (mm) Stroke (mm) ML1C (27) l2 = 50 mm V = 400 mm/s (28) l2 = 100 mm V = 400 mm/s D50 50 -X 100 100 100 100 80 80 80 2063 80 63 63 Data 63 50 50 50 50 10 10 Load weight m (kg) 40 40 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.5 10 50 51 100 300 200 0.5 10 50 51 100 300 200 Stroke (mm) Stroke (

IR1000/2000/3000

30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate (l/min (ANR)) 14-5-20 20 Series IRV1000/2000/3000 Made to Order Specifications: Please contact SMC regarding detailed dimensions, specifications, and delivery times. 1.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

EX510-GMJ1.eng

(Removal procedure and ) Communication type Communication protocol: Dedicated for SMC Communication speed : 750 kbps Current for input branch Max. 1 A per branch Current for output branch Max. 1.5 A per branch At 0.75 A per branch: 20 m or less At 1.0 A per branch : 16 m or less At 1.5 A per branch : 10 m or less Branch cable length 1: Input terminals are not isolated from Power source. 2

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Test was performed at both energized and de-energized states in the axial direction and at the right angles to the main valve and armature.

Angular Air Gripper Series MHC2/MHCA2/MHCM2

is at least 10 to 20 times the work piece weight.

Clean Gas Filter

HAW How to Order Cartridge made of stainless steel 316 sintered metallic element (Nominal filtration: 120 m) AT IDF IDU SFB 20 02 0 IDF FS Clean gas strainers made of an element (120 m, stainless steel 316 sintered metal) to protect regulators and vacuum regulators are also available.

ASR

Cuts air consumption by operating the return stroke at a reduced pressure.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

20 ZZ + 2 Stroke S + Stroke (mm) A AL Bore size Stroke range Standard Long B1 C D E F GA H H1 I J K KA MM NA P RA S 1 2 ZZ 20 20 20 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 13 17 17 19 27 27 32 41 0 0 0 10 10 10 10 10 26 31 38 47 58 72 89 110 15.5 19.5 19.5 27 32 32 37 37 93 93 95 87 102 102 122 122 5 6 6 8 11 11 13 16 6 8 10

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Y-18, Y-20 135 160 88 71 3.5 160 245.5 I-25 Y-25 160 195 106 80 3.5 175 266.5 I-30 Y-30 175 210 115 6-9-19 20 Series CDS1 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A3/G3/K3 D-A5/A6 Applicable cable O.D. 6.8 to 9.6 ~ = Auto swtich ~ = ~ = Auto swtich D-F5/J5/F5NTL D-F5BAL/F59F D-F5W/J59W D-A44 Applicable