XM, XY flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.
10 (12) 25 6.5 9 7 10 6 38 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l ZZ H e f h ZZ 20 25 32 40 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 (149) 11 11 M5 x 0.8 3 12 35 178 (186) 30 16 55
data. 148 3 Standard Motor/Horizontal Mount Specification Series LG1H20 Dimensions/LG1H202PA 110 4-M6 x 1 thread depth 10 67 4-M8 x 1.25 thread depth 10 20 8H10 depth 10 LJ1 LG1 LC1 LX LC6D/LC6C Switches Encoder signal line Bending radius 80 Motor power line Bending radius 80 35 8H10 depth 8 85 130 Stroke + 145.7 (table movement range) 77.3 77 107 10 95 Work piece mounting reference plane 55
CY1B6 CY1B10 CY1B15 ZZ 81 81 103 Port size M5 x 0.8 M5 x 0.8 M5 x 0.8 CY1B20 to 40 CY1B50, 63 (mm) B 36 46 60 70 86 100 MM x J M4 x 0.7 x 6 M5 x 0.8 x 8 M6 x 1.0 x 8 M6 x 1.0 x 10 M8 x 1.25 x 12 M8 x 1.25 x 12 C 32 38 D 22.8 27.8 35 43 53 66 E 30 32 G 8 8 9 11 14 14 H 20 20.5 22 29 33 33 I 28 34 40 50 58.2 72.2 K 8 10 15 16 25 26 L 66 70 80 92 110 122 N 15 15 17 21 25 25 NA 24 30 36 46 55
M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13
Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68
Bore size [mm] Stroke C D Mounting bolt part no. 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L Material: Chromium molybdenum steel Surface treatment: Zinc chromated 12 5.6 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L 16 4.6 5 40 CQ-M3 x 40 L 10 45 CQ-M3 x
376.4 149.5 78.4 M10 x 1.5 19 13 36.5 10.3 M8 x 1.25 10 112 54 12 16.6 141.2 147.5 90.5 10 12 55 395.6 158.5 78 M10 x 1.5 22 13 36.5 15.8 M8 x 1.25 10 76 13 19.6 199 137.5 18 80 214 113.7 21 50 20.8 M10 x 1.5 12 154 185.8 12 530.9 M12 x 1.75 30 Bore size (mm) 50 63 80 XC PA PB PC PD R RA RB RR S V VA VB VC VD VE VF W XA XB 50 45 10 55 45 68 45 48 11 8 30 32 63.5 71.5 12 3.5 78.4 141.8 137.3
Since there are other applicable auto switches than listed, refer to page 8-19-55 for details.
High-performance filtration P.47 P.55 P.55 P.56 (For coarse filtration) (For coarse filtration) (For coarse filtration) (For precision filtration) Made-to-Order elements X142 X72 X292 X82 Long service life element Branch type element PP (Polypropylene) bag element Filter paper element More compact vessel is possible. (Longevity for L440 is same as L770.)
M24 x 3 effective thread depth 33 143 + 2 (strokes) Width across flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 237 + 2 (strokes) 8 Compact Cylinder Series CQ2 Reed Switches/Direct Mounting Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.
CXSJ6-10 10 15 19 42 52 CXSJ6-20 20 25 29 52 62 CXSJ6-30 30 35 39 62 72 CXSJ6-40 40 45 49 72 82 CXSJ6-50 50 55 59 82 92 5 Series CXSJ Dimensions: 10 Standard Piping 16 12 + ST 4-M3 x 0.5 with depth 4.5 3.5 8 7.5 2-M5 x 0.8 with depth 4 (Piping port) 28.5 8 ST 56 + ST 15 44.5 + ST 8 3.5 13 1 M5 x 0.8 x 4 (Hexagon socket head set screw) 4 16 8 + ST 4.5 4.5 M8 x 1.25 x 7.5 (Bolt holder) 1 40
Note) Accumulated flow rate is reset when the power supply turns OFF. 46 Series PF2D How to Order 4-channel Flow Monitor Remote Type Display Unit PF2D20 M Output specification Option 2 (Refer to page 55.) 0 1 NPN4 outputs PNP4 outputs Accessory / Power supply output cable (2 m) Nil 4C None Sensor connector (4 pc.) Unit specification Option 1 (Refer to page 55.)
M24 x 3 effective thread depth 33 143 + 2 (strokes) Width across flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 237 + 2 (strokes) 8 Compact Cylinder Series CQ2 Reed Switches/Direct Mounting Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.
Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.
(mm) GC F D BB A 10 16 15 15 15 18.3 12 18.3 14 20 4 5 8 8 5 5 11 11 CA GA BA CB GB 5 5 NN Z 82 83 54 55 M4 x 0.7 M5 x 0.8 S NB NDh8 20.5 20.5 9.5 9.5 10-0.022 0 MM Bore size H 28 28 17 20 NA M10 x 1.0 12-0.027 0 M12 x 1.0 With air cushion With air cushion type is not available for 21-/22-CJ2.
MM Bore size (mm) NB NDh8 24.5 20.5 20.5 GC F D BB A 6 10 16 NN Z 85.5 82 83 T 3 CA GA BA CB GB 5 5 S NA H 28 28 28 M3 x 0.5 M8 x 1.0 15 15 15 7 9.5 9.5 10-0.022 0 8-0.022 0 57.5 54 55 15 15 18.3 12 18.3 14 20 3 4 5 17 17 20 8 8 8 12 5 5 11 11 11 M10 x 1.0 M4 x 0.7 12-0.027 0 M12 x 1.0 M5 x 0.8 With air cushion Air cushion type is not available for 21-/22-CJ2.
24 63 30 8.5 20 3 8 1/4 27 53.5 30 40 47.5 47.5 23 53.5 64.5 45.5 52.5 99.5 47.5 68.5 XSA1-2V 50 XSA2-2S 63 31.5 73.5 35 29.5 63 32.5 49.5 50 57 25.5 63 67 55 55 102 57 71 XSA2-2V 56 XSA2-43S 64.5 31 3/8 XSA2-43V 67 22 25 11.5 5 10 78 67.5 54 61.5 67.5 59.5 61.5 XSA3-32S 63 31.5 40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5
ZP3EU-F6-TAL16 [Weight: 249 g] M16 x 1.5 Width across flats 22 Width across flats 24 Width across flats 24 Width across flats 22 M16 x 1.5 Rc1/8 Rc1/8 6 6 19 25 55 6 6 19 30 25 55 32 32 30 4 4 11.11) 11.11) 30 30 (Rotating angle) (Rotating angle) Applicable pad part no. ZP3E-125UM ZP3E-100BM 78.6 93.8 Applicable pad part no.
(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.