Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: V (Panel Mount Adapter for w/Flow Adjustment Valve)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: V (Panel Mount Adapter for w/Flow Adjustment Valve)

Air Cylinder

V V V V V V V V Standard V V V V V V V V V D v v v v v v v V v CM2lF v v v V V v CM2l-l J K V CM2lH V v v V v v v V 10-, 11v v v v v v v 25ANote 6) CM3 CG1 CG3 Note 5) JMB V V V v V v 20Note 4) v v v V v CM2l R V V v V CM2lX v v CM2lM Note 5) MB MB1 v XB6 CA2 v v XB7 v v v v v XB9 v v v v v v XB12 CS1 v v v XB13 CS2 v XC3 v v v XC4 Note 5) v v v XC5 v v XC6 v v v v v XC8

Modular F.R.L. Units

V V 2 Metal bowl V V V V V V 6 Nylon bowl V V V V V V C With bowl guard V *5 *5 *5 *5 a Bowl *4 6C With bowl guard (Nylon bowl) V *6 *6 *6 *6 + Semi-standard Nil With drain cock V V V V V V J*7 Drain guide 1/8 V Drain guide 1/4 V V V V W*8 Drain cock with barb fitting (for 6 x 4 nylon tube) V V V V + Nt b Drain port c Flow direction Nil Flow direction: Left to right V V V V V V R

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Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

Rotary Actuator

V V V J* Z* J* J, Z* J* -XA56 Change of double shaft length (Both with four chamfers) V V V Z* -XA57 Change of double shaft length (Without keyway, With hour chamfers) V V V J* -XA58 Reversed shaft, Change of shaft length (With four chamfers, Without keyway) V V V V T* J* -XA59 Reversed shaft, Change of shaft length (With four chamfers) V V X* MRQ Combination Chart of

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Model 90 5 V,12 V 5 V,12 V, 24 V Parallel cord Reed switch Solid state switch Solid state switch Reed switch IC circuit CRB2FW10 P211070-2 Yes Yes Yes No No 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V 90A Heavy-duty cord CRB2FW15 P211090-2 97 Parallel cord CRB2FW20 P211060-2 2-wire 93A 100 V CRB2FW30 P211080-2 For 10 and 15 T99 Relay, 24 V 12 V Grommet T99V PLC Heavy-duty cord S99

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200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V 1 2 3 4 7 8 J 5 6 Enter the valve and blanking plate to be mounted under the manifold base part number.

CV/MVGQ

switch Solid state switch PLC B54 Relay, PLC 100 V, 200 V 100 V 200 V Yes Yes CC 12 V A33 A34 A44 B59W PLC Terminal conduit 24 V 2-wire RB DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) G59 J 5 V 12 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 3-wire (NPN) 24 V IC circuit G5P 3-wire (PNP) Grommet K59 100 V, 200 V D2-wire G39 K39 G59W IC circuit 3-wire

CV/MVGQ

switch Solid state switch PLC B54 Relay, PLC 100 V, 200 V 100 V 200 V Yes Yes CC 12 V A33 A34 A44 B59W PLC Terminal conduit 24 V 2-wire RB DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) G59 J 5 V 12 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 3-wire (NPN) 24 V IC circuit G5P 3-wire (PNP) Grommet K59 100 V, 200 V D2-wire G39 K39 G59W IC circuit 3-wire

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Model 90 5 V,12 V 5 V,12 V, 24 V Parallel cord Reed switch Solid state switch Solid state switch Reed switch IC circuit CRB2FW10 P211070-2 Yes Yes Yes No No 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V 90A Heavy-duty cord CRB2FW15 P211090-2 97 Parallel cord CRB2FW20 P211060-2 2-wire 93A 100 V CRB2FW30 P211080-2 For 10 and 15 T99 Relay, 24 V 12 V Grommet T99V PLC Heavy-duty cord S99

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Model 90 5 V,12 V 5 V,12 V, 24 V Parallel cord Reed switch Solid state switch Solid state switch Reed switch IC circuit CRB2FW10 P211070-2 Yes Yes Yes No No 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V 90A Heavy-duty cord CRB2FW15 P211090-2 97 Parallel cord CRB2FW20 P211060-2 2-wire 93A 100 V CRB2FW30 P211080-2 For 10 and 15 T99 Relay, 24 V 12 V Grommet T99V PLC Heavy-duty cord S99

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

PCB (With surge voltage suppressor) r Seal material t Orifice diameter and port size V V V Symbol Seal material N NBR F FKM E EPDM Symbol Orifice diameter [mm] Port size Size 10 20 30 101 1.6 1/8 V 201 2.4 1/8 V 301 3.2 1/8 V 302 1/4 V 303 3/8 V 402 4.0 1/4 V V 403 3/8 V V 502 5.6 1/4 V V 503 3/8 V V 702 7.1 1/4 V V 703 3/8 V V CS Conduit (With surge voltage suppressor)

ISO Cylinder

Cushion Air cushion V Mounting bracket*1 Nil Rubber bumper (Standard) C Air cushion Applicable mounting bracket Nil None L Single foot M Double foot G Flange U Trunnion N Clevis Action Head cover type Mounting bracket L M G U N Rod boot E V V V V V F V V V V Y V V V V Rubber bumper Nil Without rod boot J Nylon tarpaulin (One end) K Heat resistant tarpaulin (One end) Air cushion E V V

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D-M9N(V)/D-M9P(V)/D-M9B(V) Direct Mounting Style . D-Y59A, B /D-Y69A, B /D-Y7P(V) Direct Mounting Style . 2-color Indication Type . D-F79W/D-F7PW/D-J79W Rail Mounting Style. D-Y7NW(V)/D-Y7PW(V)/D-Y7BW(V) Direct Mounting Style ... D-F9NW(V)/D-F9PW(V)/D-F9BW(V) Direct Mounting Style . 2-color Indication Type with Diagnostic Output. D-F79F Rail Mounting Style.

Battery-less

LEFS v v E339743 v v v v 11-LEFS v v E339743 v v v v 25A-LEFS v v E339743 v v v v LEFB v v E339743 v v v v LEJS v v E339743 v v v v 11-LEJS v v E339743 v v v v 25A-LEJS v v E339743 v v v v LEJB v v E339743 v v v v LEY25/32/63 v v E339743 v v v v LEY100 v LEYG v v E339743 v v v v LESYH v v AC servo motor Compatible

Auto Switch Guide

RZQ Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL MI W S CEP1 CE1 Auto Switch Mounting Bracket Part No.

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Standard equipped with shock absorber -X 75 100 125 150 200 250 300 20 25 32 40 50 63 80 100 20 25 32 40 50 20Series MGC P . 8-21-6 Data Series MGG V V V V V V V V V V V V V V Guide Cylinder Guide Table Cylinder with Turntable Series MGC Long stroke Bore size (mm) Standard stroke (mm) Compact type of series MGG Lightweight, space-saving 250 300 350 400 450 500 600 700 800 900 1000 1100 1200

REA/REB

24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 3-wire (NPN) 2-wire Relay, PLC ML2B 5 V, 12 V IC circuit 3-wire (PNP) C J G5-S 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V CV 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example)

REA/REB

24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 3-wire (NPN) 2-wire Relay, PLC ML2B 5 V, 12 V IC circuit 3-wire (PNP) C J G5-S 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V CV 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example)