Precision Clean Regulator

min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics (Representative value) Fluid: Air Initial

Speed Controller with One-touch Fittings

min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS-FG AS-FP AS-FM AS-D Number of needle rotations Number of needle rotations Number of needle rotations AS-T Construction AS1002F, AS2002F, AS2052F AS1002F-02, AS3002F, AS4002F ASP w e r u !

SRP

min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Fluid: Air Initial setting

SRP

min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Fluid: Air Initial setting

Vacuum Regulator

Body size 10 20 Max. flow 140 l/min (ANR) Max. flow 240 l/min (ANR) Symbol X1 Specification Integrated digital pressure switch for panel mounting Accessory w Single sided connections None Note 1) Nil A Single sided connections With pressure gauge Note 2) Note 3) (IRV10A: With GZ33-K-01, IRV20A: With GZ43-K-01) G ZN ZP ZA ZB Note 3) With ZSE30A-01-N-ML With ZSE30A-01-P-ML With ZSE30A-01-A-ML

3 Port Solenoid Valve

D End Plate> SS070A012A Replacement Parts No. 9 No. Description Material Number < D Side End Plate Assembly > 3 D side end plate assembly No.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Stroke for Auto Switch Mounting (mm) ML1C Bore size (mm) No. of auto switches mounted Applicable auto switch Auto switch model 40 6 4 D-M5/M5W/M5TL D-E7A/E80A 25 6 4 32 6 4 D-M5, D-M5W, D-M5TL D-E7A, D-E80A D10 15 5 10 1 pc. 2 pcs.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Stroke for Auto Switch Mounting (mm) ML1C Bore size (mm) No. of auto switches mounted Applicable auto switch Auto switch model 40 6 4 D-M5/M5W/M5TL D-E7A/E80A 25 6 4 32 6 4 D-M5, D-M5W, D-M5TL D-E7A, D-E80A D10 15 5 10 1 pc. 2 pcs.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Stroke for Auto Switch Mounting (mm) ML1C Bore size (mm) No. of auto switches mounted Applicable auto switch Auto switch model 25 6 4 32 6 4 40 6 4 D-M5/M5W/M5TL D-E7A/E80A D-M5, D-M5W, D-M5TL D-E7A, D-E80A D10 15 5 10 1 pc. 2 pcs.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

(g) AS A2 A1 M L3 L2 L1 d T1 D1 D2 H2 H1 Max.

ISA2

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

AWM20 to AWM40

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AWD20 Rc 1/4 AWD30 Rc 3/8 AWD40 Rc 1/2 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 0 100 200 300 400 500 0 0 50 100 0 0 100 200 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Pressure Characteristics (Representative

AWM20 to AWM40

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AWD20 Rc 1/4 AWD30 Rc 3/8 AWD40 Rc 1/2 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 0 100 200 300 400 500 0 0 50 100 0 0 100 200 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Pressure Characteristics (Representative

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

Rc(PT) Thread F G(PF) N NPT Accessories Options Table: Accessory/Option combinations Available Not available Depending on model L D J T AM150 R AM250 AM350 AM450 Applicable models Accessories /Options C C D -J -R AM550 AM650 AM850 Port size N.C. auto drain N.O. auto drain Accessories 06 3/4B 01 02 03 1/8B Drain guide 1/4B 10 14 20 1/4B 1B 11/2 B Options INOUT reversal 3/8B Element service

Serial Transmission System Series EX250 Series EX500

PWR COM D D D D D D 3 2 1 Station D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Note) Available with manifold block for station addition. Refer to pages 77 and 81 of SV catalog (ES11-81A).

Series H, DL, L, LL Self-align Fittings

L D 4 6 DP-04 DP-06 5.6 7.6 0.2 0.5 8 DP-08 8 9.6 0.8 10 DP-10 11.6 1.2 12 DP-12 13.6 1.6 Swivel elbow: L Effective orifice (mm2) Applicable tube O.D. (mm) Thread R(PT) H1 (Hex.) H2 (Hex.) H3 (Hex.) H4 (Hex.) Weight (g) Part No.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

plug connector with cover (LL) 52-SY5120-LL-01 (-F2) Insulation: Red (+) Insulation: Black () 4.1 0.3 mm2 12 14.7 L 104 (Lead wire length) Cable type (TT) 52-SY5120-TT-01 (-F2) Lead wire marking No.1 (+), No.2 () 5.9 0.75 mm2 L 120.8 (Lead wire length) Max.10 5 ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5220-L-01 (-F2) 22.6 16.7

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

(or 3 kPa) Repeatability Note 2) 0.4 MPa setting (Ex.)10-ARP30-02BG 1 L/min [ANR] or less (at P2 = 0.4 MPa) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.6 L/min [ANR] or less (at P2 = 0.2 MPa) Air consumption 0.6 MPa setting (Ex.)10-ARP30-02BG-3 1.4 L/min [ANR] or less (at P2 = 0.6 MPa) 1/8 1/4 1/8 Pressure gauge port size 5 to 60C (No freezing) Ambient and fluid temperature With a digital pressure

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

(or 3 kPa) Repeatability Note 2) 0.4 MPa setting (Ex.)10-ARP30-02BG 1 L/min [ANR] or less (at P2 = 0.4 MPa) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.6 L/min [ANR] or less (at P2 = 0.2 MPa) Air consumption 0.6 MPa setting (Ex.)10-ARP30-02BG-3 1.4 L/min [ANR] or less (at P2 = 0.6 MPa) 1/8 1/4 1/8 Pressure gauge port size 5 to 60C (No freezing) Ambient and fluid temperature With a digital pressure

PF2A/PF2W

Flow rate measuring range Minimum set unit PF2 0.5 to 10.5 l/min 0.5 to 10.5l /min 1 to 10 l/min 0.1 l/min 0.1 l/pulse 2.5 to 52.5 l/min 2.5 to 52.5 l/min 5 to 50 l/min 0.5 l/min 0.5 l/pulse 5 to 105 l/min 5 to 105 l/min 10 to 100 l/min 1 l/min 1 l/pulse 10 to 210 l/min 10 to 210 l/min 20 to 200 l/min 2 l/min 2 l/pulse 25 to 525 l/min 25 to 525 l/min 50 to 500 l/min 5 l/min 5 l/pulse IF