D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04
M U W M X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole DIN terminal Conduit terminal D G1/2 S Q F Cable 6 to 12 34 D Q2 F (44) 31.5 32 25 R T E C R Y E C 1.5 1.5 S2 B B1 A A Y B B1 2 x P Port size 2 x P Port size U W M U W M X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole (mm) Mounting bracket dimensions Port size P 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 A B B1 C D E F Size M 12.8 19 19 U 46 56
Example) If P = 0.6 MPa, a max. stroke = the respective stroke in the graph x MVGQ 49 45 39 30 0.7 Rod side flange style: F Head side flange style: G 259 237 211 168 0.3 Foot style : L L CC 0.6 0.5 199 183 162 129 0.5 W W W F RB Figure (1) 168 154 136 109 0.7 Load factor J 119 110 97 76 0.3 m 90 83 73 56 0.5 G D74 68 60 46 0.7 1) = 0.7 or less -X 20m Data 2) = 0.5 or less m 3) = 0.9
Applicable model HRL-BB002 HRLE050-m-m HRL-BB001 HRLE090-m-m y u t Parts List r i No. Description Material Applicable model Size Qty.
Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE
[97.5] 105 [106] 116 [117] 117 [118] 128 [129] 129 [130] 10 16 84 72 60 52.5 M8 x 1 9.5 12.5 M4 x 0.7 34.5 28 8 4 14 12 15 0 0.022 8 MK(2) 85 73 61 52.5 M10 x 1 9.5 12.5 M5 x 0.8 40.5 28 8 5 20 18 15 0 0.022 10 RS Q G Single Acting, Spring Extend/Axial Foot Style (L) RS H A CVJ3L T Bore size Stroke 48 [49] RZQ M5 x 0.8 28 [34.5] M5 x 0.8 Manual override MI W S Width across flats B1 CEP1 CE1
7 w q!9 t !8 i !0 @0 @0 y @1 !6 w q !9 t !8 !0 i Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !
LEM-OM00203 PRODUCT NAME Electric Actuator / Low profile slider type MODEL / Series / Product Number LEM Series Applicable models: LEMB, LEMC, LEMH, LEMHT L LE EM MB B 2 25 5/ /3 32 2 L LE EM MC C 2 25 5/ /3 32 2 ( (C Ca am m f fo ol ll lo ow we er r g gu ui id de e t ty yp pe e) ) ( (B Ba as si ic c t ty yp pe e) ) L LE EM MH H 2 25 5/ /3 32 2 L LE EM MH HT T 2 25 5/ /3 32 2
1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM105R Description No. Material Component Parts: LVM10R3, 10R4, 10R6, 105R !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bushing assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 SUY u Spacer 8 i !
SY114/SY124, SY114A/SY124A only. 2.1-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) 1 (P) q y e r w i SY SYJ VK VZ VT VT VP A R P o u t !0 !1 VG VP VQ VQZ Part No.
Linearity within 1% (Full span) Hysteresis 0.5% (Full span) Repeatability 0.5% (Full span) ITV (Electro-pneumatic regulator) Mist separator (0.01 m or less) (0.3 m or less) High-speed response time 0.1sec Air Filter (5 m or less) IR (Precision regulator) W (Without load) 14-8-2 3 Compact Electro-pneumatic Regulator Series ITV0 How to Order F.R.L.
Technical Data 1503 CY1S Series Dimensions CY1S/Bilateral piping type (NA) T GA S + Stroke Z + Stroke (NA) T GA PA HG HC HB H 2 x Square nut groove E F HB 4 x MM Thread depth M 2 x JJ (Equal about center) d D d PB (Equal about center) HT 4 x LD QW QW PW GP W HT 2 x P (Piping port) 2 x UU (Bumper bolt) HP HA HG Q + Stroke L GB A G R GA GB A G GA 5.3 2 x For holding switch rail (6.9) 2 x 2
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
(kg) Fig. (2) Overhang: Ln (mm), Correction Value of Moment Center Position Distance: An (mm) Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Dynamic moment L1 A1 L3 A5 L2 A3 MXH W Mp Mr W MXU W My L3 A6 W L1 A2 L2 A4 MXS W Mey Mep MXQ Note) There is no need to consider this load factor in the case of using perpendicularly in a vertical position.
0.1 x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 1548
How to Order 25 100 B 2 S A1 S2 w e r t u y i o !0 !
Center/Pressure Center VZ3320 Grommet (G), (H) VZ3 20-M5 G H 3 4 5 VZ3420 VK Manual override (Non-locking) VZ3520 VZ (Lead wire length) (Mounting hole for manifold) VF G: 300 mm H: 600 mm VFR VP4 VZS VFS VS4 (Mounting hole) VQ7 2-M5 x 0.8 (PE port) EVS VFN (Piping port) L plug connector (L) VZ3 20-L-M5 M plug connector (M) VZ3 20-M-M5 3 4 5 3 4 5 300 (Lead wire length) 300 (Lead wire length
This could cause auto switch malfunction. 7.5 M Max. 15 Stroke: S MXP12-15B Width across flats 12 A H 4 x M4 x 0.7, depth 4.5 M8 x 1 14.3 8.5 MA 40.8 7.1 14.4 8 4 11 20.3 25 24 8.5 3 0 +0.030, depth 3 3 0 +0.030, depth 3 A Piping port 2 x M5 x 0.8 (Plug: M-5P) 19 1.5 4 x M5 x 0.8 Pilot hole diameter 4.2 220.05 20 W Piping port D B 80.05 2 x M5 x 0.8 10 33 J 3 0 +0.030, depth 1.5 5 12 9.5
A22 Symbol: A23 Symbol: A24 30 30 DA L RD MM 30 MM DA 30 MM MM DB DB T T C B A H AL H A L K H A A W H H Symbol: A25 Symbol: A26 Symbol: A27 Symbol: A28 Symbol: A29 DA 30 MM MM DA 30 DA 30 30 MM L W MM A L H AL H LB K A AL A H L A H T AL L K H MM Symbol: A30 30 MM W A T H 84 Simple Specials Series CP96/C96 Symbol Change of Trunnion Bracket Mounting Position 2 -XC14 Series C85 Series
(g) n: Stations W = 100n + 151 W = 79n + 127 W = 61n + 101 Note 1) For 10 stations or more (5 stations or more for the 53-SS5Y7), supply pressure to P port on both sides and exhaust from EA/EB port on both sides.