MLU

NA K 2 x 4-NC counterbore Prepared hole diameter NE H S + Stroke ZZ + Stroke BY BB BS + Stroke BA 2-BT (mm) Stroke range Model A BY D GW GY H H1 B1 C B AL BA BB BP BS BT ET GA GA1 GB GC GC1 EY 22 26 30 35 19.5 23.5 27 32 24 28 32 39 8 6.5 9 12 9 6.5 8 10 17 19 22 27 MLUB25 MLUB32 MLUB40 MLUB50 M5 x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11

Digital Flow Switch Series PFA For Air Series PFW For Water

P P 1 to 10 PFA30m P P P 5 to 50 P P P 10 to 100 31m P P P 20 to 200 P P P 50 to 500 P P P P 150 to 3000 P P P P 300 to 6000 P P P P 6000 to 12000 Series variations For Water Flow rate Remote type Output specification Port size (Rc, NPT, G) Integrated measurement display type Display unit Sensor unit Switch output 3/8 1/2 3/4 range l/min PFW31m 30m 32m PFW704 720 740 PFW504 520 540 P P

Plate Cylinder with Lock Series MLU

hole diameter NE S + Stroke H ZZ + Stroke BY BB BS + Stroke BA 2-BT (mm) Stroke range Model BY C D GW GY H H1 B AL BA BB BP BS BT ET GA GA1 GB GC GC1 EY A B1 22 26 30 35 19.5 23.5 27 32 24 28 32 39 8 6.5 9 12 9 6.5 8 10 17 19 22 27 M5 x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5

CM2

8 45 25 26 34.5 37.5 M10 X 1.25 19.5 17 6 15 10 5.5 M26 X 1.5 9 9 22 19 30 14 30 12 25 13 8 45 32 26 21 41.2 M14 X 1.5 21.5 42.5 46.5 22 8 15 7 M32 X 2 11 10 24 30 39 18 38 14 16 11 50 40 32 Dimensions by stroke Built-in One-touch fitting (mm) Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore Symbol P Q S Z ZZ S Z ZZ S Z ZZ S Z ZZ S Z ZZ Bore 87 158 167 112 183 192 137 208 217

MGF

Allowable horizontal direction load l l m m0 l = 50mm Graph 1 l = 100mm Graph 2 v = 100mm/s or less Graph 6 v = 50mm/s or less Graph 5 300 300 MGF100 MGF100 50 200 200 MGF100 30 40 MGF100 MGF100 100 100 MGF63 30 MGF63 MGF63 20 50 40 50 40 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load weight m (kg) Load weight m (kg) 30 30 20 20 20 MGF40 MGF40 10 10 10 MGF40 MGF40 10 5 4 3 5 4 3 2 2 5

Air Slide Table Series MXQ

Collision speed V mm/s 13 13 13 13 18 31 31 31 31 36 23 41 42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

MHL2

Load voltage Electrical entry Lead wire length (m) Auto switch model Electrical entry Indicator light Wiring (Output) Pre-wire connector Special function Applicable load In-line 0.5 (Nil) 3 (L) 5 (Z) DC AC Type Perpendicular 3-wire (NPN) 3-wire (PNP) Y59A Y69A IC circuit 5 V 12 V Y7P Y7PV Solid state switch 12 V Y59B Y69B 2-wire Relay, PLC Grommet Yes 24 V 3-wire (NPN) 3-wire (PNP) Y7NW

ITVH

SRF ITV +24 V +24 V Output power Output power IC 0 V 0 V Control/Input power Control/Input power ITVH ITVH 24 V +24 V ITVX 4. Each product needs to be powered by one power supply unit.

Hydraulic Cylinders

CHKDB Bore size Rod end thread type Stroke Y7BA S R Water resistant cylinder Water resistant solid state switch with 2-color display NBR Seal (nitrile rubber) FKM Seal (fluoro rubber) R V F9BA Y7BA 20 and 25 32 to 100 Refer to page 2 for specifications.

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread)

Centering Unit

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

MRQ

The amount of air requirement of rotary actuator = 0.06 x V x (P/0.1013)/t /min(ANR) V: Inner volume = cm3 P: Absolute pressure = {Operating pressure (MPa) + 0.1013} t: Operating time = s CRB1 Calculate the required air volume separately for the linear motion part and the rotary motion part.

VNH

Main port 2 Port 2-Rc 2-Rc Pilot port A B C D E F G H I 3 Port 3-Rc 3-Rc 3 8 3 8 Rc 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1 2 2-Rc 3 4 2-Rc1 Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B

XL-OMY0002

S 6-2. XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output Max. 30 V, 80 mA Residual voltage 1 V or less 1.5 MPa Withstand pressure 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at no load) Current consumption

Guide Table Series MGF

Allowable horizontal direction load l l m m0 l = 50mm Graph 1 l = 100mm Graph 2 v = 100mm/s or less Graph 6 v = 50mm/s or less Graph 5 300 300 MGF100 MGF100 50 200 200 MGF100 30 40 MGF100 MGF100 100 100 MGF63 30 MGF63 MGF63 20 50 40 50 40 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load weight m (kg) Load weight m (kg) 30 30 20 20 20 MGF40 MGF40 10 10 10 MGF40 MGF40 10 5 4 3 5 4 3 2 2 5

Series 10-, 21- AF-A Air Filter

Fittings & Tubing Air Cylinders Rotary Actuators Bracket (Option) Bracket (Option) R R V Q V Q IN OUT B C IN OUT Clearance for maintenance G B C 2 x P (Port size) 2 x P (Port size) Hexagon width across flats 14 1/8 Drain Hexagon width across flats 17 1/4 E A Clearance for maintenance G Drain A AF50/60-A 1021J D M U S N T Bracket (Option) R V Q C B IN OUT 2 x P (Port size) Hexagon width across

VY511, VYU5

PLC Valve VY511-020 Controller VYU5l-D Electrical circuit W Air circuit Air cylinder Air circuit 3 Position valve E-P HYREG P2 SOL.b R S A P SOL.a 6 Throttle valve (Variable throttle) MR Throttle valve Manual valve (Fixed throttle) MP 1.15-30 Cylinder Load Changes 3.

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Connector Type: S (M12 connector type)