Cylinder with Lock

Lock unit Rod 4 C O N T E N T S Cylinder with Lock CP96N/C96N Series Model Selection p. 6 Working Principle p. 8 CP96N Series VCP96N Series/Double Acting, Single Rod/Double Rod How to Order p. 9 Specifications p. 10 Construction (Single Rod) p. 12 Dimensions (Single Rod) p. 13 Construction (Double Rod) p. 16 Dimensions (Double Rod) p. 17 Auto Switch Mounting p. 23 VAccessories p

ZX

analog Nil 21 22 23 24 P kPa Applicable to plug connector.

PF2A/PF2W

Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

215 Electric Actuator/Guide Rod LEYG Series p. 215 Electric Actuator/Slider LEF Series p. 31 Electric Slide Table LES/LESH Series p. 307 Electric Rotary Table LER Series p. 399 Electric Actuator/Miniature LEPY/LEPS Series p. 369 Electric Gripper (2-Finger Type, 3-Finger Type) LEH Series p. 425 * Order the actuator separately, including the actuator cable.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(g) R A B A A 29 28 27 26 25 24 23 22 21 20 No. 460.5 448 435.5 423 410.5 398 385.5 373 360.5 348 L dimension R P R P P 82.9 80.6 78.4 76.1 73.9 71.6 69.4 67.1 64.9 62.6 Weight (g) B SY7000 DIN rail dimensions and weight VZ1000-11-4SY3000 SY5000/7000 Refer to L dimensions Enter a number from the DIN rail dimension table below in the .

Mechanical Valves Series NVM, NVFM, NVZNI

7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: I I I SM.9.

IIIIIII

7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: SM.9.

Digital Flow Switches, Series PF2A, Series PF2W

Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM

LEY-OM007

SVRE ON 2 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG SV0.8* 1.RESET SVRE ON 2.SETUP SV10 No. -50- 1 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG 2 /code1-196 2 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG 3 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG / 4 / P.41 7.2 / P.42 7.2 5 6 /P.35 5. 7 8 0 () /P.21 4.3[] 9 /P.21 4.3[] /P32 4.4 INC/ /P.21 4.3[] 11 /P.44 7.3 12 /P.45 7.3 No. 2 / 1 -

Refrigerated Air Dryers

. 0.8 m) [200 VAC specification] Terminal block K L H M N J 4 x 13 P [200 VAC specification] [100 VAC specification] Power cable (Length: approx.1.9 m) Power cable outlet (17) Dimensions [mm] Model Port size A B C D E F G H J K L M N P Q IDF1E Rc3/8 226 410 413 69 101 270 32 38 150 21 330 240 15 IDF2E 51 125 232 138 24 327 IDF3E 473 67 304 33 73 31 36 154 21 330 IDF4E Rc1/2 13 IDF6E 453

Direct Solenoid

p, (1) ru&or @$prugd.Err 13,11) hdE bi|Eme$nbr! d.bir21, 0 ) d1.r l s, t4 d.i.ir 13, (2)d.'

Compact Vacuum Ejector Series ZQ

for applicable tubing diameter of 8) 3.5 2-R1.75 Release valve P PE 13 (Pitch) P =10 L2 L1 Release flow adjusting screw 8 P PE Exhaust part 2-3.5 62.8 (Body mounting hole Note 1)) 3 75 Suction filter With L type plug connector Vacuum pressure switch PE P EXH S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO

ZQ

filter ZF With L type plug connector ZP Vacuum pressure switch PE P EXH ZCU AMJ S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

CM2

Dimensions are the same as the standard model. 2.35J 11.8 40 Construction: Refer to p.1.4-9 Dimensions: Refer to p.1.4-10 to 1.4-18 Construction: Refer to p.1.4-9 Dimensions: Refer to p.1.4-10 to 1.4-18 Refer to p.1.4-4 for other specifications.

2 Phase Stepper Motor/Without Motor Brake Series LXS

70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

VQC

10A-1 VVQ2000-10A-1 Dual flow fitting assembly VVQ1000-52A-C8 VVQ2000-52A-C10 Perfect block VVQ1000-FPGVVQ2000-FPGCYL to port Conforms to IP40 Individual SUP spacer VVQ1000-P-1-C6 VVQ2000-P-1-C8 Port plug VVQ0-58A (For VQC1000) VVQ1000-58A (For VQC2000) EXH block plate assembly Elbow fitting assembly VVQ1000-F-L VVQ2000-F-L Electrical wiring specifications [-K] C3 C4 C6 M5 VVQC1000-19AD S

Integrated Controller

p. 44 Construction p. 46 Dimensions p. 47 Auto Switch Mounting p. 29, 53 Solid State Auto Switch, Normally Closed Solid State Auto Switch, 2-Color Indicator Solid State Auto Switch p. 30, 54 e-Actuator Electric Specifications p. 59 Wiring Examples p. 60 Operation Data Setting p. 61 Options p. 62 Slider Type Specific Product Precautions p. 33 Rod Type Specific Product Precautions

3 Port Solenoid Valve Rubber Seal Series SY100 1

L plug connector (L) M plug connector (M) 28.9 (For AC) 27.6 (For DC) R P R P 15.6 39.1 (For DC) 45.6 (For AC) 37.2 (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) 23.6 Other dimensions are same as grommet type.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

/surge voltage suppressor) + + + + 67 [74] 51.6 35 L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 63.5 63.5 63.5 63.5 X X X X P P P P 71.3 [73.5] 81.1 [83.3] 66.3 72.8 80.2 R R R R 90.2 Max. 10 91.1 Pg7 78.1 [85.1] Approx. 300 (Lead wire length) 54 71.5 M8 x 1 81.7 51.6 Approx. 300 (Lead wire length) 93 67 [74] 100.5 Refer to the page 68 for dimensions with connector