SMC

room Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean blow (With clean gas filter) Line D: For N2

VK3000

VFS ~ = ~ = VS4 VQ7 L Dimension EVS n: Stations n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 VFN L2 Body ported (Top ported) Type 21 Manifold Grommet: G DIN terminal: D VV5K3-21Station (P port) (P port) n1 = Number of VK3000 n2

VS 8-2/VS 8-4

Nil B Push type Locking type (Tool required) CE compliant Internal/External pilot Nil Q CE compliant Nil R Internal pilot External pilot 27 Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Dimensions (F kit) VV801--FD-W1-M 2 x 1/2" 3(R) port L1 = 19 x n1 + 27 x n2 + 85 L2 = L1 + 17 2 x 1/8" Pilot port n1: Piece of Size 18 mm n2: Piece of Size

VXA31/32

Fluid Standard specifications Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x 102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 10-1 Pa) (V, M) Non-leak (106 Pam3/s or less) (V, M) JIS Symbol A C.O.

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P2 P' n2 nl Hysteresis mode ~erE!SlS rrode lS1andan2 Window oomparator mode _ "'"mode 1"'1 1 returns after vacuum break pressure is applied,can be exactly detected.

ZSE5/ISE5

~ Fluid Fluid that will not corrode SUS304 and SUS630 PI P2 Wti:ldow cOfTl)aratoc rnode (standard) nl n2 Wifldow corTlJ3rator mode (reversed) Temp. characteristics 3%F.S.max.

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I ::,b[1 OFF~ _ mode ("n2 VV'incloYJ ccmparala' mode WindJw ccrnparruor mode 1% F.S . max.

MQQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Flat ribbon cable connector Socket: 10 pin MIL type with strain relief Conforming to MIL-C-83503 Applicable connector Internal wiring +COM, COM Location Valve 4(A), 2(B) port Porting specifications Direction Lateral, Upward, Downward Metric 1(P), 3/5(R) port: 8 4(A), 2(B) port: M5, 4, 6 Port size Inch 1(P), 3/5(R) port: 5/16" 4(A), 2(B) port: 5/32", 1/4" Weight W (g) Note 2) n1: Stations n2

CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, 1.47136 lb

PF2M7.eng

Summary of Product parts Item Default setting Body Flow adjustment valve [FLU] Switch the flow rate [Air] Dry air, N2 [rEF] Setting the units criteria [Std] Standard condition [ L] L/min (L) Lock ring Display [Unit] Measurement unit seitching 1 [F 0] [FLU] [norP] SW output PNP/NPN setting 4 [PnP] PNP output [oUt] SW output Piping port (OUT side) [i_o] SW/external input setting 4 5 [oUt1]

PFM7.eng

Only dry air, N2, CO2 and Ar are applicable. Flow error Set value Bracket There is a flow of 5% or more in the wrong direction. Ensure the flow is in the correct direction. Hysteresis P_1 Flow [L/min] Bracket mounting Mount the bracket using the mounting screws supplied. The required tightening torque is 0.50.05 Nm.

MQQ

N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32

Clean Gas Filter

Applications and Circuit Examples Cartridge type Cartridge type Disposable type Disposable type Refrigerated air dryer Heatless dryer Super mist separator After-cooler Air source Gas filtration and gas flow Odor removal filter Air tank Main line filter Mist separator Micro mist separator SFB3 SFC1 Micro mist separator with prefilter Membrane air dryer N2 gas SFB3 SFC1 SFA, SFB1 Clean blow

Series KP/KPQ/KPG

EPDM Stud Polypropylene M Clean blow off system Clean fitting Clean room KP Clean tubing TPH/TPS Clean blow off Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow off N2 gas 2 Low particulate generation KP Resin: PP Metal: Stainless steel (SUS304) Completely

MQQ

bushing O-ring NBR Nickel plated Snap ring Carbon tool steel Nickel plated Rod end nut Steel Mounting nut Steel 13 Series MQM Lateral Load Resisting Low Friction Cylinder Metal Seal Dimensions Standard type/MQMLB 6 Mounting nut M12 x 1 Rod end nut 15 2-M5 x 0.8 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2

Series KP/KPQ/KPG

EPDM Stud Polypropylene M Clean blow off system Clean fitting Clean room KP Clean tubing TPH/TPS Clean blow off Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow off N2 gas 2 Low particulate generation KP Resin: PP Metal: Stainless steel (SUS304) Completely

KP/KPQ/KPG

EPDM Stud Polypropylene Clean blowing system Clean room KP Clean tubing TPH/TPS Clean fitting Clean blow Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow N2 gas Features 1 Low particulate generation KP Resin: PP Metal: Stainless steel (SUS304) Completely

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ~ = Refer to grommet type for other dimensions. 3-2-6 7 5 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VK3000 Type 20 Manifold Body ported (Top ported) n1 = Number of VK3000 n2 = Number of VK300 VV5K3-20Station Grommet: G DIN terminal

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

N1 MM A F F S + Stroke H ZZ + Stroke (mm) P Bore size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18 M20 x 1.5 8 Rc1/8 13 NPT1/8 25 G1/8 8.5 M8 x 1.25 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M10 x 1.25 18 M26 x 1.5 10 Rc1/8 13 NPT1/8 30 G1/8