CG5-S

7 M18 x 1.5 69 109 21.5 11.5 178 1/4 80 to 1400 40 37 32 99.5 50 25 28 20 71 13 89 M10 x 1.5 10 22 12 55 82 4 100 130 7 M22 x 1.5 80 130 28 17 212 3/8 100 to 1500 40 37 41 125 60 30 29 20 71 16 110 M12 x 1.75 10 26 14 70 83 6 120 160 8 M26 x 1.5 100 131 30 15 216 1/2 Foot brackets and plug bolts are installed before shipment from factory.

CJ5-S

7 M18 x 1.5 69 1/4 21.5 11.5 178 109 80 Up to 1400 40 37 32 99.5 50 25 28 20 71 13 89 M10 x 1.5 10 22 12 55 82 4 100 130 7 M22 x 1.5 80 3/8 28 17 212 130 100 Up to 1500 40 37 41 125 60 30 29 20 71 16 110 M12 x 1.75 10 26 14 70 83 6 120 160 8 M26 x 1.5 100 1/2 30 15 216 131 Foot brackets and plug bolts are installed when shipped from factory.

CP95

70 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 16 10 100 120 80 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153 100 60 100 120 75 35 16 205 14 20 140 25 230 110 60 20 75 16 6.5 230 220 71 14.5 150 178 120 6-13-10 10 Series CP95 ISO/VDMA Cylinder: Standard Type Double Acting w/ End of Stroke Cushioning Dimensions: Cylinder Mounting Accessory

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

N.O. 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Note) N.O. valve operates properly only when appropriate pressure is applied to the pilot.

XM, XY

XYA/In-line type C D XLA G Fd C XL (K flange) XLQ XM XY XM XY B DXSA XVD H 45 XGT A CYV E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2 130 178 209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal

MY1

130 LD 3.6 4.8 LH 38 39 LL 35 45 LW 84 88 M 6.0 7.5 N 20 25 NC 14 17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 090 110 Bore size (mm) 16 20 PA 40 50 PB 94 100 PG 3.5 4.5 PP Q 153 191 QQ 9 10 QW 48 45 RR 11.0 14.5 TT 15 18 UU 14 12 VV 10.0 12.5 W 102 110 WW 13 14 YW 54 58 Z 180 220 SS 2.5 5.5 07.5 11.5 Hole sizes for centralized piping on the bottom Bore size (mm) 16 20 S 9 6.5 WX 30 32 Y 6.5 8

CJ5-S

7 M18 x 1.5 69 1/4 109 21.5 11.5 178 80 Up to 1400 40 37 32 99.5 50 25 28 20 71 13 89 M10 x 1.5 10 22 12 55 82 4 100 130 7 M22 x 1.5 80 3/8 130 28 17 212 100 Up to 1500 40 37 41 125 60 30 29 20 71 16 110 M12 x 1.75 10 26 14 70 83 6 120 160 8 M26 x 1.5 100 1/2 131 30 15 216 Foot brackets and plug bolts are installed when shipped from factory.

Compact Cylinder

130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 45 50 55 60 65 70 75 80 85 90 M4 x 45 l x 50 l x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l Courtesy of Steven Engineering, Inc.-230

CP95

40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 80 16 10 100 120 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 100 16 12 126 153 60 100 120 75 35 16 205 14 20 140 25 230 110 60 120 20 75 16 6.5 230 220 71 14.5 150 178 6-13-10 10 Series CP95 ISO/VDMA Cylinder: Standard Type Double Acting w/ End of Stroke Cushioning Dimensions: Cylinder Mounting Accessory

DOC1023125

Position loop P constant A 140 110 110 1 to 200 B 100 80 80 C 110 80 80 H 80 140 140 Sets the speed loop P constant. *Please perform the actuator operation after changing this parameter setting under the responsibility of the user. Speed loop P constant A 110 140 140 1 to 200 B 120 75 100 C 150 120 120 H 50 80 80 Sets the speed loop I constant.

Soft Start-up Valve

. *2 Based on IEC60529 Solenoid Specifications Electrical entry Grommet DIN terminal M12 Connector DC 24, 12V Rated coil voltage [V] AC 50/60Hz 100, 200, 110[115], 220[230] *1 DC 24V 10% of the rated voltage 12V 10% of the rated voltage 100V 10% of the rated voltage Allowable voltage fluctuation 10% of the rated voltage 110V *1 [115V] [-15% to +5% of the rated voltage] AC 200V 10% of the

AIR COMBINATION

36.1 50 40 9 18 5 48 1/43/81/2 AC40A-06-A 1/8 155.2 149.1 101.5 38.4 77.6 110 39.6 50 40 9 18 5 48 3/4 Optional specifications Semi-standard specifications Round type Metal bowl Round type With With With auto drain Metal bowl Metal bowl Metal bowl Model pressure gauge with level gauge pressure gauge barb fitting drain guide with drain guide with level gauge with drain guide (with color

Table of Contents

D(Finger closing port) M5 x 0.8 (Finger closing port) M5 x 0.8 20Auto switch mounting groove (4 locations) 4-M6 x 1 (Piston rod and rack screw) Width across flats 10 (4 locations) Closed E 4-M5 x 0.8 through Open F (Thread for mounting attachment) (mm) A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26

AC

Then, the charging time (T) for a 100l tank, V 10 T = t x = 110 x = 110(s). 10 10 T = t x = 49 x = 49(s). 10 10 V 10 T = t x = 12.4 x = 24(s). 100 10 V 10 1.13-2 VBA1110 to 4200 Size Selection Pulsation is decreased by using tank. If secondary capacity is undersized, pulsation may occur.

3 Port Solenoid Valve Metal Seal Series VZ200 1

5 Pilot valve assembly How to Order Pilot Valve Assembly SCZ2 G 1 1 Rated voltage Series VZ200 1 100 VAC, 50/60 Hz Pilot pressure exhaust Manual override Electrical entry 2 200 VAC, 50/60 Hz 1 Spacer side exhaust (Type 20) 3 110 VAC, 50/60 Hz Nil Push type (Safety style) G H L LN L plug connector With lead wire 600 mm lead wire 300 mm lead wire 4 220 VAC, 50/60 Hz Grommet B Locking type

Guide Cylinder/Compact Type Series MGC

, 125, 150 200, 250, 300 MGT 125 107 19 16 160 176 110 125 9 12 85 165 M8 37 160 40 70 95 60 38 150 142 25 19 190 210 115 135 11 12 95 200 M10 42 194 45 82.5 115 75 50 Bore size (mm) P Note 2) Q R S T U V W WH X Y Z O 20 25 32 40 50 86 80 M6 x 1 M5 x 0.8 21 12 26 12 40 36 30 140 23 M6 x 1 M5 x 0.8 21 12 31 13 98 47 44 37 80 153 25 M6 x 1 1/8 21 12 38 16 112 53 50 37 82 161 28.5 M8 x 1.25

PF2A/PF2W

Analog output Current output 4 to 20 mA within the flow rate range Linearity: 5% F .S. or less; allowable load resistance: 300 or less with 12 VDC, 600 or less with 24 VDC 12 to 24 VDC (Ripple 10% or less) Power supply voltage Current consumption (No load) 110 mA or less 100 mA or less IP65 Enclosure Operating: 0 to 50C, Stored: 25 to 85C (No condensation or freezing) Operating temperature

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Value in the initial stage) Solenoid Specifications JIS Symbol Internal pilot SYJ312 4 SYJ32 2 4 (A) 2 (A) 2 Grommet (G) (H), L plug connector (L), M plug connector (M) Electrical entry 1 (P) 3 (R) 1 (P) 3 (R) Coil rated voltage (V) DC 24, 12, 6, 5, 3 100, 110, 200, 220 AC 50/60Hz External pilot + 10% rated voltage Allowable voltage SYJ31 R 2 4 SYJ32 R 2 4 Power consumption (W)(1) DC 0.5

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(Value in the initial stage) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position prssure center 3 position prssure center (B) 2 (A) 4 (B) 2 (A) 4 Solenoid Specifications 1 (P) 3 (R) 5 (R) Grommet(G)/(H), L plug connector(L), M plug connector(M) 1 (P) 3 (R) Electrical entry 24, 12, 6, 5, 3 100, 110, 200, 220 DC AC50/60Hz Coil

Series VQ Base Mounted Metal Seal/Rubber Seal

Lead wire color 24VDC 100, 110 200, 220 V AC V AC Black (Yellow) [Yellow] Lead wire color 24VDC 100, 110 200, 220 VAC VAC SOL.A SOL.A () () Black (Blue) [Red] Red (Blue) [Red] COM(+) COM(+) Red (Blue) [Red] SOL.B White (Gray) [Gray] () Single solenoid VQ0 double VQ1000 double solenoid Note: ( ) is for 100, 110VAC. [ ] is for 200, 220VAC Plug connector lead wire length Note) The length of