Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

HRX-OM-W038

Automatic monitoring Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts. Alarm monitoring starts when it reaches the set time. Monitoring start timer Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Lead wire length L O: Approx. 600mm L 1: Approx. 1500mm L 2: Approx. 3000mm 2-Rc1/8 (external pilot port) Plug-in type Plug lead type 46.8 59.2 15.5 17 22 51 69 83.5 117 U D U D U D 184.5 (3 position, metal type) 117 83.5 69 51 22 17 15.5 9 9 200 (3 position, metal type) 179 (single, double, 3 position, rubber type) 194.5 (single, double, 3 position, rubber type) 123.3 106 D side U side D

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

Solid State Auto Switches

Weight (g) D-B53 D-B54 D-B64 Auto switch model 0.5 m (Nil) 3 m (L) 5 m (Z) 22 78 126 22 78 126 22 78 Lead wire length Dimensions (mm) 33 13 4 SMC 15 12 Indicator light D-B64 without indicator light 6.5 6.5 14.3 9.5 Most sensitive position 15.5 4.5 1632 Reed Auto Switch Band Mounting Style D-C73C/D-C80C Refer to SMC website for the details of the products conforming to the international standards

Vacuum Pad

15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

HRX-OM-O021

Automatic monitoring Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts. Alarm monitoring starts when it reaches the set time. Monitoring start timer Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts.

HRX-OM-R005

Automatic monitoring Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts. Alarm monitoring starts when it reaches the set time. Monitoring start timer Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AN200 to 900 1 Model 0.5 A B D Dimensions (mm) Model Port size R Weight (g) Recommended flow (m3/min (ANR)) 3 or less 5 or less 8 or less 12 or less 20 or less 30 or less 50 or less 80 or less Effective area (mm2) 35 60 90 160 270 440 590 960 2 0.2 Inlet pressure (MPa) Noise level (dB) (A) 0.1 1 4 AN200-02 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

4/5 Port Air Operated Valve Series SYJA3000

) 51 (25) Body ported 5 port base mounted (with sub-plate) 4 Port base mounted (For manifold) Note 1) 2 position 0.36 0.12 0.46 0.35 0.12 0.46 0.33 0.12 0.47 0.31 0.12 0.47 SYJA340-M5 M3 x 0.5 M5 x 0.8 0.39 0.10 0.59 [0.40] 0.43 [0.33] 0.16 [0.11] 0.36 54 (28) 3 position 0.42 [0.33] 0.16 [0.080] 0.46 0.32 0.11 0.58 [0.32] 22 25 2 position SYJA320-M3 M3 x 0.5 M3 x 0.5 0.9 28 3 position 22

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

AS-FG/ASD-FG

52 1/2" 21.7 26.8 19.4 106 22 Reference dimensions for M5 x 0.8 and R(PT) threads after installation.

Auto Switch Guide

RS H A Auto Switch Internal Circuit D-B53 RZQ MI W S CEP1 Weight Reed switch LED OUT () Blue OUT (+) Brown Resistor (g) CE1 D-B53 D-B54 D-B64 Auto switch model Zener diode CE2 22 22 22 0.5 Lead wire length (m) 78 78 78 3 ML2B 126 126 5 D-B54 C J G5-S Dimensions Zener diode CV Choke coil Resistor OUT () Blue OUT (+) Reed switch LED MVGQ Surge absorber CC Indicator light DB64 without indicator

HRX-OM-X037

Date and time, Operation time and Alarm history are not reset. (1) Data reset setting screen Table 5.4-22 Data reset setting No.

HRX-OM-W032

Automatic monitoring Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts. Alarm monitoring starts when the set time has passed. Monitoring start timer Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts.

VQ5000

Refer to How to Order Manifold. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 D-sub Connector Cable Assembly (Option) Electric Characteristics Multi-core vinyl cable 0.3 mm2 x 25C Item Characteristics Cable length (L) Assembly part no.

Table of Contents

(Example) CUJ-M3 x 27l A A C B B D Axial mounting style Lateral mounting style Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Without Auto Switch For Axial Mounting For Lateral Mounting B 21 23 25 27 22 24 26 28 33 22 24 26 28 33 38 22 24 26 28 33 38 Model Mounting

Auto Switch Guide

However, there is no problem in terms of contact output, when an output signal exceeds 1 mA or more. 20Auto Switch Internal Circuit D-B53 Data Weight Reed switch LED OUT () Blue OUT (+) Brown Resistor (g) D-B53 D-B54 D-B64 Auto switch model Zener diode 22 22 22 0.5 Lead wire length (m) 78 78 78 3 126 126 5 D-B54 Dimensions Zener diode Choke coil Resistor OUT () Blue OUT (+) Reed switch LED

Auto Switch Guide

500 (3000) 20 2.7 Data OUT Black 3.2 2.6 DC () Blue 9.5 6 Most sensitive position 22 500 (3000) 4 D-M9B, D-M9BV Precautions OUT (+) Brown Be sure to read before handling.