SMC Corporation of America
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Refer to the catalog of each series for details on manifold solenoid valve specifications, Common Precautions and Specific Product Precautions. 45 For Series EX600 Series VQC4000 How to Order Valves VQC 1 0 5 0 4 Series VQC4000 Manual override Nil: Non-locking push type (Tool required) Type of actuation 2-position single (A) 4 (B) 2 1 1 (P) 3 (R2) 5 (R1) 2-position double (Metal) (A) 4 (B

HRZ Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) HRZD Specifications HRW Model HRS100-Wl-20-l HRS150-Wl-20-l Cooling method Water-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.23 1.33 Control method PID control Ambient temperature Note 1) C 2 to 45 HECR HEC Circulating fluid Note 2) Tap water, 15% ethylene glycol aqueous solution, Deionized

40 45 50 55 60 2 to 25 30 32 35 40 45 1.1 1.1 1.30 1.41 1.06 1 1 1.25 1.16 1.21 1.02 AMF 0.91 0.97 1 1 1 1 0.83 0.89 0.83 0.8 0.92 0.99 ZFC 0.79 0.77 0.7 0.64 0.75 0.98 0.6 0.48 0.63 0.92 SF 0.53 SFD Data C: Inlet Air Pressure Data D: Air Flow Capacity LLB Inlet air pressure (MPa) Inlet air pressure (MPa) Air flow capacity (m3/h [ANR]) Correction factor Correction factor Model IDFA3E IDFA4E

Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz.

No.PF-OMJ0005CN-I () // PFM7## 2 10 13 14 14 16 17 20 22 22 F0 23 F1 OUT1 24 F2 OUT2 27 F3 28 F4 29 F5 30 F6 31 F7 32 F8 35 F9 36 F10 38 F11 39 F12 40 F13 41 F98 42 F99 44 45 49 50 53 54 54 57 59 73 -1No.PF-OMJ0005CN-I (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

No.LFE*-OMY0008 / / / / / / / / LFE# SMC SMC SMC SMC 2 11 13 14 16 18 19 21 24 26 26 F1 OUT1 28 F2 OUT2 36 F3 40 F10 41 F20 45 F22 46 F30 47 F32 48 F33 50 F34 51 F80 52 F81 53 F82 54 F90 55 F98 56 F99 57 58 60 61 64 66 67 70 71 1 No.LFE*-OMY0008 (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

PV SV 45. Select range over detection timer from the table below with [] key or [] key, and confirm by pressing SEL. Table 5.16-22 List of set value Set value Explanation Initial value (Default setting) Sets time from detecting the alarm to generation of the alarm.

PV SV 45. Select range over detection timer from the table below with [] key or [] key, and confirm by pressing SEL. Table 5.16-22 List of set value Set value Explanation Initial value (Default setting) Sets time from detecting the alarm to generation of the alarm.

PV SV 45. Select range over detection timer from the table below with [] key or [] key, and confirm by pressing SEL. Table 5.16-22 List of set value Set value Explanation Initial value (Default setting) Sets time from detecting the alarm to generation of the alarm.

PV SV 45. Select range over detection timer from the table below with [] key or [] key, and confirm by pressing SEL. Table 5.16-22 List of set value Set value Explanation Initial value (Default setting) Sets time from detecting the alarm to generation of the alarm.

OUTPUT 35 9-3-5. 36 10 3744 11 11-1. 11-1-1. 45 11-1-2. 4548 11-1-3. 48 11-2. 11-2-1. 4952 11-2-2. 53 11-3. 11-3-1. 53 12 12-1. 54 12-2. 54 13 13-1. 5557 13-2. () 5758 14 14-1. 5960 - 1 1 1 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414:Pneumatic fluid powerGeneral rules relating to systems ISO 10218-1:2006Robots for industrial environments-Safety requirements-part1

Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz, when the actuator was tested in both an axial direction and a perpendicular direction to the lead screw. (The test was performed with the actuator in the initial state.)

Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz, when the actuator was tested in both an axial direction and a perpendicular direction to the lead screw. (The test was performed with the actuator in the initial state.) Note 5) Only when the motor option, "with lock", is selected.

42 19 Data P GD GK GL GQ GR H I J K L M N O Q R S Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 M5 x 0.8 54 4 4 35 105 50 25 M6 x 1 14 26 M10 x 1.5 depth18 95 9 70 4 103 M5 x 0.8 62 7 7 40 125 60 32 M8 x 1.25 14 31 M10 x 1.5 depth18 95 9 70 4 104 Rc 1/8 Rc 1/8 62 7 7 40 125 60 32 M8 x 1.25 13 38 M12 x 1.75 depth 21 115 11 82.5 4 115 67 8 8 45 150 75 38 M8 x 1.25 14 47 WH

0.99 5 to 80 Replaceable P . 302 Straight type IDFB IDH ID IDG Nominal IDK 120 m 400 SFB20 (Strainer) P . 303 Sintered metallic element ( ) AMG AFF AM Straight type AMD AMH SFB30 P . 306 45 0.99 AME AMF 0.01 m Filtering efficiency 99.99% ( ) ZFC Nonreplaceable 5 to 120 Membrane element ( ) Multiple disc type SF SF SFD SFC10 P . 309 240 0.99 LLB AD GD Case/Cover material: Aluminum alloy

67.5 9 2-M5 0.8 with depth 7.5 25 2-M6 1.0 73 29 87 71 27 13.5 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 0.8 with depth 7.5 32 2-M6 1.0 94 37 100.5 92 35 17.5 75 45 8 16 4 30 16 18.5 56 80.5 10 Symbol Z Stroke 10.20 30.40.50 Bore size (mm) 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 13 Compact Type Dual-Rod Cylinder Series CXSJ Proper Auto Switch Mounting Position

Description AQ2000 AQ3000 AQ5000 AQ1500 AQ1510 Valve 30093 NBR 30073 30053 30063 30083 r O-ring 9 x 7 x 1 JIS B 2401P-7 NBR CA40-1601 CA50-1602 30066 t Dimensions AQ1500/1510 AQ2000/3000/5000 3-port size (Mounting hole) 3-port size L1 L2 L3 L4 L5 L6 L7 L8 L9 D L1 L2 L3 L4 Model Port size AQ2000 Model Port size 1 8 1 4 M5 x 0.8 AQ1500 23 20 14 3 12.5 12 15 5.5 6.5 3.1 45 40 10 45 , 3 8 1 4

Flow Characteristics/Weight Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Weight (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 45 N.O. M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C.

45 37.4 28 4.5 1.6 41.6 22 50 9 134.9 60 (Piping port) Rc 1/4, 3/8 30.7 26.1 : With light/surge voltage suppressor PE 7 DIN terminal (D, Y) 1(P) 3(R) 3.5 Applicable cable O.D.

(Values at the initial period) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed at both energized and de-energized states in the axial direction and at the right angles to the main valve and armature.