Table of Contents

No. of input/output point: 128 points (Output 64 points, Input 64 points) Controls up to 4 branches with 32 I/O per branch A single cable from the gateway provides both signal and power for each branch, eliminating the need for separate power connections for each manifold. Series SV employs a multi-connector instead of the conventional lead wires for internal.

VQZ1000/2000/3000

Rubber seal 20 or less 26 or less 40 or less 3 position VQZ1420 0.13 0.26 0.54 0.13 0.28 0.55 Metal seal Exhaust center 25 or less 33 or less 47 or less VQZ1421 0.19 0.40 0.71 0.23 0.38 0.87 Rubber seal 25 or less 33 or less 47 or less VQZ1521 0.18 0.39 0.68 0.26 0.41 0.91 Pressure center Rubber seal 14 or less 18 or less 34 or less VQZ2120 0.32 0.20 1.4 0.30 0.21 1.2 Metal seal Single 64

VM

11 1.2 31 54 14 32 59 17 6 8 VHK-B1A 44.5 14.5 27 22 16.5 26 9.7 7.2 1 4 22 46 73.8 30.5 43.3 76.3 31.5 44.8 21.5 4 20.8 21.8 14 3.2 49 68 19 63 70 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56 17 40 60 6 8 VHK-B1A 44.5 11.5 27 22 16.5 26 9.7 7.2 3 8 22 46 74.8 30.5 44.3 77.3 31.5 45.8 21.5 4 20.8 21.8 14 3.2 51 68 19 64

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

] 41.6 25 DIN terminal (D) M8 connector (W0) L plug connector (L) M plug connector (M) 53.5 53.5 53.5 53.5 2.9 2.9 2.9 2.9 70.7 [72.9] 80.5 [82.7] 65.7 69.3 76.7 89.6 Pg7 Approx. 300 (Lead wire length) 68.1 [75.1] 44 M8 x 1 61.5 71.7 Approx. 300 (Lead wire length) 41.6 Max. 10 83 57 [64] 90.5 Applicable cable O.D. 3.5 to 7 Refer to the page 68 for dimensions with connector cable.

Profile Design ISO/VDMA Air Cylinder Series CP95

32 46.5 27 5 15 6.5 40 12 12 9 8.5 64 60 32 63 74 40 56.5 32 5 20 6.5 45 16 16 9 8.5 75 70 40 80 94 50 72 36 5 20 10 45 16 16 11 11 95 90 50 100 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Mounting type E Bore d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 32 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

51 62 HS 8.5 7.5 6.5 7 8 K 14 11 15 13 15 B 8 9.5 9.5 11 11 HT 17 24 23.5 29 36 C 4.2 5.2 5.2 6.5 6.5 HB 17 21 23.5 29 36 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 L 53 62 70 76 90 W 25 40 40 50 60 X 18 22 28 35 40 Y 54.5 64

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1/8 38 30 104 44 118 86 106 40 13 21.5 9 M10 x 1.5 9 32 32 46 22 8.6 14 1/4 47 40 130 60 146 110 130 50 M10 x 1.5 14 28 39 39 58 22 8.6 14 1/4 55 50 130 70 158 124 142 63 M10 x 1.5 9 M10 x 1.5

Compact End Lock Cylinder Series CBQ2

A + Stroke DL LL DM MO HR W 32 45 25 15 22 15 33.5 DM With front lock 40 52.5 29 21 26 19 38.5 50 59 29.5 21 24 19 45 63 64 28.5 21 25 19 50 63 cylinder tube configuration Q F A + Stroke B + Stroke Rod end male threads (mm) With rod end male threads H1 Bore size (mm) L1 C1 X H1 32 20.5 23.5 M14 x 1.5 28.5 40 20.5 23.5 M14 x 1.5 28.5 50 26 28.5 M18 x 1.5 33.5 C1 63 26 28.5 M18 x 1.5 33.5 X

Compact Cylinder with Air Cushion and Lock Series RLQ

Rod end nut 28.5 8 Series RLQ Dimensions/50 (Emergency Stop) Both ends tapped/RLQA50 3.2 3.2 16 16 2 x 4-M6 x 1 Standard (through)/RLQB50 LOCK Extension locking PC Rear cylinder port PC Front cylinder port M10 x 1.5 effective thread depth 15 69.5 28.5 13 86 Dust cover (Manual unlocking unit) 20 64 50 19 1.6 6.6 2-cushion needle 64 50 17 PL unlocking port Unlocks when pressurized Counterbore

Series LQ3 High Purity Fluororesin Fitting

C (E) M L H E C B L 14 20 25 29 37 49 28.5 34.5 47.5 52.5 64 78 11 16 21 24 32 41 10 17 22.5 24.5 27 30 4.8 6 9 10 14 18 3.5 4 5 6 7 8 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3E1A LQ3E2A LQ3E3A LQ3E4A LQ3E5A LQ3E6A M 1/4 L C H (E) Tee Union : LQ3T (mm) Inch Size 2-B Model Tubing O.D.

5 Port Solenoid Valve, Series VQC

release valve cannot be combined with external pilot specifications. 4 Series VQC Plug-in Unit Base-Mounted Type Models Model Response time ms Note 2) Flow characteristics Series No. of solenoids Weight 4, 25, 3 (A, BR1, R2) 14, 2 (PA, B) g (lbs) Standard: 1W Low wattage C[dm3/(sbar)] b Cv C[dm3/(sbar)] b Cv 15 or less 12 or less Single VQC1100 Metal seal 0.70 0.72 0.15 0.16 0.25 0.18 64

PSxx-OMV0008CN

IO-Link 1 IO-Link IO-Link IO-Link DC1830 V COM IO-Link IO-Link IO-Link IO-Link ( ) 2 COM IO-Link IO-Link 1 Operate IO-Link 3 COM (64 ) 4 1IO-Link V1.0 -84No.PS-OMV0008CN-E 7F.S. 1 1F.S.

17

A 65 82 98 B2 53 64 76 B3 78 88 108 C1 14 20 22 C2 39 44 54 F 96 111 131 E1 1 1 1 E2 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 63 73 93.5 61 72 88 30.5 36 44 40 46 55 73 84 104 14 14 19 6 6 8 Note) Floating brackets consist of a set of right and left bracket.

VXP21/22/23

64 160 170 180 135 140 155 67.5 70 77.5 169 (186.5) 51.5 54.5 59 100 105 120 36 42 52 23 25.5 25.5 35 40 40 12 14 14 92 (102) 184 (199) 103 (113) 202.5(217.5) 114 (124) ( ): N.O. 17-3-52

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 K P 88 97 108.5 113.5 72 80 95 100 95 95 97 97 62 62 64 64 17-3-67 8 The VX series will be revised shortly. Series VXZ22/23 Construction N.C. N.O.

Series VQ Metal Seal/Rubber Seal Body Ported

Series MELSEC-A AJ71PT32-S3, AJ71T32-S3 A1SJ71PT32-S3 Max. 64 stations, connected to remote I/O stations (Max. 512 points). 16 outputs, 2 stations occupied.

Series VQ Base Mounted Metal Seal/Rubber Seal

Series MELSEC-A AJ71PT32-S3, AJ71T32-S3 A1SJ71PT32-S3 Max. 64 stations, connected to remote I/O stations (Max. 512 points). 16 outputs, 2 stations occupied. T unit Can be connected with PLC I/O card for serial transmission. EX300-TMB1For models of Mitsubishi Electric Corp. EX300-TTA1For models of OMRON Corp. EX300-TFU1For models of Fuji Electric Company Ltd.

VQC

pressure release valve cannot be combined with external pilot specifications. 4 Series VQC Base-Mounted Type Plug-in Unit Models Model Response time ms Note 2) Flow characteristics Series No. of solenoids Weight 4, 25, 3 (A, BR1, R2) 14, 2 (PA, B) g Standard: 1W Low wattage C[dm3/(sbar)] b Cv C[dm3/(sbar)] b Cv 15 or less 12 or less 0.70 Single VQC1100 Metal seal 0.72 0.15 0.16 0.25 0.18 64

CG5-S

50 56 21 27 IY-G08SUS +0.5 +0.3 +0.084 0 22 22 32 32 I-G10SUS Y-G10SUS 100 100 M26 x 1.5 79 21 45 55 M26 x 1.5 24 31 79 24 40 72 55 64 24 31 IY-G10SUS Not applicable for -X165US option Not applicable for -X165US option Knuckle joint pin Trunnion bracket Material: SUS440 (pin) SUS304 (bracket, snap ring) Material: SUS440 (pin) SUS304 (snap ring) LL CDd9 (CX) LY d Dd9 t m t LH l m L LT (LX

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22