2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

color LCD display LED display 3-color LCD display [Monitor unit 3-color LCD display] The monitor unit values are for the PFG300 and PFMV3. 6 7 C O N T E N T S 2-Color Display Digital Flow Switch PF2M7(-L) Series How to Order. p. 9 Specifications. p. 11 Set Point Range and Rated Flow Range. . p. 13 Flow/Analog Output. p. 13 Pressure Loss (Reference Data): Without Flow Adjustment Valve. p.

CDQ2BP series

. l b t t . l b kwh Volume ins 16387 in3 16.387 ft3 0.0283 ft3 28.329 gal(U.S.)3.785 Volume mm3 6.10 x 10-5 cm3 (cc) 0.0610 m3 35.320 L 0.0353 L 0.2642 Weight g 0.0353 kg 2.2046 1.356 N . m 1.356 J 3.6 l\rJ mm3 cm3 (cc) m3 L L rn3 in3 Energy ft3 N. m f t 3 J gar(u.s.)

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

tubing O.D. d A (2) L5 (3) A (2) Model T D1 D2 D3 L1 L2 L3 L4 M1 L5 (3) Weight Weight (g) (g) T D1 H (1) H (1) D2 D3 L1 L2 L3 L4 M1 Min.

Coolant Valve

) Nil B Note) Note) Only valve sizes 1, 2, 3 and 4.

Refrigerated Air Dryer

Note 3) None Size 3 4 6 8 11 15 Note 1) Enter alphabetically when multiple options are combined.

Compact Type Dual-Rod Cylinder Series CXSJ

5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

3 !2 !1 !0 q t r i S u y o !4 !8 !

VNC

voltage Valve size A: Non-locking extended type Nil Air operated Symbol Orifice size (mm) Symbol Port size Rc Valve size 1 1 2 4 1 2 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Symbol N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa B: Locking slotted type 3 6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 4 7 1 5 6 24 VDC 12 VDC 7 240 VAC 50/60 Hz 15 (11) 2 Nil: Non-locking

AR20-B to AR60-B

e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Precision Regulator

Note 7) Digital pressure switch is shipped together, but not assembled. 819 IR1000/2000/3000 Series For High/Low Temperature Environments 4 Clean Series 1 10 IR 0 IR 0 T Clean series For high/low temperature environments T L For high temperature For low temperature Specifications Specifications ISO Class 3 With M5 fitting (Applicable tubing O.D. 6) Cleanliness Bleed hole L For low temp. environments

Refrigerated Air Dryer

IDF-BP303 IDF-BP311 IDF4E IDF4E 531 560 595 110 2.3 595 110 2.4 175 175 1/2 1/2 I D F I D F IDF6E IDF6E 555 587 617 617 IDF-BP304 IDF-BP312 IDF8E IDF8E 129 3.3 129 3.4 187 182 3/4 3/4 627 659 647 647 31 31 IDF11E IDF11E IDU-BP305 IDU-BP306 IDU-BP307 IDU-BP313 IDU-BP314 IDU-BP315 506 530 572 572 100 1.6 100 1.7 202 192 IDU3E IDU3E 3/8 3/8 I D U I D U 603 632 625 625 110 2.3 110 2.4 175 175

ITV

connector S L N Option Option Monitor output Bracket Thread type 0 None (for preset input) Analog output 1 to 5V DC Switch output/NPN output Switch output/PNP output Analog output 4 to 20mA Without bracket Flat bracket L-bracket B Port size Rc(PT) NPT NPTF G(PF) 1 2 N T 1/4 (2000, 3000) 3/8 (2000, 3000) 1/2 (3000) 2 3 4 C 3 Option 4 F 1.12-1 Option Option Series ITV2000

Title not found

, MI T el: (248) 299-0202 FAX: (248) 293-3 Montreal Tel: (514) 733-9595 FAX: (514) 733-1771 Tulsa, OK T el: (918) 252-7820 FAX: (918) 252-9511 West Region Columbus, OH Tel: (614) 895-9765 FAX: (614) 895-9780 Indianapolis, IN T el: (317) 899-4440 FAX: (317) 898-3896 Quebec City Tel: (418) 654-1997 FAX: (418) 654-1998 Newark, NJ Tel: (908) 253-3241 FAX: (908) 253-3452 Milwaukee,WI T el: (262

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

protocol/Input/Output) Mounting Symbol Type Applicable interface Nil Without accessory S Straight type communication plug connector DeviceNet CC-Link Ver. 1.10 T T-branch type communication plug connector 1 I/O cable (1.5 m) Parallel input (NPN) Parallel input (PNP) 3 I/O cable (3 m) 5 I/O cable (5 m) 7 Screw mounting 8*3 DIN rail E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link

RSH/RS1H

3 !4 !7 o !6 i @7 @1 #2 @9 @6 @4 #9 !0 !9 u #0 #6 t #8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !

RSH/RS1H

3 !4 !7 o !6 i @7 @1 #2 @9 @6 @4 #9 !0 !9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting, Spring extend (TL, TM) Double acting with spring (BL, BM) r $0 !1 !

A

8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/

Series 10-, 21- AW-B Filter Regulator

8 1/4, 3/8, 1/2 3/4 3/4, 1 1/8 1/8 1/8 1/8 1/8 M28 x 1 M38 x 1.5 M42 x 1.5 M42 x 1.5 26 29.4 37.3 37.3 43.3 Note) The dimension of C is the length when the filter regulator knob is unlocked. 1081 A 1021-AW K-B Regulator with Backflow Function Dimensions J J D M N T AW20K-B 1021Bracket (Option) S U Panel fitting dimension Air Preparation Equipment Pressure Control Equipment Flow Control Equipment

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

DC (+) q 6 Red CH3_OUT1 5 Gray CH2_OUT1 4 White N.C. 3 Black CH1_OUT1 2 Blue DC() 1 Brown DC(+) DC () w CH1_OUT1 e N.C. r CH2_OUT1 t 2000 CH3_OUT1 y CH4_OUT1 u N.C. i Internal circuits and wiring examples PF2D200 PF2D201 DC (+) DC (+) 4 3 2 1 4 3 2 1 (Brown) (Brown) Sensor Sensor Sensor Sensor Sensor Sensor + Load Load Load Load + NC NC 24 VDC CH1_OUT1 CH1_OUT1 24 VDC (Black) (Black) 4

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

0 NBR Detent assembly AXT335-12-3 AXT335-12-3 AXT335-12-3 !1 NBR Gasket AXT333-14 AXT333-14 AXT333-14 !2 NBR Gasket AXT333-15 AXT333-15 AXT333-15 !3 NBR Gasket AXT334-7 !4 NBR Gasket ( ): For DC !5 Solenoid Capsule Assembly (With rubber plug) Specifications Part no.