CE

0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !

7.5

0 o 2 4 (B) (A) 2 4 (B) (A) 3 5 1 (EB) (P) (EA) 3 5 1 (EB) (P) (EA) 4(A) 2(B) i 5(EA)/3(EB) 1(P) 3 position closed center 3 position closed center/exhaust center/pressure center 3 position exhaust center 2 4 (B) (A) 2 4 (A) (B) !1 q y w e r t o !

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

B 2 (EA)5 1 (P) 3(EB) M5: M5 x 0.8 3 position closed center 2(B) (A)4 Back pressure check valve 3 J: With switch A 4 Nil None (EA)5 1 (P) 3(EB) K Built-in 2 B 3 position exhaust center The built-in back pressure check valve type has an effective area approximately 20% smaller.

NAAMS Standards Compliant

L M N O J K L 8F7 through +0.028 +0.013 +0.028 +0.013 8F7 through M 11 through N O 12.5 300.05 250.03 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 250.03 12.5 11 through P P Q M8 x 1.25 R28 Q 150.03 180.03 M8 x 1.25 8.5 R50 4 33 12.5 8.5 20 550.05 3 22 22 12.5 R7 R27 20 22 22 R7 [mm] [mm] Model NAAMS code A B C D E F G H I Model NAAMS code

Guide Cylinder/Compact Type Series MGC

Rear plate N C D T A 2 x P (Rc, NPT, G) Q B E W S U M K L R I AP AB J AA A V Y + Stroke X Z + Stroke 8 x AF AC AD AE WH (Max.)

Precautions 1

Indicator light Load voltage Lead wire length (m) Applicable load Pre-wired connector Auto switch model Type Special function Electrical entry Wiring (Output) 0.5 (Nil) 3 (L) 1 (M) 5 (Z) None (N) DC AC M9N M9P M9B H7C M9NW M9PW M9BW H7NF 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Reed switch Solid state switch Grommet 2-wire 12 V Connector Relay, PLC 24 V Yes 3-wire (NPN) 3-wire

Fluoropolymer Piping Equipment

Port size 1 2 1 2 1 2 3 4 5 6 8 1 2 3 4 1 2 3 1 2 3 1 1 2 2 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 1 2 2 3 3 3 3 4 4 4 4 5 5 5 6 6 6 7 A A B A B C D A B C D A B C A B C A 1/8" 1/8" 1/8" 1/4" x 5/32" 1/8" 1/4" 1/4" 6 x 4 1/8" 10 x 8 8 x 6 10 x 8 8 x 6 10 x 8 1/4" 3/8" x 1/4" 1/8" 3/8" 1/2" 1/4" 1/4" 3/8" 1/2" x 3/8" 3/8" 1/2" 8 x 6 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 3/4" 3/8"

48

k Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V 12 Related Product RoHS For the 12 and 16 JMGP Speed Controller with One-touch Fitting Elbow Type for M3 AS121F-M3-A-X790 Metric size (Color: Light gray) Specifications Flow Rate and Sonic Conductance Inch size (Color: Orange) Model AS121F-M3Tubing O.D.

3

sensor unit: With flow adjustment valve PF3W A A D D S T T S Q Q 3-Color Display Digital Flow Monitor for Water B B PF3W3 F AA F AA K L K L 4 x P 4 x P N N (mm) Function Bracket dimensions Model Details Q number A AA B D F K L N P Q S T of rotations PF3W704S/504S PF3W720S/520S PF3W740S/540S 6 56.5 22 63.6 (Max. 68.6) 104 50 70.2 34 58.5 18 13.6 2.7 depth 10 19 6 60.5 22 63.6 (Max. 68.6)

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

(Arrangement as seen from lead wire side) D-sub connector cable assembly Terminal no. q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i @1 !6 !7 w e r !8 Lead wire color Terminal no. Dot marking @5 Black 1 None @6 Brown 2 None !

Model Selection 1

/N.O. 1/8 to 3/4 0 to 3 (1) 17-2-57 VV2CW2/3/4 N.C./N.O. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-64 VDW10/20/30 Single unit N.C. M5, 1/8, 1/4 1, 1.6, 2.3, 3.2 2, 3, 4 0 to 0.9 (1) 17-2-68 VV2DW1/2/3 N.C. Manifold M5, 1/8, 1/4, (3/8) Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit 2, 3, 4.5, 6, 8, 10 1/8 to 1/2 0 to 3 (1) 17-3-25 VVX21/22/23 N.C./N.O.

Coolant Valve

4 6 5 0 1 2 3 4 5 Flow velocity (m/s) Flow velocity (m/s) Calculating the Flow Velocity v = 21.2 x Q/d2 (Symbol) v: flow velocity (m/s) Q: flow rate (L/min) d: piping inner diameter (mm) 626

Series VS

1 1/4, 3/8,1/2 SIZE 2 3/8, 1/2,3/4 SIZE 3 3/4, 1 6 PORTS, 1, 3,5 PORTS 2) SIZE 1 1/4, 3/8,1/2 SIZE 2 3/8, 1/2,3/4 SIZE 3 1/2, 3/4,1 2 PORTS, 2, 4 PORTS 3) ALL DIMENSIONS ARE IN MILLIMETERS SMC SMC BB CC 2 2 2 2 AA S R Q 4 4 4 4 U T X Y Z V W PITCH NOTE #2 Q 81 R 49 5.5 S A 177.5 B 119 C 9 D 50.5 105 H 20.5 I J 58.5 F 108 96.5 87 G K L M N 22 79.5 52.5 48.5 E O P 52 T 26.5 26 41 28 20.5 18

CQS

3 20 20 CQSB20-S-PS CQSB20-T-PS 25 25 CQSB25-S-PS CQSB25-T-PS Seal kit includes !3. Order the seal kit, based on each bore size. Seal kit includes !2, !3, !4.

155

8 1/2 3/4 1 3/8 1/2 3/4 1 3/8 1/2 3/4 1 4.6 6.5 11.8 18.3 3.5 4.8 7.1 11.0 1.25 2.7 4.5 7.3 0.5 MPa 1.0 MPa 1.6 MPa ( ): Mass including the bracket Add the mass of an auto switch additionally.

17

4 q !6 y @3 r !0 o @4 t !0 @4 @1 i e @2 o e @2 !3 i !3 @0 !5 !9 !9 !5 63 or more 12 to 25 50 stroke or less 12 to 25 Over 50 stroke 50 or more Component Parts Component Parts No. Description Material Note Ball bushing Spacer Steel ball Plug Piston seal Rod seal Gasket A Gasket B No.

Plate Cylinder

q y e !

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

VS 8-2/VS 8-4

) 11 173 (Double dual 3-port) 188.5 (3-position) 139.5 (Single) 14 14 14 157.5 8 115 131 12 12 12 SMC 28 Series VS 8-2 S R Construction Construction Metal seal Rubber seal VSR8-2-FG-SVSS8-2-FG-Sr e e r w t q w q t VSR8-2-FG-DVSS8-2-FG-De r e r w q t w q t VSS8-2-DFHG FIG FJG VSR8-2-DFHG FIG FJG e r e r w q t w q t VSR8-2-DFDAG FDBG FDCG e r w q t Replacement Parts VSR8-2-DFDAG FDBG FDCG VSR8

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Metric size Inch size 4 3 Series 6 8 10 12 19 1/8" 1/4" 3/8" 1/2" 3/4" 1" 1 1/4" 25 Appearance Size 2 P.346 Straight adapter LQ3A 3 4 5 6 7 K 2 P.348 Union flange LQ3F 3 4 M 5 6 H Tubing O.D.