MLGP

2-Rc P G J K XAH7 depth XL S XAH7 depth XL T-slot dimensions Note 1) Intermediate strokes other than standard strokes are manufactured by installing spacers.

MLGP

2-Rc P G J K XAH7 depth XL S XAH7 depth XL T-slot dimensions Note 1) Intermediate strokes other than standard strokes are manufactured by installing spacers.

VHK

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

Series PF2W Digital Flow Switch For Water

DC+ 1 Brown q N.C. 2 Not used w DC 3 Blue e IN: 1 to 5 V 4 White r Power supply/Output connector (8P) Power supply/Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

MHC2

Double acting Single acting Basic type Side ported Nil E K H M D20Axial ported Single acting 12-8-15 16 Series MHC2-6/MHCA2-6 Construction MHC2-6 Double acting/With fingers open Double acting/With fingers closed Single acting r !0 o i !8 e q y !3 w !1 !6 !7 !2 t !9 !5 !4 u Component Parts No. Description No.

MHC2

Double acting Single acting Basic type Side ported Nil E K H M D20Axial ported Single acting 12-8-15 16 Series MHC2-6/MHCA2-6 Construction MHC2-6 Double acting/With fingers open Double acting/With fingers closed Single acting r !0 o i !8 e q y !3 w !1 !6 !7 !2 t !9 !5 !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

VXF

LVA LVH LVD LVQ LQ LVN TI/ TIL PA PAX Conduit Terminal Conduit terminal: T VXF2150/2160 VXF2280 PB Q N K VXF2150 VXF2160 VXF2280 17-3-77 8 The VX series will be revised shortly.

SZ3000

Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

LEC-OM069xx

Name Mid-execution Automatic Parameter changes changes Pn401 Torque Reference Filter Time Constant No Yes Pn408 Torque Related Function Switch Yes Yes Pn409 1st Notch Filter Frequency No Yes Pn40A 1st Notch Filter Q Value No No Pn40C 2nd Notch Filter Frequency No No Pn40D 2nd Notch Filter Q Value No No 6-29 7.

LEC-OM071xx

Name Mid-execution Automatic Parameter changes changes Pn401 Torque Reference Filter Time Constant No Yes Pn408 Torque Related Function Switch Yes Yes Pn409 1st Notch Filter Frequency No Yes Pn40A 1st Notch Filter Q Value No No Pn40C 2nd Notch Filter Frequency No No Pn40D 2nd Notch Filter Q Value No No 6-29 7.

Pulse Valve

When the pilot valve is energized, the armature opens, and the air filling the pressure action chamber q is released to the atmosphere through the pilot valve. q Energized (Sub-valve open) Energized (Main valve open) Due to the release of air from the pilot valve to atmosphere, the pressure in the sub-valve pressure action chamber q decreases (force pushing the sub-valve down < force pushing

PF2A/PF2W

These vortexes are stable under certain conditions, and their frequency is proportional to the flow velocity, resulting the following formula. f = k x v f: Frequency of vortex v: Flow velocity k: Proportional constant (determined by the vortex generator's dimensions and shape). Therefore, the flow rate can be measured by detecting this frequency.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

0 q t r i S u y o !4 !8 !

XLAQ/XLDQ

Bellows seal O-ring seal Standard 468 Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Symbol Nil A F G J K L M Indicator Without indicator Actuator port direction Rear flange surface Flange side Flange side Left flange surface

CE2

As an equipment, calibration should be done by customer. 110C K Neoprene cross ML2B Maximum ambient temperature for the rod boot itself. C J G5-S Auto Switch Mounting Bracket Part No.

LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions LEL25 Series LEL Electric Actuator/Guide Rod Slider Belt Drive Step Motor (Servo/24 VDC)

Applicable Stroke Table Compatible Controllers KStandard/K Produced upon receipt of order Stroke Model LEL25 100 200 600 700 800 900 300 400 500 Step data input type Programless type 1000 K K K K K K K K K K The actuator and controller are sold as a package. Type (Controller Page 13) Confirm that the combination of the controller and the actuator is correct.

3 Position Cylinder Series RZQ

x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.