2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Open EO Closed EC K L J M5 x 0.8 (finger closing port) G I M (mm) I 9 11 Model MHS2-50D MHS2-63D G 37.5 44 FZ 6 7 FX 31 38 FY 28 34.5 EC 22 30 EO 34 46 DC 70 86 DO 82 102 M 2 3 B 70 86 K 10 11 AC 3 4 J 24 28 AA 55 66 AB 52 62 NA 18 24 L 4H9 6H9 NB 10h9 12h9 CA 9 12 CB 20 22 0 -0.036 0 -0.043 +0.030 0 +0.030 0 Model MHS2-50D MHS2-63D SC 12 14 RB 34 38 O 5 5.5 4H9 5H9 VA Q 14 17 RA 52 66 VB

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

CE

7 w @5 q y !3 @3 r t @5 e !1 @1 @1 @4 @6 !4 @6 !4 u @8 !5 @0 !8 !9 i Parts list Parts list Description Material Note Description Material Note No. No.

Slider Type/Ball Bushing Bearing

9 @0 q !6 !5 i y !7 e !0 u !8 !3 !4 #0 !1 o !2 t r @2 @1 #3 #4 @9 #1 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 No.

7

9 t q @1 w e @0!4 @3 y !6 o u !7 @2 CK1C (Clevis width 12.5) @4 i !2 !0 !1 !3 !5 Component Parts MK No.

CRQ2

TG effective depth TL TD TB TC D (g6) DD (h9) A AU B BA BB BE J JA JB BC BD BU CA CB F H Size Rotation 20 30 90, 180 90, 180 40 90, 180 16 16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

Direct Solenoid

N V S 3 r Valvo Fealuro3 D = Recessed non-locking manualoperator K = Recessed locking manual operator (AC only) O = Rubbr "Solenoid Accss" plug (AC only) 2 = Class 2 3 = Cla88 3 4 = Class 4 ttounllng 5 = Mounting, pipe tap In body 0 3 = 0 4 = O 7 = 0 9 = 1 0 = 220V 50Hz 24 VAC 60Hz ll5/120V 60Hz or 100/110V 50Hz 23O|24OV a0qzot 2OO/22OV sotlz 4@V 60t'z 12 Vrc 50Hz 12 VDC 24 VDC (DC not available

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

TL TG effective depth TL TD TB TC D (g6) DD (h9) A AU B BA BB BE J JA JB BC BD BU CA CB F H Size Rotation 20 30 90, 180 90, 180 40 90, 180 16 16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (

CLQ

(mm) With auto switch Without auto switch Bore size (mm) Stroke range (mm) A BP C D E F G H I J K L M N O OA OB P Q RA RB S T U V Z B A B 82 36 Rc 1/8 10 to 50 15.6 depth 12 14 depth 10.5 Rc 1/4 92 46 63 15 20 77 10.5 38 M10 x 1.5 103 7 17 8 60 9 M8 x 1.25 53 16 4.2 93 1.6 47.5 16.5 19 92 46 75, 100 96.5 43.5 10 to 50 19.6 depth 15.5 17.5 depth 13.5 Rc 3/8 Rc 1/8 106.5 53.5 80 21 25 98 12.5

Process Valve

4 Valve size 5/6/7 SF4 5 D 23 Q VO307 5 D 1 Q CE-compliant CE-compliant Coil rated voltage Coil rated voltage CE-compliant Nil Q CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Note) Electrical

Compact Cylinder with Lock Series CLQ

(mm) With auto switch Without auto switch Bore size (mm) Stroke range (mm) A BP C D E F G H I J K L M N O OA OB P Q RA RB S T U V Z B A B 82 36 Rc 1/8 10 to 50 15.6 depth 12 14 depth 10.5 Rc 1/4 92 46 63 15 20 77 10.5 38 M10 x 1.5 103 7 17 8 60 9 M8 x 1.25 53 16 4.2 93 1.6 47.5 16.5 19 92 46 75, 100 96.5 43.5 10 to 50 19.6 depth 15.5 17.5 depth 13.5 Rc 3/8 Rc 1/8 106.5 53.5 80 21 25 98 12.5

CG5-S

3 w With air cushion !2 !1 i r !3 y o q u e !0 w Parts list Material No. 1 2 3 4 5 6 7 Description Material No.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

k ra oc c a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

M5: M5 x 0.5 5 (EA) 1 (P) 3 (EB) J: With switch 3 position closed center A 4 Back pressure check valve (A) 4 (B) 2 3 2 B Built-in Nil K None 5 (EA) 1 (P) 3 (EB) ON OFF The built-in back pressure check valve type has an effective area approximately 20% smaller. The 3 position closed center and 3 position pressure center are not available with back pressure check valve.

Digital Flow Switches Series PF2A

DC (+) q 6 Red CH3_OUT1 5 Gray CH2_OUT1 4 White N.C. 3 Black CH1_OUT1 2 Blue DC() 1 Brown DC(+) DC () w CH1_OUT1 e N.C. r CH2_OUT1 t 2000 CH3_OUT1 y CH4_OUT1 u N.C. i Internal circuits and wiring examples PF2A200 PF2A201 DC (+) DC (+) 4 3 2 1 4 3 2 1 (Brown) (Brown) Sensor Sensor Sensor + Load Load Load Load + NC NC 24 VDC CH1_OUT1 CH1_OUT1 24 VDC (Black) (Black) 4 3 2 1 4 3 2 1 Load Load

Angle Seat Valve /

The value of the effective area S, like that of sonic conductance C, expresses the ease of flow. (3) Formula for flow rate When P2 + 0.1 0.5, choked flow P1 + 0.1 293 Q = 120 x S (P1 + 0.1) (3) 273 + t When P2 + 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + t Conversion with sonic conductance C: S = 5.0 x C(5) Q : Air flow rate [dm3/min (ANR)], dm3

MLU

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 CL A CL1 MLGC CNG A MNB C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B CNA M(D)LUB25 CNS y CLS !9 i o !5 @0 CLQ Extension locking w q MLGP Section A-A' !

PF-OMM0004_C

/720/740() A AA B D F K L N P Q Q PF3W704S 104 50 63.6(Max.68.6) 70.2 34 58.5 18 13.6 2.7 10 19 6 PF3W720S 112 54 63.6(Max.68.6) 74.2 34 62.5 18 13.6 2.7 10 19 6 PF3W740S 142 71 75.25(Max.81) 94.5 44 79 28 16.8 2.7 10 28 7 S T PF3W704S 56.5 22 PF3W720S 60.5 22 PF3W740S 78 30 -84No.PF-OMM0004-D PF3W704/720/740(+) A AA D K S PF3W704S--T 115 50 81.2 69.5 67.5 PF3W720S--T 123 54 85.2

PF-OMN0009_C

POWER FLOW -27No.PF-OMN0009CN-F () PF3W504 PF3W520 PF3W540 PF3W511 PF3W521 (3 mPas(3 cP)) 1 0.54 L/min 216 L/min 540 L/min 10100 L/min 50250 L/min 070 090 () ( ) 3F.S. 2F.S. 5%F.S.(25 ) 2 2 3 1 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 () DC1224 V10 30 mA IP65 050 () 3585R.H.() 4 AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSSUS304FKMSCS13 PPSSUS304 FKM 3/8 3/81/2