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9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Description Material Note Component Parts Qty. No. No. Description Material Note Qty. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 1 Rod cover Aluminum alloy Rod seal A NBR White anodized q !

Construction Straight type: AKH 4, 6 5/32, 1/4 8, 10, 12 5/16, 3/8, 1/2 Description Material Note Component Parts No. t y e w r q t y e w r q PBT Body q NBR, Aluminum alloy Valve w Stainless steel Spring e Brass Electroless nickel plated Spacer r Cassette t NBR Seal y Male connector type: AKH Bushing type: AKB R 1/4, 3/8, 1/2 NPT 1/4, 3/8, 1/2 R 1/8 NPT 1/8 M5 type U10/32 4, 6 8 x R 1/8

Series PF2D5 RESET SET PF2D300-A(-M) Panel fitting dimensions 3 x 7.2 (=21.6) 8-M3 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black Main circuit 1 2 3 4 7 3 Load +0.5 0 Brown + 6 2 19.4 Blue 5 1 12 to 24 VDC 5 6 7 8 Series PF2D5 PF2D301-A(-M) The applicable panel thickness is 1 to 3.2 mm.

350.1 200.2 30 201-1 Power Clamp Cylinder Series CKZT Dimensions (Clamp Arm: Offset 15) 80 How to Order Right type CKZ80 42 3682N R 63 50.5 CK1 CLK2 C(L)KQ MK2T/MK2/MK CKZ2N CKZT CLKZ1R CK/M(D)UKA 108 76 Arm position/Mounting hole A A 25 Arm position Mounting hole Symbol D1 6 6 6 8 8 8 D2 9 9 9 10.2 10.2 10.2 D3 14 14 14 17.5 17.5 17.5 L 3 3 3 5.5 5.5 5.5 Center type A B C D E F Center Right

This is the same concept representing the easy to run through as sonic conductance C. (3) Formula for flow rate P1 + 0.1 P2 + 0.1 When 0.5, choked flow Q = 120 x S (P1 + 0.1) . .(3) 273 + t 293 P1 + 0.1 P2 + 0.1 When > 0.5, subsonic flow Q = 240 x S (P2 + 0.1) (P1 P2) . .(4) Conversion with sonic conductance C: S = 5.0 x C . .(5) Q : Air flow rate [dm3/min(ANR)], dm3 (cubic decimeter) of

6 !7 @7 !2 !7 w @5 q y !3 @3 r t @5 e !1 @1 @1 @4 @6 !4 @6 !4 u @8 !5 @0 !8 !9 i Parts list Parts list Description Material Note Description Material Note No. No.

16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 115 98 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4,

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts No. No. Qty Description Material Remarks Description Material Remarks Qty 1 1 Brass Electroless nickel plated Aluminum alloy White anodized Rod cover Cushion spear A q o 1 1 Brass Electroless nickel plated Aluminum alloy White anodized Head cover Cushion spear B w !

Construction L-Bracket w e r t w e r t q Component Parts No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q o !0 !1 i y u q o !0 !1 i y q w e Component Parts No. Description Material Note 1 Body A PBT 2 Knob POM 3 Body B PBT 4 Needle PBT 5 Needle guide Brass Electroless nickel plating 6 U-seal HNBR 7 Spacer PBT1 Component Parts No.

Note 3) Vacuum pilot type CE-compliant pilot solenoid valves will become VO307VD DZ-Q. 2 1 1 2 569 A VNB Series How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type VO307 Q 1 5 D SF4 5 D 23 Q Body option CE-compliant CE-compliant Coil rated voltage CE-compliant Nil Q Standard Vacuum pilot Nil V CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200

Buffer assembly part no. q ZPB2J10-B5 [Weight: 21.8 g] Buffer assembly part no. q ZPB2K10-B5 [Weight: 23.6 g] w ZPB2J20-B5 [Weight: 35.9 g] w ZPB2K20-B5 [Weight: 36.9 g] Width across flats 8 M5 x 0.8 Width across flats 8 M5 x 0.8 Width across flats 14 Width across flats 14 5 5 3 3 3 3 D A B 4 D A B M10 x 1 M10 x 1 Gasket (t = 0.5) Gasket (t = 0.5) 2 M5 x 0.8 2.5 M5 x 0.8 4 Dimensions Dimensions

"#$ G $ /$+ + $' ))$& ,.0 MVGQM, MVGQL Common Dimensions 11 )7$ +$'& ()($ $ +6$ 11 ")'&)& +#$ 11 B C DA F G H J K L MM ML NN PW Q R S T V W X YY YL Z 40 2 . . . . 2 .2 . 3 % 3 % 3 % . .. "$$+ ,-... 50 . . 2 . 2 . . . . .. 3. % 3. % 3. % . .. 63 . 2 . 2 . . . . . 2 3. % 3. % 3. % $ 8 + ++7$ 1)'/)$ $ '$1$&)$ +#$+ $ )' $ +)'&)& +#$+ 79 1$)'+ / '+)' ) +)$ $

S070 VQ Flow Specifications/Response Time VKF Flow characteristics Response time ms Note 2) Maximum operating pressure Power consumption b 0.27 0.28 0.27 0.28 0.27 0.28 ON 3 or less 5 or less 3 or less 5 or less 3 or less 5 or less Cv 0.011 0.021 0.011 0.021 0.006 0.011 OFF 3 or less 3 or less 3 or less 3 or less 6 or less 6 or less C[dm3/(sbar)] 0.042 0.083 0.042 0.083 0.021 0.042 VQZ 0.5

L Dimension (mm) n (stations) Dimension 2 3 4 5 6 7 8 9 10 L1 44 66 88 110 132 154 176 198 220 L2 53 75 97 119 141 163 185 207 229 L3 62 84 106 128 150 172 194 216 238 2 stns. x 1 Manifold composition 2 stns. + 3 stns. 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 3 stns. x 1 2 stns. x 2 3 stns. x 2 3 stns. x 3 Note) Manifold base is consisted of the junction of 2

EX600-ZMB2: For DIN rail mounting Enclosed parts: Round head screw (M4 x 6), 2 pcs. (2)Seal cap (10 pcs.) EX9-AWTS: For M12 (3)Marker (1 sheet, 88 pcs.)

3 !7 w !8 !4 !3 AS-F TMH ASD AS AS-FE KE r i o e y !6 !5 r o e y !6 !5 q AS-FG AS-FP AS-FM AS-FM AS-D AS-T ASP !9 !1 q !2 t !0 !1 u !2 t !0 i ASN AQ Component Parts Component Parts Material Description Note Description No. Note Material No.

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 10-10-8 9 3 Position Cylinder Series RZQ Construction u i @2 r !0 y q w !9 e @1 @4 !3 RE A B @0 REC !2 CX @3 !

22.5 18 20.9 23.3 D 6 Applicable tubing 30.1 3/8 23.8 35 17 35.5 1/4 29.5 28 10 8 23 39 M 31 3/8 24.7 29 L 19 3/8 26.5 30 12 32.8 24.8 10 60 22 1/2 24.6 54 Connection thread (with sealant) Reference dimensions after installation of R thread Note 1) D is maximum diameter.