Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 1000mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 1000mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, M6, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, 1/4-28UNF, Option: Bracket + Manual Override, Lead Wire Length: 1000mm, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, 1/4-28UNF, Option: Manual Override, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, 1/4-28UNF, Option: Manual Override, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Option: None, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, 1/4-28UNF, Option: Bracket, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Open, Body Material: Resin, Connection Type: Others, Plumbing Thread Nominal: -, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Base Mounted Type

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: Others, Plumbing Thread Nominal: -, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Base Mounted

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: Others, Plumbing Thread Nominal: -, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Base Mounted

The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: -100kPa to 1.0MPa, Effective area (Cv): 6mm 2 (0.33), Ambient and fluid temperature: -5 to 60 C (no freezing), Port size (nominal size): Rc(PT) 1/8 (6A), VALVE MECHL, VALVE, VM (VFM/VZM) MECHANICAL VALVE, DA, VM BODY PT 1/8, .29374 lb

The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: -100kPa to 1.0MPa, Effective area (Cv): 7mm 2 (0.38), Ambient and fluid temperature: -5 to 60 C (no freezing), Port size (nominal size): 1/8 (6A), North American threads-NPT, VALVE, MECH L 1/8 NPT, VALVE, VM BODY PT 1/8NPT (F), .44000 lb, ModelPort sizeMaterialSensor

Max. operating pressure differential (MPa) Note 1)Operating Pressure range (MPa) Note 2)Mass (kg) Pressure port 1Pressure port 2VDW20M5 1/8 (6A)1.60.70.20 to 1.00.1

The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: -100kPa to 1.0MPa, Effective area (Cv): 7mm 2 (0.38), Ambient and fluid temperature: -5 to 60 C (no freezing), Port size (nominal size): Rc(PT) 1/8 (6A), VALVE, MECHANICAL, VALVE, VM (VFM/VZM) MECHANICAL VALVE, DA, VM BODY PT 1/8, .37400 lb, ModelPort sizeMaterialSensor

The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: -100kPa to 1.0MPa, Effective area (Cv): 7mm 2 (0.38), Ambient and fluid temperature: -5 to 60 C (no freezing), Port size (nominal size): 1/8 (6A), North American threads-NPT, VALVE MECHL 1/8 NPT (RED), VALVE, VM (VFM/VZM) MECHANICAL VALVE, CA, VM BODY PT 1/8NPT (F),

AC Servo Motor Driver (Pulse input type/Positioning type ）

other I/O signals, refer to the connection examples in section 3.2. (1) Connection example 24 V (Note 2) (Note 2) S4 S2 S1 S3 RESA RESB MR-J3-D05 (Note 1) (Note 1) (Note) (Note) SW1 SW2 STOA STOB EM2 EM2 (A-axis) (B-axis) CN9 SDI1A+ 1A 1B SDI1AMC Driver Servo amplifier SDO1A+ 4A CN8 Control circuit 4B SDO1ACN8A STO1 4 STO2 5 CN10 3A SDI2A+ STOCOM 3 3B SDI2ATOFB1 6 1A SRESA+ 1B SRESATOFB2 7 6A