IDX-OM-V020

IDX-OM-V020 Original Instructions PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDFA60-23-A,C,L,R,T,V IDFA70-23-A,C,L,R,T,V IDFA80-23-A,C,L,R,T,V IDFA90-23-A,C,L,R,T,V This manual is intended to explain the installation and operation of the product.

Booster Regulator Series VBA1110 to 4200 1

V 10 10 10 T = t x = 110 x = 110 (s). V 10 10 10 T = t x = 2.4 x = 24 (s).

3

V Ps + 0.1 293 S = 12.1 log10 () (6) t P + 0.1 T S : Effective area [mm2] V : Air tank capacity [L] t : Discharging time [s] Ps : Pressure inside air tank before discharging [MPa] P : Residual pressure inside air tank after discharging [MPa] T : Temperature inside air tank before discharging [K] Power supply Pressure switch Thermometer Pressure control equipment Control circuit Solenoid

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3) Yes 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3) Yes 1% F.S.

PF3A7xxH-L.eng

or 0 to 10 V can be selected when the analogue voltage output type is used.

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

IR1000/2000/3000

pressure P1 (MPa) IR IR2010-02 IR2010-02 IR2010-02 Supply pressure: 0.7 MPa Back pressure: 0.7 MPa 0.7 VEX 0.204 0.4 0.6 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) AMR 0.202 0.5 Set point 0.3 ITV 0.4 0.200 0.2 0.3 IC 0.198 0.2 0.1 VBA 0.1 0.196 VE 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 100 200 300 400 500 600 700 800 900 1.0 Flow rate ( /min (ANR))

Series VQ Metal Seal/Rubber Seal Body Ported

5m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 4.5 (0.25) VQ1000 (Metal seal) 6 6.3 (0.35) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CJ2 Pressure 0.5MPa

IDX-OM-W094

IDX-OM-W094 / Series IDFA60-23-A,C,L,R,T,V IDFA70-23-A,C,L,R,T,V IDFA80-23-A,C,L,R,T,V IDFA90-23-A,C,L,R,T,V URLhttp://www.smcworld.com/ English instruction manual can be downloaded from our URLhttp://www.smcworld.com/ SMC ISO4414 *1) JIS B8370 *2) *1) ISO4414Pneumatic fluid power Recommendations for the application of equipment to transmission and control systems. *2) JIS B8370 URLhttp:

Air Pilot Operated Series NVSA

Solenord side. .9 fi V f--'.--ry] f+r-q | r + r i | | t-?-!+-<-{ l r l tF)-)-+++--(lr{ I , _ ' I{ANIFOLD BLOCK PART NO. NO. PRESSURE CYLII{OEF " A & 8 " EXHAUST "EA & E8" SIDE aoTTor !OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

/8 NPT1/8 G1/8 Rc1/4 NPT1/4 G1/4 12-CY3B15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 (Both sides) 1300 25 12-CY3B25 Non-lube 32 12-CY3B32 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B40 40 Note 1) Stroke exceeding the standard stroke but below the maximum possible stroke is available

Power Clamp Cylinder

North America For Europe For France Special Maximum clamping force (lbf) Maximum clamping force (N) 8000 2000 7000 6000 1500 80 80 5000 4000 1000 63 63 3000 40 50 2000 500 50 1000 40 0 0 5 10 15 20 0 450 400 350 300 250 200 150 100 50 0 Arm length L (mm) Arm length L (in) Allowable load for clamp arm end Refer to the graph on pages 190 and 191 for parts weight of the arm.

Style: A (Short Type-Rubber Cushion), Bore Size: 40mm, Port Thread: Rc: ø25, ø40, ø50, ø63/M Thread: ø16, Stroke: 300mm, Stroke Adjusting Unit: w/o Adjusting Unit, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Mounting: B (Basic Style), Bore Size: 50mm, Thread: TN (NPT), Stroke: 300mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Mounting: B (Basic Style), Bore Size: 20mm, Thread: Rc, Stroke: 300mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Mounting: B (Basic Style), Bore Size: 20mm, Thread: TN (NPT), Stroke: 300mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector), Number: S (1 pc.)

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 300, Max.

Mounting: Basic Style, Bore Size: 20mm, Thread: Rc, Stroke: 300mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 1 pc., Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 20mm, Thread: NPT, Stroke: 300mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 1 pc., Speed Control Type: -, Applicable Tubing: -, Suffix: -