Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at

Air Cylinder MGQ Series Compact Guide Cylinder

I W h s i r l Black o-Y69A.Y6gB.O-Y7PV D-Y598.Y698/2 wire system l " ' . . r 6 7 7.5 I 8.5 1--&9p9!9q E!

0.5

Red flashes if the CPU is abnormal. q w e r t y u Green lights up when emitters require cleaning.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

3 AS-F TMH ASD AS AS-FE KE r i o e y !6 !5 r o e y !6 !5 q AS-FG AS-FP AS-FM AS-FM AS-D AS-T ASP !9 !1 q !2 t !0 !1 u !2 t !0 i ASN AQ Component Parts Component Parts Material Description Note Description No. Note Material No.

MXS Series Air Slide Table

MXS12-75 MXS12-50 MXS12-75 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 Table deflection mm Table deflection mm Table deflection mm 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load N 1N = 0.2248 lbf

Hydraulic Cylinders

effective thread depth G Q Q R D R H E E 4-K through 8-L counter bore 4-K through C B + Stroke J J 8-L counter bore A + Stroke M M CHKDB20 & 25 CHKDB32 to 100 Width across flats f c a b g e h + Stroke Rod end male thread (mm) F L A B C D E G H J K M P Q R Bore size (mm) 20 M8 x 1.25 9.5 depth 5.4 51 43 8 12 10 10 6 30 5.5 43 1/8 16.5 6 25 M10 x 1.5 9.5 depth 5.4 53 45 8 14 12 12 6 36 5.5

Coolant Valve

When valve body closes When the power to the pilot solenoid valve is turned off (or when fluid is exhausted from the port 12(P1) of the air operated type), the pilot air under the piston is exhausted, and the return spring closes the valve element. t t e e i i r r Port 1 Port 2 q q N.O. u Component Parts No.

Compact Type

5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Compact Type Dual-Rod Cylinder Series CXSJ

5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Cylinder with Lock

63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32 32 [Example] 50 50 40 40 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph m Graph v 0.5 MPa P 0.5 MPa P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg] Load mass m [kg] 50 50

Angle Seat Valve /

Step 3 e Item Selected item Symbol VXB2 1 5 A H B e L B NPT Thread type Select Indicator. Step 4 Item Selected item Symbol r VXB2 1 5 A H B L L Yes r Indicator For special options, refer to page 5. Step 5 3 Angle Seat Valve / Air Operated Type VXB Series For Steam Can be used with air or water Flow Rate Characteristics N.C.

VNB

Description Material Bronze Note Clear coated Cover assembly Body q Platinum silver painted Aluminum alloy Brass w e Plate assembly Valve element Piston assembly Return spring Pilot solenoid valve Valve material (NBR, FKM, EPR) Stainless steel or brass Valve material (NBR, FKM, EPR) r t y u Aluminum alloy Piano wire Note) Parts e and r are for selection of valve composition.

Ionizer

t q e Description No.

Compact Vacuum Ejector Series ZQ

U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

PSE540/560

to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 1 MPa 0 1 MPa Low pressure 0 to 101 kPa 101 kPa 0 For general purpose fluids Compound pressure 100 to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 500 kPa 0 500 kPa 16-3-24 3 Compact Pressure Sensor For General Air Series PSE540 How to Order ZSE ISE Pressure sensing range PSE 1 3 Vacuum (0 to 101 kPa) Compound pressure (100 to 100 kPa)

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

AMD150 AMD250 AMD350 AMD550 AMD650 AMD850 r Glass fiber NBR Element assembly AMD-EL150 AMD-EL250 AMD-EL350 AMD-EL550 AMD-EL650 AMD-EL850 AMD-EL450 With gasket and O ring AMD800 to 1000 HAl AT IDl AMG Component Parts AFF Part No. AMD800/900/1000 SGP-E, SS400 SGP-E, SS400 No. Description AMD801/901 SGP-E, SS400 Filter case Cover q w AMl SS400 Replacement Parts Related poroducts Part No.

VQ5000

with AMC610-10 installed Approx. 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159 (172.5) 159 (172.5) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 118 (135) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 158.7 158.7 6-Rc3/4 Ports P (SUP), R (EXH) 6-Rc3/4 Ports P (SUP), R (EXH) 2-G1 (electrical