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0 @0 Cap C Piston seal NBR @1 Gasket Bolts for Body Through-hole Mounting Replacement Parts Contents Kit no. Number of pieces Description Part no. MHF2-8D MHF2-8D1 MHF2-8D2 MHF2-8D 2 pieces/unit !2, @0, @1 Seal kit MHF8-PS MHF8-PS MHF8-PS-2 MHF-B08 MHF2-8D1 2 pieces/unit e, r, t, y, !5, !7, !

0 @0 Cap C Piston seal NBR @1 Gasket Bolts for Body Through-hole Mounting Replacement Parts Contents Kit no. Number of pieces Description Part no. MHF2-8D2 MHF2-8D1 MHF2-8D 2 pieces/unit MHF2-8D !2, @0, @1 Seal kit MHF8-PS-2 MHF8-PS MHF8-PS MHF-B08 2 pieces/unit MHF2-8D1 e, r, t, y, !5, !7, !

pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 5 Note 1) 10 Note 1) 5 10 5 10 D-A9 D-A9V D-M9V 5 Note 1) 5 D-M9 10 Note 1) 10 5 Note 2) D-M9W 10 Note 2) 10 5 Note 2) D-M9WV D-M9AV 10 5 Note 2) D-M9A 10 Note 2) 15 15 D-P3DW Note 1) Confirm that it is possible to secure the minimum bending radius of 10 mm of the auto switch lead wire before use.

(R6c. nonnocr op.. md flsht) t l , 2 C.jtlvo Scrws txT33+19 2 S6ll frpplng ScrGws axT3337.10 13, Menual OpEtor PBOl01 15. Mo(rntlng Bas MT33&rl 16. 2 Mounlhg 8a Sclws M5x10 DIRECTIOIIAL AIR VALVES DIMENSIONS/PARTS LIST 3125 3145 NVS 31 SEFIES NVS 3115, NVS 3125 FOOT rOUa{T[{c Prlmary mountlng mlhod ls fool mountlng on the nd of th6 body.

and before communication . 2-2 2.2 Communication specification . 2-2 2.3 Contact input signal . 2-5 2.3.1 Setting of contact input signal type and form . 2-5 2.3.2 Run/stopRunStopExternal switch signal . 2-7 2.3.3 External switch signal . 2-8 2.4 Contact output signal . 2-10 2.4.1 Contact output signal 1 to 3 .2-10 2.4.2 Contact output signal 4 to 6 . 2-11 2.5 Analog output signal . 2-14

VQZ2000 (12.6) VQZ3000 (21.6) VFR2000 (16.2) VFR3000 (41.4) VFR4000 (67.0) 0.5 0.1 0.3 In-line type VFS1000 (9.0) VFS2000 (18.0) VFS3000 (36.0) VFS4000 (64.5) 2-B 5 AS221F (3.5) AS231F (3.5) AS2051F (4.5) AS220 (2.9) AS2000 (3.8) AS3001F (6.5) 1-A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

Refer to page 7-2-5. 2-M3 x 0.5 (Port size) M3 x 0.5 (Relief port: 10See above) (Vacuum port: 11See above) 3.5 20Data C + Stroke 3 B + Stroke A + Stroke Without auto switch With auto switch A B C A B C Bore size (mm) 24 18 29 23 11.5 16.5 6, 8, 10 7-2-7 7 Series CUJ Construction Double acting !3 w e q !1 r y o e t !

Caution Without light SY100-61-1 SY100-61-1-C With light Rated voltage Voltage symbol Part number Part number (For AV) (For AVL) DC24V 24V SY100-61-3-05 SY100-61-3-05-C DC12V 12V SY100-61-3-06 SY100-61-3-06-C AC100V 100V SY100-61-2-01 SY100-61-2-01-C AC200V 200V SY100-61-2-02 SY100-61-2-02-C AC110V 110V SY100-61-2-03 SY100-61-2-03-C AC220V 220V SY100-61-2-04 SY100-61-2-04-C

C J G5-S MODE CV OUT SET 1 2 OUT SET 2 2 MVGQ CC This changes with the DATA RB [DATA] key in the order. : One-shot output : Hold output : Compare output Output configuration input J OUT SET 1 OUT SET 1 DSHIFT SEL SET -X Store the changed content with the [SET] key.

C J G5-S MODE CV OUT SET 1 2 OUT SET 2 2 MVGQ CC This changes with the DATA RB [DATA] key in the order. : One-shot output : Hold output : Compare output Output configuration input J OUT SET 1 OUT SET 1 DSHIFT SEL SET -X Store the changed content with the [SET] key.

LEC-CG2b) M12 4pin b) M12 4pin 2. LEC-CGD 2. LEC-CGD 4.LEC-CGR c) M12 4pin c) M12 4pin 1. LEC-CG1b) M12 4pin b) M12 4pin a) RJ45 8P 1. LEC-CG11.

$nds) TOTAL ENEFGY (n Ib'C) ',t;,; , Pa 1 2 0 100 6 o 9 u o | o o ^ N x ' ' E i . ^ e ' L lo rO t l = o. 9 8 0 9 j o " y 2 0 . . . , . : t':r,/,i o = 2 0 0 2 3 4 5 6 7 TOTAL ENEFGY (in |bs/c) (lhorsands) 1r;;", /l:rt po 120 :-,::: ioo a o : 8 0 t o r { t s o c t 3 = !

CN1: Power supply cable . 19 5.1 Power supply cable specifications . 19 5.2 Wiring of power supply cable . 19 (1) Wiring of the power supply . 19 (2) Wiring of the lock release . 20 (3) Stop the power supply for the motor . 20 1 No. JXC-OMU0029-A 6.

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 2-2-46 Base Mounted Series VQC Plug-in Unit VV5QC41 3(R) port 2-Rc 3/4 Flat ribbon cable connector assembly (26P) 1(P) port 2-Rc 1/2 AXT100-FC26-3: 5 m AXT100-FC26-2: 3 m AXT100-FC26-1: 1.5 m VQC SMC SMC SMC SMC

Max. 20 stations 76 10 Rc1/8 SS0752-C Manifold pitch: 8.5 mm Page 750 C Kit: Connector Max. 20 stations 115 20 M5 thread C2 (2) C3 (3.2) C4 (4) N1 (1/8") N3 (5/32") Rc1/8 Note 2) 115 20 S Kit: Serial transmission (EX510) Max. 16 stations Base Mounted SS0755-CC Manifold pitch: 7.5 mm Page 750 M3 (M3 thread) V2 (2 Barb fitting) V3 (3.2 Barb fitting) V4 (5 Barb fitting) C Kit: Connector Max

Communication specification . 2-2 2.3 Terminal block explanation . 2-2 2.4 Setting and checking . 2-4 2.4.1 Setting and checking . 2-4 2.4.2 Setting and checking . 2-5 2.5 Contact input signal . 2-16 2.5.1 Run/stop signalRemote signal . 2-16 2.5.2 Signal of the external switch. 2-18 2.6 Contact output signal . 2-19 Chapter 3 Serial communication . 3-1 3.1 Precautions wiring communication

Filter block Nil 30 50 0.6 m 3 cores, 1 output, 2 m (Output specifications: N, P) 4 cores, 2 outputs, 2 m (Output specifications: A, B, C, D, E, F) Gasket groove 3 m 5 m 3 4 953 D Series ZR Pressure Switch for Vacuum + Suction Filter Unit: ZR1-F Dimensions: ZR1-F Circuit diagram 2 x Slitted hole (Mounting hole)1 2 2 2 Indicator light (Red) ZR1-FE 10 10 23 2 x 4.5 43 Vacuum pressure setting

specification.2-2 2.3 Terminal block explanation.2-2 2.4 Setting and checking.2-4 2.4.1 Setting and checking . 2-4 2.4.2 Setting and checking . 2-5 2.5 Contact input signal.2-16 2.5.1 Run/stop signal inputRemote signal input . 2-16 2.5.2 External switch signal input . 2-18 2.6 Contact output signal .2-19 Chapter 3 Serial communication. 3-1 3.1 Precautions wiring communication .3-1 3.2 Communication