Rated Flow Range: 0.3 to 25 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: ø6, Output Specification: Out 1: PNP; Out 2: Analog 4 to 20 mA, Lead Wire: Lead Wire w/Connector + Rubber Cover for Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/Flow Adjustment Valve, Calibration Certificate: Calibration Certificate,

Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration Certificate: A (Calibration

Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration Certificate: A (Calibration

Plug-in Unit

: 10 One-touch fitting C12 : 12 One-touch fitting L2 6.5 5.5 108 L1 Manual override Indicator light 65.5 P=25 A A A B A B A B A B A B 21 21 63 9 A A A A A A A 143 163 66 41.5 9 B B B B B SI unit Input block 10 n 1 2 3 4 5 6 7 Stations D-side 8 U-side Formulas L1 = 25n + 106 (Maximum 16 single wiring stations) L2: For one input block.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Port size Body style Port size One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12 VQ20 VQ30 Symbol C6 C8 C10 C12 A: Single unit Manual override None M: For manifold B(1) Locking style (Slotted) Note 1) Only normally closed DIN connector in-line style is possible.

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ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N1 (NPT1/8), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: V (Panel Mount Adapter, w/Flow Adjustment Valve)

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C4 (ø4), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

Compact Manifold Regulator

AP100 17 735 ARM11A/B Series Pressure Switch Block 56 ARM11AW Z A 0.4 0.2 0.6 0.5 20 MPa 24 q w 0.3 0.1 1. Accessory 2.

Compact manifold regulator ARM5 Series

PBT 2 B Port plug 2 Bonnet PBT, HNBR Refer to page 705.

ZSE40/ISE40

Released Workpiece 1 Workpiece 2 Workpiece n Atmosphere A B 4 Max. A: Max. pressure value when a workpiece is adsorbed. ON = A A B 4 Min. B: Min. pressure value when a workpiece is not adsorbed. OFF = B + 16-2-21 8 Series ZSE40/ISE40 Calibration Procedures Auto Preset (In the case of confirming the supply pressure) 1. Auto preset mode 2. Preparation for auto preset 3.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Body (B) Body (B) Threaded portion Body (A) Through hole A port B port Body (A) Hexagon socket head set screw M5 (Hexagon socket head set screws are not availableif Body (B) has no machined threads.)

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B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

Ejector Valve Unit Series ZYY/ZYX 1

ZX B B' A B ZR A B P1 A A' ZM !0 o r t ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com e ZL ZY ZQ ZF ZP !1 ZCU Section A-A' (Ejector) AMJ !

High Precision Digital Pressure Switch, Series ZSE40/ISE40

(ZS-24-B) W1: Rc1/8 01: R1/8 (with M5 female threads) T1: NPT1/8 (with M5 female threads) Rc1/8 Reverse pressure two directions B R1/8, NPT1/8 M5 x 0.8 female threads Panel mount (ZS-22-A) Rc1/8 E M5: M5 x 0.8 (female threads) C4: With 4 One-touch fitting C6: With 6 One-touch fitting Wall mount Wall mount Panel mount + Front protective cover (ZS-24-C) M5 x 0.8 F 4, 6 One-touch fitting

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(ZS-24-B) W1: Rc1/8 01: R1/8 (with M5 female threads) T1: NPT1/8 (with M5 female threads) Reverse pressure two directions B R1/8, NPT1/8 Rc1/8 M5 x 0.8 female threads Panel mount (ZS-22-A) Rc1/8 E * M5: M5 x 0.8 (female threads) * C4: With 4 One-touch fitting * C6: With 6 One-touch fitting Wall mount Wall mount Panel mount + Front protective cover (ZS-24-C) M5 x 0.8 F 4, 6 One-touch fitting