Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 04 (1/2), Output Specification: 1 (OUT1: Analog 1 to 5V)

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1/2, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Dedicated Controller Series LC1 Uniaxial Type

T-nuts (weight 10.0g) Dedicated communication cable (IBM PC/AT compatible computer) M Model LC1-1-RC M Model 17.5 LC1-1-N3 M3 x 0.5 Cable length 02 2m 04 4m 03 3m 05 5m LC1-1-N5 M5 x 0.8 18 7.5 PC Controller T-brackets Model LC1-1-L5 (weight 16.0g) Model LC1-1-L3 (weight 15.5g) Cable length: 2 to 5m M5 M3 17.5 17.5 11 Dedicated communication cable (D-Sub) (for NEC PC-98 Series) Model LC1-

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ZSM Thread type Terminal box Nil Rc PF2 0 Without terminal box (Contact: 1ab) N NPT 1 F With terminal box (Contact: 1ab) G IF 2 With terminal box (Contact: 1b) Note) 5 With terminal box (24 VDC, + COM, Contact: 1b) Port size Data Note) 6 With terminal box (24 VDC, + COM, Contact: 1a) 04 03 3/8 Note) 7 With terminal box (24 VDC, COM, Contact: 1b) 1/2 Note) 8 With terminal box (24 VDC, COM

VHS

4 1 2 Nil Rc 0 1 Left (P) Right (P) 03 VHS40 3 8 N NPT 04 1 2 F G 06 VHS50 3 4 Applicable port size: 1/4, 3/8 JIS Symbol Example of Operating Circuit When using the valve, please refer to the table of applicable effective areas for the respective exhaust ports. 5-8-17 2 Series VHS Construction Precautions Be sure to read before handling.

ZCUK

Weight Basic Style/With Auto Switch (g) ( ): Denotes the values with D-A93.

Metering Valve with Silencer Series ASN2 1

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1 2 Series ASN Construction Component

Body Size/Type: 42 (Elbow Size 04 Standard), Control Type: 0 (Meter-out), 1: 1, Thread Type: G (G), Port Size: 04 (1/2), Applicable Tubing O.D: 10 (ø10)

Electric Actuators

(A contact) G GD GB GDB GU GUB 3 wire/NPN 3 wire/NPN 3 wire/NPN 3 wire/NPN 2 wire/Solid state 2 wire/Solid state 1 1 1 1 1 1 N.O. (A contact) N.C. (B contact) mm kg C kg mm/s mm Standard stroke 50 1.9 75 2.1 100 2.3 125 2.5 150 2.7 N.C. (B contact) N.O. (A contact) Body weight N.C.

Table of Contents

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

BQ-1 BQ-2 Applicable bore (mm) 12 to 25 32 to 100 Weight (g) 1.5 1.5 588 g For the auto switch weight, refer to page 7-9-1.

VZ100/300/500

port 2(A) port VV3Z5-20-1 VV3Z5-21-1 VV3Z5-40-2 VV3Z5-41-2 2.2 2.2 2.1 2.2 2.0 1.6 2.1 0.34 .39 0.35 0.35 0.27 0.32 0.24 0.55 0.59 0.59 0.59 0.47 0.39 0.51 2.3 2.4 2.3 2.4 2.2 2.2 2.3 0.27 0.32 0.27 0.36 0.32 0.27 0.31 0.59 0.62 0.54 0.66 0.56 0.54 0.59 1/8 1/4 1/8 1/4 1/4 1/8 Body ported For internal pilot VZ52 1/8 1/8 1/8 1/8 C6 Base mounted For internal pilot VZ54 VV3Z5-41-1 1/4 1/4 C8

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

1/8 G 1/4 G 1/4 G 3/8 G 3/8 G 1/2 G 1/2 Basic, Axial foot, Rod flange, Head flange, Single clevis, Double clevis, Center trunnion Mounting Standard Strokes Bore size (mm) Standard stroke (mm) Max. stroke Note) 32 40 50 63 80 100 125 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600

CQ2

BQ-1 BQ-2 Weight (g) 1.5 1.5 Refer to p.5.3-75 for auto switch weight.