Suction Flow Rate: 300 L/min (ANR), Supply Pressure: M (0.35 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector), Light/Surge Voltage

Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: E (Vacuum Pressure Switch, Vacuum 2 Outputs), Output: B (PNP Open Collector), Unit: M (SI Unit Only, kPa), Lead Wire: G (Lead Wire w/Connector; Length: 2 m; Included)

Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: E (Vacuum Pressure Switch, Vacuum 2 Outputs), Output: B (PNP Open Collector), Unit: P (w/Unit Switching Function, Initial Value psi), Lead Wire: G (Lead Wire w/Connector; Length: 2 m; Included)

Suction Flow Rate: 600 L/min (ANR), Supply Pressure: M (0.35 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: w/o Valve, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Supprressor: None, Manual Override: E (Push-turn Locking Lever Type), Vacuum Pressure

HRX-OM-W069

Table 3.8-2 RTU mode message frame a)Start b)Slave Address c)Function d)Data e) Checksum (CRC) f)End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).

Swivels

Specifications Body Size (in.) 1/4 3/8 1/2 3/4 1 1-1/4 1-1/2 2 Maximum Rated Pressure (PSI) 5000 5000 5000 5000 4000 4000 4000 3000 Except the following port options in the noted size 03 (Male JIC 37) 3000 2000 05 (Male SAE O-Ring Boss) 2500 06 (Female JIC 37) 90 Housing Port 4000 3000 3000 2500 2000 06 (Female JIC 37) In-Line Housing Port 3000 2000 07 (Female NPSM) 4600 3000 2600 2100 1650

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: Rc, Port Size: 06 (3/4), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 06 (3/4), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: Rc, Port Size: 3/4, Output Specification: OUT1: PNP; OUT2: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/4, Output Specification: OUT1: PNP; OUT2: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

HRX-OM-T004

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

HRX-OM-R028

Calculation example Message for BCC [STX] 01RPV1 [ETX] Calculation ASCII HEX [STX] 02 0 30 1 31 R 52 P 50 V 56 1 31 [ETX] 03 e 65 Code for EXOR from STX to ETX is BCC. Sending message [STX] 01RPV1 [ETX] e 5.7 Command Table 5.7-1 shows the commands which are supported by the product. No response is returned for a request message of a command which is not in Table 5.7-1.

Regulator AR30 to 60

AR30 Option Thread type Port size Symbol Nil B E G P Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 40 Contents With bracket With square embedded type pressure gauge (with limit indicator) Round pressure gauge (with limit indicator) Panel mount (with set nut) Metric thread (M5) Rc NPT G Nil Note 1) 1 4 02 03 04 06 10 N F 3 8 Note 2) 1 2 3 4 1 Note 1) Bracket assembly is not

Filter Regulator AW30, 40

04 06 1 4 3 8 Note 2) 1 2 3 4 Note 1) Bracket assembly is not mounted at the time of shipment, but rather packaged together with the filter regulator for shipment.

Supprressor: Z (w/Light Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: E (Vacuum Pressure Switch, Vacuum 2 Outputs), Output: B (PNP Open Collector), Unit: P (w/Unit Switching Function, Initial Value psi), Lead Wire: G (Lead Wire w/Connector; Length: 2 m; Included), Option: B (Adapter Assembly for Bottom Mounting, Included)

Material: E (Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon/Fluororesin Seal), Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 06 (3/4 Rc), Element Type: P (Paper, Cotton Material), Nominal Filtration Accuracy: 5 μm, Element Seal Material: N (NBR)

Material: E (Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon/Fluororesin Seal), Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 06 (3/4 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 50 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket)

Material: E (Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon/Fluororesin Seal), Element Length: A (ℓ250), Port Size: 06 (3/4 Rc), Element Type: H [Fiber (Honeycomb), Cotton Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: None, Made to Order: X78 (Differential Pressure Indication Switch)