Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

lPSMt

To 140" F High Temperature 2Oo F To 212o F Low Temperature -2O F To 140' F Single Actino Double Actinq Single Actino Double Actino Single Actinq Double Actinq Supplv Pressure 20 to 1OO psi Siqnal Pressureo 3 to 15 psi (split ranqinq possible) Rotarv Anole (stroke 10" to 28'(10-85mm) (0.3" to 3.4" std.)5.9" max.)

lPSMt

To 140" F High Temperature 2Oo F To 212o F Low Temperature -2O F To 140' F Single Actino Double Actinq Single Actino Double Actino Single Actinq Double Actinq Supplv Pressure 20 to 1OO psi Siqnal Pressureo 3 to 15 psi (split ranqinq possible) Rotarv Anole (stroke 10" to 28'(10-85mm) (0.3" to 3.4" std.)5.9" max.)

AFF

AFF37B AFF75B Port size N.C. auto-drain N.O. auto-drain Drain guide B 01 B 06 B 1 8 3 4 1B Accessory 02 03 10 14 B 1 4 B 3 8 04 B 1 2 1 4 1 B 1 2 20 2B Option IN-OUT reversal direction -T Element service indicator AFF75A to AFF220A AFF 75A 20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75 kW 125A 110 to

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

HEC-OM-S008

Data of UT and Check Sum Character data 09 A B C D E F ASCII 30H39H 41H 42H 43H 44H 45H 46H UT and check sum 30H39H(ditto) 3AH 3BH 3CH 3DH 3EH 3FH HECR 3-4 Details of Communication Format 4 Details of Communication Format 4.1 Temperature setting (without writing FRAM) The host computer sets temperature of each Thermo-con. In this command, temperature setting data is not written in FRAM.

Process Valve

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

OUT reversal -T Element service indicator Accessories B 02 03 1 4 3 8 04 1 2 1 1 2 20 2B B B B Options AMD800 to AMD1000 (Self-standing style) AMD801/901 (Piping support style) 20 00 AMD 8 20 01 AMD 8 Port size Port size Body size Body size 8 20 2BFlange 30 3BFlange 20 2BFlange 30 3BFlange 8 9 9 10 40 4BFlange 40 4BFlange 60 6BFlange Style Style 00 With manual drain cock With manual drain

AMF

550 3 4 650 1 850 11 2 1 4 3 8 04 1 2 06 10 14 None B With bracket Port size (Dimension B) 01 B 1 8 02 03 B B Thread B Rc(PT) F G(PF) N NPT 3 4 1B B Note) Refer to p.4.7-7 regarding How to Order of case assembly. 1 1 2 20 2B B AMF800 to AMF1000 (Standing style) AMF801/901 (Piping support style) 20 80 AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

7.3 D C B A PD port size Metric size: Rc1/8 Inch size: NPT1/8 Supply Port Dimensions [mm] Dimensions [mm] N C4 4.7 C6 4.7 N3 4.7 N7 7.3 A B C D E F ZHP63BM 26 45.8 63 68 12.5 33.8 ZHP80BM 28 57 80 85 18 41.8 ZHP63UM 26 63 66 5 20.3 ZHP80UM 26 80 83 5 20.3 Circuit Adapter Dimensions (by Mounting Style) [mm] G H J K L M ZHPmmmA-mmS 25.7 22.6 5 13 M8 ZHPmmmB-mmS 27.1 21.2 6 17 M10 ZHPmmmC-mmS

212

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

Series 10-, 21- AF-A Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

90

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Display accuracy 0.5% F .S. 1 digit (Ambient temperature of 25 3C) Repeatability 0.1% F .S. 1 digit Accuracy Temperature characteristics 0.5% F .S.

ZQ-OM01401

) ZQ000A 3/ (sbar) ] 0.31 C[dm VPV B 0.23 () Cv 0.09 3/ (sbar) ] 0.24 C[dm PDV B 0.26 1) () Cv 0.08 (PV)[kPa] 0 to -101.3 (PS) [MPa] 0.3 to 0.5 [MPa] (PD) [MPa] 2) 0 to 0.45 1 2 PS 0.05MPa 32 - No.ZQ-OM01401-B 9.2 9.3 / [g] ZQUA-K15L-F-00-N () 70 ZQMA-K15L-F-0 () 70 -10 N.O. +2 +5 +20 Assy +25 +45 +50 [g] ZZQ101-BSB 115 ZZQ101-BSC 130 ZZQ101-BPB 150 ZZQ101-BPC 155 ZZQ101

Air Cooled Aftercooler Series HAA 1

C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 HA AT ID AMG AFF AM Misc. 14-15-3

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

(mm) 4 6 8 10 12 (1) AS221FE-01 AS231FE-01 20, 25, 32 R 1/8 AS221FE-02 AS231FE-02 20, 25, 32, 40 R 1/4 AS321FE-03 AS331FE-03 40, 50, 63 R 3/8 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

70pvvna

B (9.5) B (12.7) B (19.1) B (25.4) B (31.8) B (38.1) B (50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 3 8 1 2 3 4 10A 15A 20A 25A 32A 40A 50A 1 2 VNA01 VNA02 VNA03 VNA1 Port 12 (P1) 1 1 1 2 External pilot External pilot External pilot External pilot External pilot Pilot exhaust Bleed port Bleed port 1 4 1 2 10 (P2) Installing a silencer to the

MU

Mounting style Without auto switch (Built-in magnet) Auto switch Basic style Foot style Flange style B L F Nil For the applicable auto switch model, refer to the table below. Auto switches are shipped together, (but not assembled).