Model: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 2 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: R (External Pilot), A,B Port Size: N11 (ø3/8" One-touch Fitting, Straight, Inch), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/

2

(See Fig. 2.)

Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

CLK1

Symbol 32 40 50 63 1 pc. 2 pcs. "n" pcs. Model A B Same side Different sides 4 6.5 8 8 Different sides Same side D-C7, D-C8 31.5 29.5 31 31 n-2 2 15 + 45 ( ) (n = 2, 4, 6...) Approx. Hs D-C7, D-C8 30.5 35 40.5 40.5 50 + 45 (n-2) 15 50 A B 4 6.5 8 8 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) D-C73C 31.5 29.5 31 31 D-C73C 15 65 65 + 50 (n-2) Approx.

Rotary Actuator

4 types Combination of applicable chart A 1 A 2 C 8 C59 Chart 1, 2, 7 A 2 A24 C10 C60 Chart 1, 2, 7 Combination is available only when all the conditions are fulfilled in the combination chart.

Clamp Cylinder with Lock Series CLK1

Symbol 32 40 50 63 1 pc. 2 pcs. "n" pcs. Model A B Same side Different sides 4 6.5 8 8 Different sides Same side D-C7, D-C8 31.5 29.5 31 31 n-2 2 15 + 45 ( ) (n = 2, 4, 6...) Approx. Hs D-C7, D-C8 30.5 35 40.5 40.5 50 + 45 (n-2) 15 50 A B 4 6.5 8 8 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) D-C73C 31.5 29.5 31 31 D-C73C 15 65 65 + 50 (n-2) Approx.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

for 8 One-touch fitting for 10 One-touch fitting for 12 VQ30 VQ20 Symbol 2 3 Effective orifice 3.4mm 4.8mm Series VQ20 VQ30 Symbol C6 C8 C10 C12 Switching N.C.

MLGC

Bore size Bore size MLGCl RSMLGC , #2 (#1+#2+#4) 3.2-8 Series MLGC Auto Switch Specifications Refer to p.5.3-2 for further information on auto switch single body.

MGC

2 !3 !4 !5 !6 !7 !8 No.

The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors' centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication

The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors' centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication

Model: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Ouput Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 10 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: N7 (ø1/4" One-touch Fitting, Straight, Inch), Mounting: AA (Direct Mounting, Name Plate w/Station Number)

Model: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 15 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: BN11 (ø3/8" One-touch Fitting, Elbow, Downward, Inch)

Model: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Ouput Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 8 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: N7 (ø1/4" One-touch Fitting, Straight, Inch), Mounting: AA (Direct Mounting, Name Plate w/Station Number)

Model: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Ouput Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 3 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: N7 (ø1/4" One-touch Fitting, Straight, Inch)

Model: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Ouput Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 6 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: N7 (ø1/4" One-touch Fitting, Straight, Inch), Mounting: AA (Direct Mounting, Name Plate w/Station Number)

Model: 11S (Bottom Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 5 Stations, P,E Port Entry: U (U Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C6 (ø6 One-touch Fitting, Straight, Metric)

Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 2 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), P, E Port Size: N (ø5/16")

Model: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 5 Stations, P,E Port Entry: U (U Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C6 (ø6 One-touch Fitting, Straight, Metric)

Model: 10S (Side Ported), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Ouput Polarity: N (Negative Common, PNP), Valve Stations: 11 Stations, P,E Port Entry: B (Both Sides, 2 to 16 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: N7 (ø1/4" One-touch Fitting, Straight, Inch)