Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: 02 [R1/4 (M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type]

Sensor Range: 3 [For Compound Pressure (-100~100.kPa)], Port Size: 02 [R1/4 (M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type]

AC Servo Motor Driver (Pulse input type/Positioning type)

Positioning Mode: Minimum actuator travel distance of 1[m]. 28 - Recommended Parameter Values [LEY] LEY25/LEYG25 LEY25D/LEYG25D LEY32/LEYG32 LEY32D/LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para. No Initial value Recommended value Number of command input pulses per revolution *3. PA05 100 100 Electronic gear numerator *3.

CG1-SMV13_en

Rc 3/8 22 ~ 24 Maximum Operating Pressure 10 bar Warning Rc 1/2 28 ~ 30 Ambient and Fluid Temperature 5 to 70 C 7.1 Limited warranty and Disclaimer/Compliance Requirements The product used is subject to the following Limited warranty Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. 2.1 Volume Danger and Disclaimer and Compliance

Dedicated Controller

Abnormal driver parameter 28 A driver parameter abnormality in the controller system has occurred. Unsuccessful home position return 30 Trying to execute a program/step without completing the setup (home position return). No designated speed 31 No speed designation with MOVA or MOVI, and no prior speed designation found.

MRQ

Stroke F(N) F(N) 9 15 105 110 115 14 120 125 130 8 13 140 150 175 7 12 5 200 11 Number of auto switches mounted Rotation Linear motion 2 0 0 1 0S 02 S0 S2 SS 1 20 n0 2 2S nS n2 n Combinations of made to order products No.1 to 4 are available. Consult SMC for further information. 1.5-19

VK300

Refer to the above drawing for other dimensions. n L 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 L1 L2 4-5-9 10 Series VK300 Precautions Be sure to read before handling.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

VK300-37-2-01 VK300-37-2-02 VK300-37-2-07 VK300-37-4-51 VK300-37-4-06 VK300-37-3-05 VK300-37-3-53 A1 A2 A3 LW06 LW2 LD4 LD8 100 VAC 200 VAC 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC 4-13-3 4 For details about the applicable products conforming to international standards, visit us at www.smcworld.com. 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 How to Order Valves Electrical entry

VPA4

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5-Rc 1 1/4, 1 1/2 12 14 VPA42706-Rc 1/4 pilot port 5-3-28 5 Series VPA450 Manifold Specifications Specifications Manifold type Exhaust type Supply type Stations B mount Common exhaust, Individual exhaust (1) Common supply port Max. 10 stations (VVPA460

VP4

Note) A/B port piping: Rc 3/8 or Rc 1/2 Option VFS 9 Other Base specifications Individual EXH VS4 1 2 Individual EXH Common EXH Valve stations 02 2 stations VQ7 10 10 stations EVS How to Order Manifold Assembly VFN Specify the valves and blanking plate to be mounted on the manifold along with the manifold base model no.

TM

(mm) H2 Q P L W H1 Model TMA-06 TMA-08 TMA-10 TMA-12 28 21.7 172.5 31.8 25.4 151.2 35 28.1 167.3 37 19 151 17.9 20.3 24.3 26.7 18.6 18.6 22 22 11.4 12.6 15 16.2 6 12 10 8 15-6-32 1 Related Products: Tube Cutter Series TK Tube Cutter: TK-2 Possible to cut a tube up to 18 mm.

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Panel adapter B ZS-22-02 Specifications PF2W300/301 PF2W330/331 Model Flow rate measurement range Note 1) 0.35 to 4.5 l/min 1.7 to 17.0 l/min 3.5 to 45 l/min 7 to 110 l/min Set flow rate range Note 1) 0.35 to 4.5 l/min 1.7 to 17.0 l/min 3.5 to 45 l/min 7 to 110 l/min Minimum set unit Note 1) 0.05 l/min 0.1 l/min 0.5 l/min 1 l/min Accumulated pulse flow rate exchange 0.05 l/pulse 0.1 l/pulse

Modular Type Lubricator Series AL

x 4 nylon tubing Name plate and caution plate for bowl in imperial units (PSI, F) Applicable model AL30 to 60 AL30 to 60 AL30 to 60 AL10 to 60 AL10 to 60 AL10 to 60 AL30 to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 Body size 10 20 30 40 50 60 Thread type Metric thread (M5) Rc NPT G Nil N F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02

3 Way Direct Acting NVKF 300 Series

Oooosite side of 02 2 stations 20 20 stations Same side as A port Port size I B3T lone touch frttina fors/32'tube B7T lone touch fittino for 1/4" tube Body ported / Type 21 (A pon: top porting) NW3KF3-21-@-OOT Applicable valves NVKF3330 OOO -M5 NVKF333O OOO -o1T .

Pneumatic Positioner IP300/IP3100

Single or Double Acting Pilot Valves and Exhaust Valves with Flow 4g,tc rP300 SPECIFICATIONS Standard Temperature 20' F To 140" F High Temperature 20" F fo 212 F Low Temperature -2o' F To 140" F Single Actinq Double Actinq Single Actino Double Actino Single Actino Double Actino Supplv Pressure 20 to 100 psi Sional Pressure. 3 to 15 psi (split ranqinq possible) Rotarv Anqle (stroke) '10'to 28

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

AC Servo Motor Driver (CC-Link Type)

. ## Description 00 Set to the test operation mode. 01 Station number 1 02 Station number 2 03 Station number 3 : : : : 62 Station number 62 63 Station number 63 64 Station number 64 Note 2. $$$ indicates numbers from 0 to 255, and the number indicates the executing point table number. 3. indicates the warning/alarm No. 4. Requires set up software(MR Configurator2TM) . -11- 3.

AC Servo Motor Driver (CC-Link Type)

Refer to "LECSC2-T Operation Manual (Simplified Edition)", section 5.7 for how to set the Point table. -28- Recommended Parameter Values [LEJ] LEJS40 LEJS63 LEJB40 LEJB63 Series Lead symbol H A B H A B T Lead 24 16 8 30 20 10 27 42 Parameter *1,*2 Para. Initial value Recommended value No.

IDX-OM-Y002

Tightening torque: 28 to 30Nm 2) Screw-in an elbow union (size: 17mm) to the drain outlet port and mount the drain tube. 3) Connect the two wires from the auto-drain to the two wires from the product. Drip proof connectors are used, which can be connected by hand.