3 Way,3 Port Solenoid Valve NVZ Series (Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w
(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w
F1 F 1 LLB3 Standard (100 L/min (ANR)) LLB4 High flow type (500 L/min (ANR)) F 1 Filter F With filter Port size 1 3 3N 12 One-touch fitting Rc 3/8 NPT 3/8 Restrictor Note) Use a resin fitting (no metal) for Rc and NPT thread.
(= E) 100 F Dimensions [mm] Model L A B n D E F 11-LEFG16-S-50 144 57 130 4 15 11-LEFG16-S-100 194 107 180 11-LEFG16-S-150 244 157 230 11-LEFG16-S-200 294 207 280 6 2 200 11-LEFG16-S-250 344 257 330 11-LEFG16-S-300 394 307 380 8 3 300 11-LEFG16-S-350 444 357 430 11-LEFG16-S-400 494 407 480 10 4 400 11-LEFG16-S-450 544 457 530 11-LEFG16-S-500 594 507 580 12 5 500 40 11-LEFG25-S 45 64 (102
Table 8.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70
Relationship between the kinematic viscosity 50 0 1 2 3 4 5 10 20 30 40 50 100 Viscosity (mPas) Transfer is possible up to about 100 mPas.
Valve For VCW20 OR-1860-120Nil: NBR F: FKM E: EPDM P: PTFE OR-2380-130For VCW30 Nil: NBR F: FKM E: EPDM P: PTFE OR-2600-180For VCW40 e Nil: NBR F: FKM E: EPDM P: PTFE Manifold For VCW20 r OR-1400-178Nil: NBR F: FKM E: EPDM P: PTFE OR-2670-178When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.
V100 Mounting bracket Thread type SY VT307 manifold Nil F N T Rc G NPT NPTF SYJ Manifold valve can be easily converted from N.C.
Thread type Voltage Rc G NPT Nil F N 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Port size Please consult with SMC regarding other voltages.
A F u Pilot solenoid valve SF4--23 (Refer to the table below.)
Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility
75 100 80 100 90 100 2 D-A3C D-G39C D-K39C 20 + 35 (n 2) (n = 2, 3, 4, ) 75 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Different surfaces) 2 n 100 + 100 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Same surface) 1 10 75 80 90 (Different surfaces) (Same surface) 20 55 75 80 90 75 + 35
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting B L F D Basic type Axial foot type Front flange type Double clevis type CJ5 L 16 S R 60 Without Auto Switch CDJ5 L
T n t Operating conditions Impact mass Collision speed Dropping height Angular speed Unit kg m/s m rad/s m N Nm cycle/min C m 2 1 2 E1 Kinetic energy F S E2 Thrust energy E Distance between rotational center and impact point Thrust Torque Operating frequency Ambient temperature Friction coefficient E1 + E2 Absorbed energy Note 2) E 2 2 Me Equivalent mass m F n t = 5 kg = 0.5 m/s =
Switch 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range 100 kPa 100 kPa For vacuum/ low pressure ZSE30 101 kPa 101 kPa 1 MPa 0 For positive pressure ISE30 100 kPa (0.1 MPa) 1 MPa Rated pressure range of switch Regulating pressure range of switch 16-2-14
20 0.01 CY1H 100 400 250 0 200 400 600 800 1000 1200 1400 1600 Stroke [mm] Piston speed [mm/s] CY1F M2 M1, M3 [Graph 13] Allowable moment [Graph 11] Allowable moment CYP 200 200 100 100 Moment M1, M3 [Nm] Moment M2 [Nm] D CY1S25-Z CY1S25-Z E F D10 10 -X 5 5 100 400 250 100 400 350 Technical Data Piston speed [mm/s] Piston speed [mm/s] 1495 CY1S Series Calculation of Guide Load Factor Calculation
65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D
To minimize the voltage drop, use 100/200 V AC and 24 V DC wires with the largest sectional areas possible and keep the wiring length as short as possible. 5. The 100/200 V AC wire must not be bundled with or arranged in close proximity with the input/output lines of control terminals or encoder signal lines. If possible, keep a 100 mm or larger distance from such lines. 6.
Shock Absorber Specifications Piston Speed Bore sizes (mm) 16 to 63 RB 1007 RB 1412 RB 2015 RB 0806 Model Without stroke adjusting unit 100 to 1000mm/s Max. energy absorption (J) A unit 100 to 1000mm/s Note 1) 5.9 19.6 58.8 2.9 L unit Stroke adjusting unit Stroke absorption (mm) 100 to 1500mm/s Note 2) 7 12 15 6 Max. impact speed (mm/s) Note 1) The air cushion capacity will be reduced when