Ejector Valve Unit, Series ZYY/ZYX Y 3 X 3 ZZY 45 J 1 U Note 1) With ejector Enter the following together with the manifold number: 1. Part No. of solenoid for SY3000/SX3000 2.
Hz 50 60 Port size 50 60 Note 1) CE-compliant: Electrical entry is applicable only for the DIN terminal.
YES Hysteresis mode OFF n_1 n_2 Large pressure and vacuum pressure [n] H (Fix hysteresis) = 3 digits H H ON Window comparator mode NO OFF n_1 n_2 Large pressure and vacuum pressure 3 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Example of Internal Circuit and Wiring ZSE F/ISE --22(L)-(M) 50 60 50 60 ZSE F/ISE --30(L)-(M) 50 60 50 60 With analog output
Controller version (the time in the bracket indicates the schedule for switching) Function Ver 2.0 Ver2.1 to Ver2.4 Ver2.5 (August 2014) (Sept. 2015) (June 2020) Corresponding card motor 6 types LAT3M-50 LAT3M-50 LAT3F-50 LAT3F-50 Alarm history count 4 points 4 points 20 points Communication speed 19200bps 2,400bps 2,400bps 9,600bps 9,600bps 19,200bps 19,200bps 38,400bps 38,400bps 57,600bps
(1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69 MPa) AK1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections ) 100 0.69 75 0.52 0.62 90 0.55 80 60 0.41 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 0.48 70 0.41 60 45 0.31 0.34 50 0.28 30 0.21 40 0.21 30 0.14 15 0.10 20 0.00 0.07 0 10 0 0.00 0 200 400 600 800 1000 Flow
(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I
t41x1.5 M 1 8 X 1 . 5 M 1 8 X l . 5 M22X1.5 t\r26x1.5 27 v4 42 20 45 1 5 3 8 60 I 80 42 100 2t5 52 43 59 v. 30 ls 46 1 0 21 50 168 0 70 I 90 50 1 1 0 58 237 58 52 1 5 66 n 6 ?
t41x1.5 M 1 8 X 1 . 5 M 1 8 X l . 5 M22X1.5 t\r26x1.5 27 v4 42 20 45 1 5 3 8 60 I 80 42 100 2t5 52 43 59 v. 30 ls 46 1 0 21 50 168 0 70 I 90 50 1 1 0 58 237 58 52 1 5 66 n 6 ?
86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 37 40 160 50 140 30 16 17 depth 12 37 95 10.5 M10 x 1.5 depth 20 19 22 142 110 42 45 80 35 194 170 19 Data J K L H I GR O GK GL GQ N S P GD M Q R Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 35 4 4 25 26 M5 x 0.8 54 50 14 105 M6 x 1 M10 x 1.5 depth18 95 9 70 4 103 40 7 7 32 31 M5 x 0.8 62 125 60 M8 x 1.25 14 M10 x 1.5 depth18 95 9
86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 160 50 140 30 40 37 16 17 depth 12 37 95 10.5 M10 x 1.5 depth 20 142 19 22 110 194 80 170 35 45 42 19 Data P GD GK GL GQ GR H I J K L M N O Q R S Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 M5 x 0.8 54 4 4 35 105 50 25 M6 x 1 14 26 M10 x 1.5 depth18 95 9 70 4 103 M5 x 0.8 62 7 7 40 125 60 32 M8 x 1.25 14 31 M10 x 1.5 depth18 95 9
B A A XLAQ Series Case A (mm) Weight (kg) Conductance (L/s) B (mm) Model XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 0.33 40 120 5 0.6 50 133 14 65 1.3 178 45 70 190 2.0 80 : Common to the XLAQ/XLDQ series Variations Variations Bellows seal, Single acting/XLAQ 2-step control, Single acting/XLDQ Bellows type is particulate free and completely cleaned. Pressure balancing mechanism.
50 LECSB2-T8 to to LECSC2-T8 T8 400 40 LECSN2-T81200 1200 LECSS2-T8 *Refet to Applicable Stroke Table.
Standard stroke 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available in 1 mm increments without stroke adjustment with a spacer.
OUT1: Orange Digital filter*4 0, 10, 50, 100, 500, 1000, 5000 ms Enclosure IP40 Withstand voltage 1000 VAC for 1 minute between terminals and housing Insulation resistance 50 M or more (500 VDC measured via megohmmeter) between terminals and housing Environment Operating temperature range Operating: 5 to 50C, Stored: 10 to 60C (No condensation or freezing) Operating humidity range Operating
50% 50% 50% ( ( ( ( 6 6 6 6 ) ) ) ) 1. 1. 1. 1. () 2. 2. 2. 2. 3. 3. 3. 3. 3. 3. 3. 3. 4. 4. 4. 4
tt DIMENSIONS VALVE SIZE A A1 B c D F G H J K M N NVSA 3135 4.41 (112) (e8) 2.8 (65) 2.01 (51) /l at 0.35 1.38 (3s) 't.77 (45) 2.ffi (65) 2.52 (64) 1.97 (50) 0.gB (25) 't.97 (50) 0.98 (251 NVSA 314s (146) 5 (124 3.46 (88) 2.W c/1) 1,38 (35) o.47 (12\ 2.09 2.8 (65) 3.19 (81) 3.23 (82) 2.05 (s2) 1.O2 (26) 2.@ (66) 1.30 (33) Millimeters in Parntheses PARTS LIST NVSA 31i|5 I xTo1gr5 axTo2l-14
Protective ON/OFF, 11.5 Power supply with/without load Three phase AC200/200-280V10% (50/60Hz) 5.2 54.8% (50%/50%) Dimensions 700 (450) W x 845D x 1705H ( ): in case single type Conventional type: INR-499 Safety EMI S2, EU EMC directive conformity Circulating fluid gauge, Back flow prevention of circulating fluid, etc.
IN IDF FS 2 x 4.5 66 IDFA IDFB Model Connection Rc 1/4 NPT 1/4 M5 SFB100-02, 200-02 SFB101-02, 201-02 SFB104-M5 IDH ID IDG SFB102-02, SFB202-02: TSJ 1/4 (Tube Swage Joint) IDK 2 x 4.5 Bracket AMG 2 x TSJ 1/4 Width across flats AFF 24 40 50 AM IN AMD 87 AMH AME SFB103-02, SFB203-02: UOJ 1/4 (Union O-ring Joint) AMF 2 x 4.5 Bracket ZFC 2 x UOJ 1/4 Width across flats 7 6.5 SF SF 9.5 24 40 50
5% ON OFF [F 2] OUT2 36 ( ) ON OFF 50% 5% OUT1 26 No.LFE*-OMY0008 [F 3] 40 1 [F10] 41 [F20] 45 [F22] 46 OFF [F30] 47 OFF[] [F32] 48 OFF[] [F33] 50 FR0 [F34] 51 OFF [F80] 52 [] [F81] 53 OFF [F82] 54 [*] [F90] 55 OFF [F98] 56 OFF [F99] 57 OFF 30 [F10](41 ) OUT2 (20L/min ) OFF OFF OFF OFF 27 No.LFE*-OMY0008 [F 1] OUT1 OUT1 1. 1. 1. 1.
20 11 4.5 60 45 35 55 45 35 55 60 50 60 Rated value 10 104 VXF 2150 83 LVC DC 6 VXF 2160 AC 50 20 11 4.5 60 6 DC Rated value 10 105 LVA 85 VXF 2280 AC 50 40 18 7.5 60 8 DC Rated value 10 108 LVH 85 LVD LVQ LQ LVN TI/ TIL PA PAX PB 17-3-73 4 The VX series will be revised shortly.