Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: TN (NPT Thread), Full Stroke: 50mm, First Stroke: 45mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal
Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: NPT Thread, Full Stroke: 50mm, First Stroke: 45mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -
MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 2020, 30, 40, 50, 75, 100 125, 150, 175, 200 Data MGQ 20, 25 M L M L MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 OUT (N) IN (N) Theoretical Output (N) Bore size (mm) Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Made to Order Specifications (For details, refer to
Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.
C (+) () Lead wire color Lead wire color B () Reset 100 VAC, 200 VAC 100 VAC, 200 VAC AC Yellow Yellow Set Blue Red A A Single solenoid (AC) Latching solenoid (AC) A Set A Blue Red COM Blue Red SOL. C C SOL. SOL. C COM SOL. Gray Gray Reset Single B C B Reset Latching Note 1) Single: No polarity ON: Orange light lights. Note 2) Setting side energizing: Orange light lights.
VXB215 B E(H) 100 300 400 500 600 200 VXB215 C F(H) 100 300 400 500 600 700 800 200 Flow rate Q [kg/h] How to read the graph The sonic range pressure to generate a flow rate of 300 kg/h is P1 0.3 MPa for the VXB215C F(H).
RSH80 RSH80 RSH80 200 200 RSH63 RSH63 RSH63 RSH50 RSH50 RSH50 0.9 Operating pressure : P (MPa) 100 100 0.8 0.7 0 0 10 20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40
[F10] Sub screen Page 41 Flow direction [F20] External input Page 45 [F22] Analogue output Page 46 Free range analogue output for instantaneous flow: OFF [F30] Accumulated value display Page 47 OFF [F32] Setting of flow direction / back flow detection function.
Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) 25 32 40 2000 2000 2000 Stroke adjustment unit symbol Refer to page 1109 for stroke adjustment unit. 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 When stroke is required, which is longer than the standard stroke, refer
45 D 32 40 50 E 64 77 98 FT 20 25 25 O A 221 243.5 299.5 B 93 99 128 CD 20 20 25 L 45 54 56 N 9 11 13 QA 10 12.5 12.5 QB 7 8.5 10 GB 16 24 35 Stroke 30 30 40 Bore size (mm) 50 63 80 14 depth 5 18 depth 6 20 depth 6 P (Piping port) TN NPT 1/8 NPT 1/4 NPT 1/4 R 40 47 54 S 21 24.5 31 T 2 3.5 3 U 5.5 6.4 6.7 V 15.5 16 19.4 W 72 87.5 109 WB 32 38.5 49 X 5 5 6 Y 10 10 12.5 Stroke 30 30 40 Bore
[F/C] +100 (+115) / +37.8 (+45) Nominal inlet air pressure [psig / bar] 34 / 7 Max. inlet air pressure [psig / bar] 232 / 16 Exit pressure drop p [psig / bar] 2.9 / 0.2 Inlet outlet connections NPT-F 1/2 3/4 1 Type of refrigerant HFA 134.a Refrigerant loading [oz / gr] 7.1 / 200 9.7 / 7.1 / 11.5 / 325 275 200 Nominal electric absorption [A / W] 2.2 / 170 2.7 / 210 3.3 / 250 4.3 / 330 5.9
45 45 IDF100150F-W 2.1 2 1 IDX-OM-Z004 2 2.2 2.2.1 (1) (85%) () C 245050 () 2000m ) (2) IDF100150F-W 2.2 2 2 IDX-OM-Z004 2 2.2.2 P.6-3 6.3 IDF-AB501 14 1 1 600mm 600mm 600mm 600mm 600mm 1 2 IDF100150F-W 2.2 2 3 IDX-OM-Z004 2 2.2.3 60 60 IN OUT 2.2.4 40 Y IDF100150F-W 2.2 2 4 IDX-OM-Z004 2 () () Y () 2.2.5 10mm ( IDF100150F-W 2.2 2 5 IDX-OM-Z004 2 2.2.6
Momnt loading Conventional Systetn lHvatal ou dldebL Multipl mounting optims 30 Standard Strcke (mml 125 150 175 200 225 250 275 300 350 400 I ffi75 100 60 I s OF so 'a so =ooi ;slisawl[soww so I T sow lsawjl:ew11 a a a a a a a a a a a a a a a a a a a a a a a a a a a a a t a a a a a a a a a a a a a a a a a a a a a a a a a a '"?FF_PryFry4F!
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 to 50 Indoor Three phases 200 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Single phase 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Power source 90 130 0.4 0.45 1.44 1.4 50 60
840 21 35 37 41 38 44 04 FGDTB 210 1200 23 46 50 56 50 63 06 FGDFB FGESA Note 2) 410 3000 45 90 120 140 100 160 10 FGELA Note 2) 410 3600 50 120 140 170 110 210 20 FGETA FGESB Note 2) 800 3300 70 140 150 160 120 170 10 FGELB Note 2) 800 4200 90 170 180 210 140 230 20 FGETB FGESC Note 2) 1100 3400 83 150 160 170 120 170 10 FGELC Note 2) 1200 4400 120 190 200 220 150 230 20 FGETC FGGSB 160
(Values at the initial period) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 1000 Hz. Test was performed at both energized and deenergized states in the axial direction and at the right angles to the main valve and armature.
K11 1 KL2 70 169'59' t32 222 3S 0 364 CKIA-40-75Y, 5O-7SY, 63-75Y CKA40-40209 167' 75 QKA4040210 177 75 45 90 183'58' 1421232 0 399 ICKIA40-100Y, SOI00Y, 63100Y CKA4040211 202 1 85 140.108'55" t67 267 70 10 484 CKIA40-1'YJY, 50-150Y.
7 44 43 6 42 41 5 Max. 149F (65C) Max. 122F (50C) 40 Inlet air temperature 39 4 38 3 37 0 200 100 400 500 300 Flow rate [SCFM] New stainless steel heat exchanger helps reduce the load of the compressor Easier maintenance V The temperature range for normal operating conditions is indicated by the green zone.
Series CBQ2 Allowable Kinetic Energy Allowable Rod End Lateral Load 0.5MPa 0.4MPa With rubber bumper With auto switch (lateral resistance) 200 100 100 50 50 40 30 Allowable lateral load W (N) 63 20 Load weight kg 50 10 63 40 32 10 5 4 3 50 5 2 40 1 0 10 20 30 40 50 60 70 80 90 100 32 Stroke St (mm) 1 50 100 200 500 300 Maximum speed mm/s (Mounting orientation: Horizontal) W