Dedicated Controller

Unsuccessful home position return 30 Trying to execute a program/step without completing the setup (home position return). No designated speed 31 No speed designation with MOVA or MOVI, and no prior speed designation found. No jump destination 32 No label found at the program designated jump destination.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

H I J K Stroke 5 5 D C 20 +38 +10 +28 I 30 +48 +20 40 +84 +30 +54 50 +94 +40 J H F Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Y 2.5 A B Stroke 20 to 50 mm Dimensions: 10 mm Stroke (mm) A B C D F H I J Y Model ZPT40F10-B01-A14 40 43 12.5 18.5 39 51.5 118 5 50 ZPT50F10-B01-A14 50 53 13.5 19.5 40 52.5 119 6 Additional Dimensions by Stroke (mm) I J H Stroke 20 +10 +5.5 0 30

RSQ

Rod end configuration Bore size (mm) Symbol Specifications Round bar, Chamfered type Roller type Lever type with shock absorber -XA Change of rod end shape 12 10 10 -XC3 Special port location 16 10, 15 10, 15 -XC18 NPT finish piping port 20 10, 15, 20 10, 15, 20 32 10, 15, 20 40 20, 25, 30 20, 25, 30 20, 25, 30 50 Auto Switch Mounting Bracket Part No.

Compact Guide Cylinder End Lock Type SeriesMGP

Bore size (mm) Bore size (mm) DL DM HR LL MO DB Over 25 to 75st 98 Over 75 to 175st 118 Over 25 to 75st 13.5 Over 75 to 175st 33.5 Over 175st 25st or less 25st or less Over 175st 22 22 9.5 21 15 15 84.5 140 16 0 55.5 32 32 26 23 11.5 25.5 21 19 91 98 118 140 16 0 7 27 49 40 40 24 23 13 27 21 19 50 97 114 134 161 20 0 17 37 64 50 25 25.5 11 25 21 19 63 102 114 134 161 20 0 12 32 59 63

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

(PT)1/8 Width across flats 13 Additional dimensions by stroke (mm) H I J Stroke M14 x 1 20 +10 +38 6.2 +28 Width across flats 19 30 +20 +48 40 +30 +84 5 5 D C +54 50 +40 +94 I J Width across flats 7 Width across flats 12 M8 x 1.25 H F Width across flats 12 Width across flats 3 3 2 A B With a stroke of 20 to 50mm Dimensions/10mm stroke A (mm) B C D F H I J Model ZPT20F10-B01-A14 20 22 12.5

Lightweight and Compact

min 30 s 20 s Max.

XL-OMY0002

-1 XLD40-30-1 XLD50-30-1 XLD25-30-1H XLD40-30-1H XLD50-30-1H 63 80 100 160 XLD63-30-1 XLD80-30-1 XLD100-30-1 XLD160-30-1 XLD63-30-1H XLD80-30-1H XLD100-30-1H XLD160-30-1H 1) M9// XLD25-30-1-M9// 2) 3) FKM:No.1349-80XLD25-30-1-XN1 4) S / 25 40 50 AS568-030V AS568-035V AS568-039V AS568-030 ** AS568-035 ** AS568-039 ** B2401-V24V B2401-P42V AS568-227V B2401-V24 ** B2401-P42 ** AS568-227

IDX-OM-W026

IDX-OM-W026-A / Series IDF22E-20(-A,C,K,L,M,R,T) IDF22E-30(-A,C,K,L,M,R,T) IDF37E-20(-A,C,K,L,M,R,T) IDF37E-30(-A,C,K,L,M,R,T) IDF55E-30(-A,C,L,M,R,T) IDF75E-30(-A,C,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 *1) JIS B8370 *2 ) *1) ISO4414Pneumatic fluid power General rules and safety requirements

17

Load Mass Allowable Moment MY1B/M1 MY1B/M3 MY1B/M2 MY1B/m1 200 200 200 300 400 500 20 30 40 50 100 100 50 20 30 40 100 50 10 40 30 20 30 40 50 5 4 3 2 10 Load mass kg Moment Nm Moment Nm Moment Nm 20 5 4 3 2 10 1 10 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B32 MY1B25 MY1B40 0.2 0.3 0.4 0.5 MY1B32 5 4 3 1 MY1B32 MY1B32 MY1B25 0.5 0.4 1 MY1B25 MY1B25 D0.1 0.3 0.2 2 0.5 0.4 0.3 0.05 0.04 0.03 0.2 -X

70pvpump

LVD PAX1000, PA3000, PA5000 LVQ Proper tightening torque (Nm) Connection threads Rc 1/4 12 to 14 LQ Rc 3/8 22 to 24 LVN Rc 1/2 28 to 30 Rc 3/4 28 to 30 TI/ TIL 3. Ensure space for maintenance. When installing and mounting, be sure to allow the space required for maintenance and inspections. Confirm the necessary maintenance space in the instruction manual for each piece of equipment.

Vacuum Pad

( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free pad H Related pad Sponge pad S ( ( ( ( ( Resin attachment K ( ( ( ( Pad with ball spline buffer U ( ( ( ( H Heavy-duty ball joint pad HB Note) The ZP2 series is blast type.

XL-OMV0002

-1 XLC25-30-1 XLC40-30-1 XLC50-30-1-1 XLC16-30-1H XLC25-30-1H XLC40-30-1H XLC50-30-1H-1 63 80 100 160 XLC63-30-1-1 XLC80-30-1-1 XLC100-30-1-1 XLC160-30-1-1 XLC63-30-1H-1 XLC80-30-1H-1 XLC100-30-1H-1 XLC160-30-1H-1 1) M9// 2 (FKM:No.1349-80) XLC16-30-1-M9//-XN1 3)Assy / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401

ZR

With function plate M3 x 0.35 x 75 4 Standard (Without options) M3 x 0.35 x 19 6 AMJ !5 With function plate M3 x 0.35 x 24 6 Components Vacuum switch/Filter unit Misc. 13-3-49

VCC

VCC13-00 45.90.1 38.40.1 230.1 1.2 to 2 hole 16.50.1 4 hole 4 hole Leakage detection port RETURN port 1.2 hole VNA Pilot port IN port VNB OUT port 30 R0.2 SGC 230.05 22.50.05 M26 x 1.5 3.8 hole SGH 240.05 220.05 VNC C1 VNH 30 30 30 VND 2.5 8.5 32.70.05 VCC VCC 40.50.1 TQ 480.1 550.05 Recommended surface roughness of inner surface where the valve is inserted is Rz6.3. 649 VCC Series Dimensions

60

20 30 40 50 for the appearance.

Electric Actuators

to 80 304 280 5 phase to 200 264 2 phase to 200 286 278 5 phase to 100 262 2 phase to 100 274 5 phase to 30 258 2 phase to 30 294 276 5 phase to 80 260 2 phase to 80 Page Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Maximum speed (mm/s) Capacity Standard Deflection LXFHABC LXFHABD to 50 288 304 to 100 LXPBABC LXPBABD LXPBABC-B LXPBABD-B to 50 to 100 290 304 to 50 30W

IDX-OM-W029

IDX-OM-W029-B / Series IDU22E-23(-C,L,R,T,V) IDU22E-30(-C,L,M,R,T) IDU37E-23(-C,L,R,T,V) IDU37E-30(-C,L,M,R,T) IDU55E-23(-C,L,R,T,V) IDU55E-30(-C,L,M,R,T) IDU75E-23(-C,L,R,T,V) IDU75E-30(-C,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC () * 1 ) JIS B8370 * 2 ) ISO4414 *1) ISO4414Pneumatic fluid power General

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

2 phase to 80 Sanyo Denki Co., Ltd. 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Capacity LXFHABC LXFHABD to 50 to 100 LXPBABC LXPBABD LXPBABC-B LXPBABD-B to 50 Tamagawa Seiki Co., Ltd. to 100 Matsushita Electric Industrial

Single Axis Electric Actuator Series LJ1

2 phase to 80 Sanyo Denki Co., Ltd. 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Capacity LXFHABC LXFHABD to 50 to 100 LXPBABC LXPBABD LXPBABC-B LXPBABD-B to 50 Tamagawa Seiki Co., Ltd. to 100 Matsushita Electric Industrial

Compact

There may be large variations (as much as 30%) depending on the ambient environment. The proper mounting position at stroke end detection (A dimension) changes depending on the motor mounting position (standard or symmetric).