Basic Type/Direct Mount Type

51 HR 17 24 30 36 41 51 62 80 90 HS 6 5 8.5 7.5 6.5 7 8 9 9.5 K 7 9 14 11 15 13 15 25 24 G 3 4 5 6 6 7 7 8.5 8.5 HA 17 24 30 36 41 52 62 80 92 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 B 6.5 8 9.5 9.5 11 11

Solid State Auto Switches

50 45 63 45 80 45 100 Mountable models 50 Note) The operating range above indicates average values at room temperature including hysteresis (assuming approximately 30% dispersion).

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

How to Order Compact yet provides a large flow capacity Dimensions (W x H x D)45 x 89.5 x 45 (Grommet) C: 2.6 dm3/(sbar) (Passage 2 3) Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications: VT/VO317V) A single valve with 6 valve functions (Universal porting type) Selective porting can provide 6 valve functions, such as N.C. valve, N.O. valve, Divider valve, Selector

Quick Exhaust Valve Series AQ

1 8 AQ3000 AQ1510 45 33 25 4 21 15 25 8 11 4.3 56 50 12.5 56 , , 1 2 3 4 AQ5000 85 75 18 85 15-12-2

PFxx-OMJ0005CN

No.PF-OMJ0005CN-I () // PFM7## 2 10 13 14 14 16 17 20 22 22 F0 23 F1 OUT1 24 F2 OUT2 27 F3 28 F4 29 F5 30 F6 31 F7 32 F8 35 F9 36 F10 38 F11 39 F12 40 F13 41 F98 42 F99 44 45 49 50 53 54 54 57 59 73 -1No.PF-OMJ0005CN-I (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Quick Exhaust Valve Series AQ 1

1 8 AQ3000 AQ1510 45 33 25 4 21 15 25 8 11 4.3 56 50 12.5 56 , , 1 2 3 4 AQ5000 85 75 18 85 15-12-2 3 Quick Exhaust Valve with One-touch Fittings Series AQ240F/340F Space-saving Rectilinear IN-OUT tubing connections With One-touch fittings and silencer With silencer Lightweight (Resin body) Specifications Fluid Air With silencer With exhaust port fitting Proof pressure 1.5 MPa Max. operating

3 Port Air Operated Valve Series SYJA300 1

Flow Characteristics/Weight Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Weight (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 45 N.O. M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C.

Electric Actuator Triple Axis P&P Unit

M8 x 30 Tightening torque 16.91.7Nm M8 x 20 M5 x 45 Tightening torque 16.91.7Nm Pulley cover mounting process Pulley cover Pulley cover mounting process TP-M3 x 5 TP-M3 x 5 1. Mount the pulley cover using thin head screws. Confirm there is no rattle on the pulley cover. 21 Electric Actuator/Maintenance Guide 6 Be sure to read before handling.

Suction cups with flange

4.7 8.0 12 18 29 48 [kPa] -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -6No.

SQ1000/2000

Note 3) For specifying two or more functions, enter symbols in alphabetical order. 20 Series SQ2000 Manifold Options Labeling plate (-N) SSQ2000-N3-n External pilot specification (-R) Blanking plate SSQ2000-10A-3 Individual SUP/EXH spacer SSQ2000-PR1-3P. 44 P. 45 P. 47 P. 48 C8 L8 External pilot port SUP/EXH block SSQ2000-PR-3-C10 (-S) SUP block plate SSQ1000-B-R Blanking plug KQ2P-04/06/

Turntable Cylinder Series MGT

, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 50 54 47 38 42 35 128 128 148 28 28 48 110 140 166 142 180

ISE70/75/75H

Response time selections: 20ms, 160ms, 640ms, 1000ms, 2000ms 16-2-50 7 Series ISE70/75/75H Digital Pressure Switch For Air/For General Fluids Dimensions ISE70 75 75H / / 39 9 34 MPa ZSE ISE Lead wire with M12 connector (5m) straight OUT1 PSE U P DOWN 70 SET Z I SE3 14.5 PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

NCA1

0.62 1 5 3/4 1.71 3 5/8 2.36 4.75 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 3/8 3/4 1/2 1/2 9/16 5/16-24 2.5 0.3 3/8 3/8 1.26 1.06 0.62 .75 0.62 1 5 3/4 1.71 3 5/8 2.4 4.75 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 3/8 3/4 1/2 1/2 9/16 5/16-24 3 0 3/8 3/8 1.30 1.06 0.62 .75 0.62 1 5 7/8 1.75 3 3/4 2.48 4.88 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1/2 1/2 1 1/4 3/4 5/8 7/8 3/8-24 3.75 0 1/2 5/8 1.57 1.18 1.05

Compact Guide Cylinder End Lock Type SeriesMGP

Bore size (mm) Bore size (mm) DL DM HR LL MO DB Over 25 to 75st 98 Over 75 to 175st 118 Over 25 to 75st 13.5 Over 75 to 175st 33.5 Over 175st 25st or less 25st or less Over 175st 22 22 9.5 21 15 15 84.5 140 16 0 55.5 32 32 26 23 11.5 25.5 21 19 91 98 118 140 16 0 7 27 49 40 40 24 23 13 27 21 19 50 97 114 134 161 20 0 17 37 64 50 25 25.5 11 25 21 19 63 102 114 134 161 20 0 12 32 59 63

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

/4 (C6, C8) 17.5 10.5 24 (58) (C10) (02) 38.5 31.5 24.5 3 48 23.4 Mounting holes (58) 15 15 1.5 1.5 P 3 5 1 2-PE port 2-Rc(PT)1/8 R port 22.2 Die cast hole For manifold gasket positioning Rc(PT)1/4 P port 0 1 0 1 DIN connector (Y): VQZ322 (R)wYwC6, C8, C10, 02 L plug connector (L): VQZ322 (R)wLwC6,C8,C10,02 142 <144> 300 (Lead wire length) 71 <72> Indicator light 31.5 <35> 150 MAX.10 75

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS32-10 S SS ZZ Z 10 104 134 40 20 114 144 50 30 124 154 50 40 134 164 50 21-/2210-/11-/12CXS32-20 CXS32-30 CXS32-40 CXS32-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 144 174 60 21-/2210-/11-/12100 194 224 90 CXS32-75 CXS32-100 75 169 199 70 21-/2210-/11-/1221-/2210-/11-/12859 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Specific Product Precautions Air Preparation Equipment

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

85.5 30.5 43.5 75 85.5 62 75 100 110.5 72.5 85.5 112.5 123 83 96 125 135.5 93.5 106.5 137.5 148 104 117 137.5 148 114.5 127.5 150 160.5 125 138 162.5 173 135.5 148.5 175 185.5 146 159 187.5 198 156.5 169.5 200 210.5 167 180 200 210.5 177.5 190.5 212.5 223 188 201 225 235.5 198.5 211.5 237.5 248 209 222 250 260.5 219.5 232.5 262.5 273 51.5 64.5 87.5 98 L1 L2 L3 L4 4-14-14 15 Body Ported 3

SL5200

50 Flow rate (slpm, N2) 2.65 (67.3) SL5201A High flow option Inlet pressure: 2 psig (14 kPa) Standard 760 0 700 -8 Delivery pressure (Hg abs) 600 -21 Delivery pressure (kPa) 500 -35 400 -48 300 -61 200 -75 100 -88 -101 0 Hastelloy is a registered trademark of Haynes International.

LG1H

Manufacturer M4 x 0.7 M3 x 0.5 Thread size 32.5 21.5 Effective thread length (mm) 8 6 Quantity 2 4 P.C.D. 46 45 Motor mounting area When mounting a coupling on the motor, mount it within the dimensional range shown on the left. A A B Section BB P.C.D.

Sine Rodless Cylinder Series REBR Direct Mount Type

17 42 19 M5 x 0.8 106 44 71.5 M5 x 0.8 8 125 29 24 63 46 46 61.5 25 58.5 28 M6 x 1.0 138 56 86 M6 x 1.0 10 Model N S TW Z ZZ NL NT P PA PB PP W XB REBH15 REBH25 161 65 194 17.5 15 8 M5 x 0.8 50 62 21 88.5 16.5 209 75 250 23.5 20.5 18 9 Rc 1/8 65 75 27 103 9.5 79 Series REBH Dimensions/25, 32 Dual axis type/REBHT LL 138 4-M thread depth MM PA XB PB 2-Rc 1/8 LW S + Stroke EB EA HC HP NL