Mounting: Front Flange, Bore Size: 40mm, Thread: Rc, Full Stroke: 250mm, First Stroke: 90mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Front Flange, Bore Size: 40mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 70mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Front Flange, Bore Size: 40mm, Thread: Rc, Full Stroke: 250mm, First Stroke: 170mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Front Flange, Bore Size: 40mm, Thread: Rc, Full Stroke: 25mm, First Stroke: 20mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Front Flange, Bore Size: 40mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 200mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Front Flange, Bore Size: 40mm, Thread: Rc, Full Stroke: 175mm, First Stroke: 130mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Front Flange, Bore Size: 40mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 10mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Front Flange, Bore Size: 40mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 20mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Front Flange, Bore Size: 40mm, Thread: Rc, Full Stroke: 175mm, First Stroke: 110mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Front Flange, Bore Size: 40mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 100mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Front Flange, Bore Size: 40mm, Thread: Rc, Full Stroke: 250mm, First Stroke: 150mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Front Flange, Bore Size: 40mm, Thread: Rc, Full Stroke: 100mm, First Stroke: 80mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Clean Regulator/Fluororesin Type Refer to back page 50 for Safety Instructions. Pressure Adjustment Warning Maintenance Warning ARJ 1. Check the inlet, outlet, and pilot pressure indicators while undertaking pressure and flow settings. Pressures over the regulated range may cause damage to the internal parts. 1.
or less Nitrogen gas Ultrapure water Sulfuric acid (except fuming sulfuric acid) Note 2) Concentration 30% or less Phosphoric acid Concentration 50% or less The material and fluid compatibility check list provides reference values as a guide only.
4 position 2 position SZ360--M5 M5 x 0.8 79 3 position 4 position 75 1-3-10 11 Cassette Type Manifold Plug-in Type Series SZ3000 Manifold Option SUP block disk Blanking block assembly SZ3000-55-1A These are mounted when later addition of valves is planned, etc.
The overall Cv of a tube and valve system is calculated by combining the Cv of each element as follows: 1 Cv 2 syst 1 Cv1 2 1 Cv2 2 1 Cv3 2 etc Quick approximate calculation can be made by assuming 50% of system pressure drop is made at the valve and 50% in the tube system.
Standard stroke 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available in 1 mm increments without stroke adjustment with a spacer.
Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.) For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.)
IDG60M, IDG100M are fitted with AMH micro mist separator with pre-filter. 1.77 3.53 5.29 Flow Flow Flow 10 25 50 100 200 300 500 600 750 1000 110 170 240 300 100 150 75 50 Single Type 76F (60C) Dew point Single Type 40F (40C) Dew point Single Type 4F (20C) Dew point 3.53 5.29 8.02 11.3 14.12 2.72 5.44 8.29 0.44 1.09 2.19 4.41 8.83 13.24 22.07 25.6 31.78 42.02 Model Inlet Model Inlet Model
/60Hz) kW 8.0/9.0 10.0/11.5 12.0/15.0 () AC200V(50Hz) / AC200,220V(60Hz) 4 ) kW 2.9/3.5 4.0/4.7 4.0/4.8 (50/60Hz) (50/60Hz) A 10.5/11.5 15.4/15.6 15.7/16.0 5 ) A 30 (30mA) R407C (HFC) () V JIS 65A 10K JIS 80A 10K R2 K 16K kg 245 270 350 1, 2 () kW 100 125 150 1(ANR)[2065%] 2[3275%] 3 4 5R 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4 ) R134a 1,430 1,430 R404A 3,922