Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

PD PC Supply port 2-P FF FE EB EA D FC FA GA FG FB FD GD HA, HB GC GB C B A 87 117 105 135 165 125 155 185 215 270 250 310 Model MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 59 79 72 92 112 86.5 106.5 126.5 144 184 165 205 28 38 33 43 53 38.5 48.5 58.5 71 91 85 105 6 (Effective depth 2.5) 19 20 30 28 38 48 32 42 52 55 75 64 84 16

HEC-OM-S008

31 30 33 42 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 34 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 41 34 0D 0A Byte Count Read Data1 Hi Lo 30 32 30 39 34 4D HECR 5-6 MODBUS communication function 5.6 Function codes The table berow function codes to read or write register.

25

(mm) Installation distance (mm) IZS42 Supply pressure: 0.3 MPa With high speed de-ionizing cartridge With energy saving type de-ionizing cartridge 200 200 175 175 Potential amplitude (V) Potential amplitude (V) 150 150 125 125 0.1 Hz 100 100 75 75 50 50 30 Hz 0.1 Hz 30 Hz 25 25 0 0 0 500 1,000 1,500 2,000 0 500 1,000 1,500 2,000 Installation distance (mm) Installation distance (mm) 422 Technical

HRX-OM-W032

PV SV HRS Series 5.21 Communication Function 5-75 HRX-OM-W032 Chapter 5 Display and Setting of Various Functions 30. Perform setting for the contact input signal 1 with [] key or [] key, and press [SEL] key to enter.

LEC-OM02704CN

LECSC-S7 10 30 100 LECSC-S8 10 30 100 (2) (2) PA02 PA02 0 0 00 100W 200W / 400W 02 LEC-MR-RB-032 03 LEC-MR-RB-12 13 10 13 (3) 13.4 100 5m (a) LECSCP-DP-CG3G4 G3-G4 P-D P-D 1 P P C C G3 D (2) 1) G4 5m (1) 1.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

SYJ3000-22-1 SY114-lll Note white white white Body Piston plate End cover Piston Spool Ass'y y u q w e r t VQZ VQD How to Order Pilot Valve Assembly How to Order Connector Assembly VZS VFS : SY100-30-4ASY114 5 G DC VS : SY100-30-1A100V AC Voltage VS7 24V DC 12V DC 6V DC 5V DC 3V DC 100V AC50/60Hz 200V AC50/60Hz 110V AC50/60Hz [115V AC50/60Hz] 5 6 V S R 1 2 : SY100-30-2A200V AC : SY100-30-

OMR0032

Specifications LAT3-10 Stroke 10 mm, Resolution 30 m LAT3-20 Stroke 20 mm, Resolution 30 m Card Motor 8 options LAT3-30 Stroke 30 mm, Resolution 30 m (Refer to the table Product LAT3M-50 Stroke 50 mm, Resolution 5 m Number on the right) LAT3F-10 Stroke 10 mm, Resolution 1.25 m LAT3F-20 Stroke 20 mm, Resolution 1.25 m LAT3F-30 Stroke 30 mm, Resolution 1.25 m LAT3F-50 Stroke 50 mm, Resolution

Stopper Cylinder

Auto Switch Mounting Height (mm) Auto switch model D-A7H D-A80H/F7 D-J79/F7W D-F7BA D-J79W D-F79F D-F7NT D-M9V D-M9WV D-M9AV D-F7V D-F7WV D-F7BAV D-A7 D-A80 D-A73C D-A80C D-J79C D-A9V D-A79W D-P3DWA Bore size (mm) Hs Hs Hs Hs Hs Hs Hs Hs Hs 12 16 20 32 40 50 19.5 17 22.5 20 22 22.5 28.5 24.5 27.5 25.5 25 23 24.5 25.5 31 27.5 30 28 30 27.5 34 36 40.5 36.5 39.5 37.5 35.5 32 30 37.5 38 43.5

New

30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 27 29.5 29.5 29.5 32 32 32 44 54 52.5 53.5 58 56.5 57.5 30 32.5 32.5 32.5 35 35 35 30.5 40 38.5 39.5 44.5 43 44 2 11 9 9 3 11 Conduit terminal DIN terminal Size Port size P Q

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature specifications Indicator Valve size 16 25 40 50 General use Without XLA16-30-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 With XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 High temperature Without XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 With XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 Temperature

XL-OMY0001

-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 63 80 XLA63-30-1-2 XLA80-30-1-2 XLA63A-30-1-2 XLA80A-30-1-2 XLA63-30-1H-2 XLA80-30-1H-2 XLA63A-30-1H-2 XLA80A-30-1H-2 11,2 FKM:No.1349-80[ ]P8 XLA16A-30-1-2-XN1 2 M9

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

5 Port Air Operated Valve

EXH port EXH port VF 000 75 A 1 3 Series Thread type Nil F N T Rc Symbol 3 5 Series Port size VFA3000 1/8 G VFA5000 1/4 NPT NPTF 1514 5 Port Air Operated Valve Body Ported/Manifold VFA1000/3000/5000 Series Dimensions: VFA1000 Series Type 30: VV5FA1-30-1-: Common exhaust 1/8 [4 (A), 2 (B) port] 12 L2 L1 SYA M5 5 10 17.5 17.8 27.8 M5 x 0.8 [4 (A), 2 (B) port] 10 SYJA 20.3 20.3 4A 2B VZA P R

Vacuum Pad: Ball Joint Type

ZP3 Rotating J K 10 to 16 20 to 50 Non-rotating 10 10 mm ZP3E 20 20 mm 30 30 mm ZP2 40 40 mm 50 50 mm ZP2V ZP Note) Pads are exclusively ball joint type and are not interchangeable with other pads.

Series MXP Precision Air Slide Table

47 13 J Mounting base side B D 16.5 14.5 Across AA MXP16-30 Without magnet and switch rail 2-M20.4, 3 deep For magnet mounting 2-M30.5, 3.5 deep 8 For rail mounting 10.7 8.5 6-M50.8 20 20 7 deep L (mm) Model G H J K L M S V W Z MXP16-20 18 58 93 40 36 40 20 82 65 102 MXP16-30 28 70 119 50 42 56 30 108 75 128 170 170 Precision Air Slide Table Series MXP Cautions for Auto Switch Mounting

Dedicated Controller

Unsuccessful home position return 30 Trying to execute a program/step without completing the setup (home position return). No designated speed 31 No speed designation with MOVA or MOVI, and no prior speed designation found. No jump destination 32 No label found at the program designated jump destination.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

H I J K Stroke 5 5 D C 20 +38 +10 +28 I 30 +48 +20 40 +84 +30 +54 50 +94 +40 J H F Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Y 2.5 A B Stroke 20 to 50 mm Dimensions: 10 mm Stroke (mm) A B C D F H I J Y Model ZPT40F10-B01-A14 40 43 12.5 18.5 39 51.5 118 5 50 ZPT50F10-B01-A14 50 53 13.5 19.5 40 52.5 119 6 Additional Dimensions by Stroke (mm) I J H Stroke 20 +10 +5.5 0 30

RSQ

Rod end configuration Bore size (mm) Symbol Specifications Round bar, Chamfered type Roller type Lever type with shock absorber -XA Change of rod end shape 12 10 10 -XC3 Special port location 16 10, 15 10, 15 -XC18 NPT finish piping port 20 10, 15, 20 10, 15, 20 32 10, 15, 20 40 20, 25, 30 20, 25, 30 20, 25, 30 50 Auto Switch Mounting Bracket Part No.

Compact Guide Cylinder End Lock Type SeriesMGP

Bore size (mm) Bore size (mm) DL DM HR LL MO DB Over 25 to 75st 98 Over 75 to 175st 118 Over 25 to 75st 13.5 Over 75 to 175st 33.5 Over 175st 25st or less 25st or less Over 175st 22 22 9.5 21 15 15 84.5 140 16 0 55.5 32 32 26 23 11.5 25.5 21 19 91 98 118 140 16 0 7 27 49 40 40 24 23 13 27 21 19 50 97 114 134 161 20 0 17 37 64 50 25 25.5 11 25 21 19 63 102 114 134 161 20 0 12 32 59 63

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

(PT)1/8 Width across flats 13 Additional dimensions by stroke (mm) H I J Stroke M14 x 1 20 +10 +38 6.2 +28 Width across flats 19 30 +20 +48 40 +30 +84 5 5 D C +54 50 +40 +94 I J Width across flats 7 Width across flats 12 M8 x 1.25 H F Width across flats 12 Width across flats 3 3 2 A B With a stroke of 20 to 50mm Dimensions/10mm stroke A (mm) B C D F H I J Model ZPT20F10-B01-A14 20 22 12.5