4/5 Port Air Operated Valve Series SYJA3000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1-5-42 5 Port Solenoid Valve Rubber Seal Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-4.5

F

3.5 8 14 KQU08-U02 17 15.2 52 15.2 46 18.5 25.6 1/4 1/8 KQU07-U01 14.29 13.2 44.5 13.2 40.5 17 4.6 8 38 KQU08-U03 17 15.2 51.5 15.2 45.5 18.5 25.6 1/4 1/4 KQU07-U02 14.29 13.2 46 13.2 40 17 4.6 10 14 KQU10-U02 19 18.5 57.5 18.5 51.5 21 40 1/4 3/8 KQU07-U03 17.46 13.2 46.5 13.2 40.5 17 4.6 10 38 KQU10-U03 19 18.5 57.5 18.5 51.5 21 40 5/16 1/8 KQU09-U03 17.46 15.2 50.5 15.2 46.5 18.5 6 10

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

W is width across flats dimension. 30.5 26 36 9 10 40 32 36 47 108 Union: LQ2U Metric sizes Applicable tubing O.D. Model L M N W H E W 12 19 10 12 6 8 10 4 6 LQ2U22 LQ2U21 19 18 19.9 16 55 1/4 (M) LQ2U52 LQ2U51 LQ2U42 LQ2U41 LQ2U33 LQ2U32 LQ2U31 SMC 65 22 24 26.2 24 H 77 64 (E) (E) L 28 30 33.1 30 21 Class 2, 3 88 75 32 36 40 36 26 86 (M) N Inch sizes Applicable tubing O.D.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

MGZ Series

: 201 to 300mm 80 40 50 50 20 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

VXP21/22/23

) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MHR2-10/MDHR2-10 MHR2-20/MDHR2-20 50 60 Overhang distance H (mm) Overhang distance H (mm) 50 40 Pressure 0.2 MPa Pressure 0.2 MPa 40 30 30 0.3 MPa External grip 0.3 MPa 0.4 MPa 20 0.4 MPa 20 0.5 MPa 0.5 MPa 0.6 MPa 10 0.6 MPa 10 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

MHR2-10/MDHR2-10 MHR2-20/MDHR2-20 50 60 Overhang distance H (mm) Overhang distance H (mm) 50 40 Pressure Pressure 40 30 External hold 0.2MPa 0.2MPa 30 0.3MPa 0.3MPa 0.4MPa 20 0.4MPa 20 0.5MPa 0.5MPa 0.6MPa 10 0.6MPa 10 0 10 20 30 40 50 0 10 20 30 40 50 60 Holding point L (mm) Holding point L (mm) MHR2-15/MDHR2-15 MHR2-30/MDHR2-30 80 50 H 70 Overhang distance H (mm) Overhang distance H (mm

Air Cylinder CP Series Cylinder Positioner Assembly

8.86 (2251 1 . 1 8 (30) 2.05 \521 0.55 (14) 0.83 l21l M12x1.75 043 ( 1 1 ) [426x].5 1.57 (40) 4.96 (126) 4.57 (116) 0.53 13.5) 0.71 (18) 5.91 1150) 3.62 ls2) 1 5 7 (40) 524 (133) 016) 3.62 \92) 'Min.

Modular Type Regulator Series AR

50 60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10 1/8 3/8 1/4 1/2 3/8 3/4 1/2 1 3/4 Option Note 1) 1 Symbol Nil B G Note 2) Applicable model AR25 to 60

Title not found

8.86 (2251 1 . 1 8 (30) 2.05 \521 0.55 (14) 0.83 l21l M12x1.75 043 ( 1 1 ) [426x].5 1.57 (40) 4.96 (126) 4.57 (116) 0.53 13.5) 0.71 (18) 5.91 1150) 3.62 ls2) 1 5 7 (40) 524 (133) 016) 3.62 \92) 'Min.

KJ

40 41 44 5 32 17.5 16 3 10.4 11.4 10.7 18.5 18 18.5 19.5 3 16 16.5 3.5 Applicable fitting size 1 4 13.2 17 4.6 5 16 14 18.5 6 19 21 7 3 8 17.9 Note) D: Max. diameter 22 Bulkhead Union: KQ2E Applicable tubing O.D.

KR

Connection thread 17 15.2 1 4 KGU08-02 18.5 8 15.2 3 8 KGU08-03 2-applicable tubing 1 4 KGU10-02 40 28.4 30 40 65 61 62 65 19 18.5 3 8 KGU10-03 21 10 18.5 1 2 KGU10-04 22 1 4 KGU12-02 64.5 65.5 68.5 57.4 45.4 32 40 65 3 8 KGU12-03 20.9 22 20.9 12 22 1 2 KGU12-04 Note) D: Max. diameter Reference dimensions after R thread installation.

Ionizer

Model with 40 mm-pitch emitter cartridges Position Detection Switch Flow Sensor Pressure Control Pressure Sensor Part no.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

4.5 (piping port) (same on reverse side) 7 3 8.5 30 8 Model S ZZ Z SS CXS10-10-XB19 10 82 65 CXS10-15-XB19 15 87 70 30 (20) (Z) 2-M4 x 0.7 Thread depth 7 CXS10-20-XB19 20 92 75 CXS10-25-XB19 25 97 80 6 CXS10-30-XB19 30 102 85 CXS10-35-XB19 35 107 90 40 CXS10-40-XB19 40 112 95 CXS10-45-XB19 45 117 100 CXS10-50-XB19 50 122 105 CXS10-60-XB19 60 132 50 115 CXS10-70-XB19 70 142 125 CXS10-75-XB19

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard strokes (mm) Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mm 40 L = 240 mm L = 200 mm L = 160 mm L = 120 mm L = 80 mm L = 180 mm L = 140 mm L = 100 mm L = 60 mm 30 50 20 10 Workpiece weight (kg) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements Model Selection Allowable lateral

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements Model Selection Allowable lateral load MIW8 MIS8 MIW12 MIS12 0.7 MPa 70 0.7 MPa 30 0.6 MPa RE A B 0.6 MPa 0.5 MPa 60 REC 0.4 MPa 0.5 MPa 0.3 MPa 0.4 MPa Lateral load F (

Rubber seal 5 Port Solenoid Valve Series SYJ7000

-L3 4 5 01 02 M plug connector (M): SYJ7 40-M3 4 5 01 02 DIN terminal (D): SYJ7 40-D3 4 5 01 02 M8 connector (W0): SYJ7 40-W03 4 5 01 02 Applicable cable O.D. 3.5 to 7 141.8 [146.2] Approx. 300 (Lead wire length) 91 57.5 [64.5] 83.5 42.1 72.2 M8 x 1 Pg7 57.1 62 (Lead wire length) Approx. 300 44.5 68.6 [75.6] 20 20 20 20 87.6 37.6 122.2 [126.6] 81.1 31.1 22 22 22 22 65.1 15.1 161.8 63 63 63