m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard250.22

Thomas Oil-less Diaphragm Compressor / Vacuum Pump Flow Rate: .95 LPM , .95 LPM, Max Pressure: 2.9 PSIG / 200 mbar , 2.9 PSIG / 200 mbar, Max Vacuum: 11.2 in HgV / -380 mbar , 11.2 in HgV / -380 mbar, Voltage (DC): 3.5, DC Motor Type: Low Cost, Item Dimensions: Length: 1.69 in / 43 mm Width: .91 in / 23 mm Height: 1.46 in / 37 mm , Length: 1.69

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump, 12v/50Hz Flow Rate: .95 LPM , .95 LPM, Max Pressure: 8.7 PSIG / 241 in H20 / 600 mbar , 8.7 PSIG / 241 in H20 / 600 mbar, Max Vacuum: 5.9 in HgV / -200 mbar , 5.9 in HgV / -200 mbar, Voltage (50 Hz): 12, Frequency (Hz): 50, Phase: 1-phase, Item Dimensions: Length: 2.83 in / 72 mm Width: 2.09

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Rotary Actuator

[mm] Note 1) Port size A B C D (g6) DD (h9) F H J K With auto switch Without auto switch U W BA BB BC CA CB Note 2) Key dimensions S SB SC SD SE S b L1 Size D50 Rc1/8 62 48 46 15 25 2.5 36 M8 1.25 depth 8 5 156 (189) 1.5 5 14.5 33 144 (177) 98 17 17 8.5 6 9.5 7.5 5 0 0.030 25 63 Rc1/8 76 60 57 17 30 2.5 41 M10 1.5 depth 12 5 175 (213.5) 1.5 5 21.5 33 163 (201.5) 117 19.5 20 10 7 11 8

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

CM2

46 41 77 25 37.5 50 75 100 125 90 102 115 140 165 12.5 54 67 79 92 117 142 167 190 With Rod Boot With Air Cushion Built-in One-touch Fittings Symbol Q P N1 WB G ZZ Bore size (mm) WA Bore size (mm) Stroke Bore size (mm) 20 20 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 21.5 6 8.5 8 13 17.5 20 25 25 158 171 183 196 221 246 271 24.5 6 10.5 8 13 17.5 25 32 32 162 175

30

size (mm) Maximum operating tensile and compressive force (N) Allowable eccentricity (Umm) Rotating angle Basic type Standard/Thread nominal size JC20-8-125 JC30-10-125 JC40-14-150 JC63-18-150 0.5 0.5 0.75 1 300 800 1250 3100 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 20 25/32 40 50/63 5 Semi-standard/Thread nominal size JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175

Electric Slide Table / High Precision Type 《 AC servo motor 》

type) Operating temperature range [C] 5 to 40 Operating humidity range [%RH] 90 or less (No condensation) Regeneration option May be required depending on speed and work load Motor output/Size 100W/40 200W/60 Electric specifications Motor type AC servo motor (100/200 VAC) Encoder Incremental 17-bit encoder (Resolution: 131072 p/rev) Horizontal 45 65 Power consumption [W] *5 Vertical 145 175

CM2

52 65 77 90 115 140 165 36 18.2 40 77 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 54 67 79 92 117 142 167 46 20.2 Built-in One-touch fitting With rod boot With air cushion (mm) Symbol Bore ZZ Bore WA G N1 WB P Q Stroke 1 to 50 17.5 13 8 8.5 6 23 20 20 Bore 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 158 171 183 196 221 246 17.5 13 8 10.5 6 26 25 25 25 162 175

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

78 60 M plug connector (M) R 3 1 P (Lead wire length) 94.5 83 Cover diameter 1.5 Cross section 0.23 mm2 300 61.5 <66.5> Indicator light 1 P 3 R < >: AC Formula L1 = 19n + 11 L2 = 19n + 23 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 49 61 87.5 98 68 80 100 110.5 87 99 125 135.5 106 118 137.5 148 125 137 162.5 173 144 156 187.5 198 163 175

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

Locking direction Maximum operating pressure Unlocking port size 50 Spring locking (exhaust locking) 0.2MPa or more (29 psi) 0.05MPa or less (72 psi) One direction (extension locking, retraction locking) 1.0MPa (145 psi) Rc 1/8 40 63 Holding force N (lbf) (maximum static load) 982 (220) 629 (141) 1559 (350) Standard Strokes Bore size (mm) Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

override (29.3) 104 D side U side Stations 1 2 3 4 5 n 2-M50.8(E port) 2-M50.8(P port) 42.9 A A (8.5) 20 5 15 (7.5) 5 (A port) n-M50.8 15 P=10 Dimensions n: Stations(Max.18 stations) Equation : L1=10n+32 L2=10n+43 n L 2 52 63 83 112.5 123 3 62 73 93 112.5 123 4 72 83 103 125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175

EX500-GPR1A.eng

12 12 12.5 12.5 13 13 13.5 13.5 74 86 98 110 122 134 146 158 98 110.5 123 135.5 148 160.5 173 185.5 135.5 185.5 L1 L3 (L4) 12.5 13.5 110 158 125 175 DIN Rail (7.5) 5 49 32.2 39.7 1 2 3 L4 [mm] L3 [mm]: Manifold length L2 [mm]: Mounting pitch L1 [mm]: Rail length Installation When only input blocks for M12 connector are connected Tighten the bolts of Input unit and end block to secure the

ISG

Hysteresis adjusting bolt 75 110 175 Ex.)1S2761 Bellows assembly for 103L1 1S2761 Light and top cover assembly for 103L1 18 8.5 When replacing other parts, please contact SMC for repair, since it cannot be repaired by user. 2.3 56 3-6.3 23 20 32 10 29 10 26 79 99 126 R 3/8 16-9-8

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

300 (Lead wire) Cover dia 1.5 Cross section 0.23mm2 Indicator light 89 77 78 R 3 1 P : AC Equation L1=16n+11 L2=16n+22 n: Station (Max. 20) Dimensions L n 2 43 54 75 85.5 20 331 342 362.5 373 15 251 262 287.5 298 16 267 278 300 310.5 17 283 294 325 335.5 18 299 310 337.5 348 19 315 326 350 360.5 12 203 214 237.5 248 13 219 230 250 260.5 14 235 246 275 285.5 7 123 134 162.5 173 8 139 150 175

3 position cylinder series RZQ provides intermediate stop mechanism. 2 intermediate strokes are possible with only a small extension in total length. First stage stroke can be specified without changing the overall length. High accuracy is achieved by an intermediate stop method of pressing metallic components against each other. A tube rod with a large bore which is 70% the piston diameter

Mounting: L (Foot), Bore Size: 40mm, Thread: TN (NPT Thread), Full Stroke: 50mm, First Stroke: 30mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Mounting: L (Foot), Bore Size: 40mm, Thread: TN (NPT Thread), Full Stroke: 200mm, First Stroke: 120mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: M (1m)