CM2

I-020B I-032B I-040B E1 L1 MM H A1 MM +0.058 0 +0.058 0 +0.070 0 0.1 0.2 0.1 0.2 0.1 0.3 +0.058 0 +0.058 0 +0.070 0 0.1 0.2 0.1 0.2 0.1 0.3 9 14 10 16 20 36 M8 X 1.25 9 9 10 14 18 46 66 41 9 M8 X 1.25 M10 X 1.25 9 14 10 18 20 38 9 9 10 14 22 48 69 45 9 M10 X 1.25 M14 X 1.5 15.5 16 20 14 22 24 55 12 16 20 24 69 92 50 12 M14 X 1.5 Double Knuckle Joint (mm) Bore size 20 25/32 40 A L NX2 R2 U2

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

JXCx-OMU0004

1000 1000 [mm/s [mm/s] 20 10 2] 1000 1000 [mm/s [mm] 1 1 3 LEP6 LEP10L LEP10 J K J K J K 7 14 12 24 12.5 25 8.5 17 16 32 19 37.5 [N] 10 20 20 40 25 50 [mm/s] 20 10 20 10 20 10 *LEP6 30%F.S.LEP10 25%F.S.

MB1

MM L1 E1 E1 L1 NDH10 NX U1 ND H10 NZ MM R1 U1 R1 NX A A1 32 40 50, 63 80 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 22 28 40 40 30 40 50 65 65 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

) Applicable manifold base SS5YJ3-20 SS5YJ3-21P Applicable manifold base SS5YJ3-31 SS5YJ3-S31 SS5YJ3-32 SS5YJ3-S32 SS5YJ3-32P Applicable manifold base SS5YJ3-41 SS5YJ3-S41 SS5YJ3-46 SS5YJ3-S46 A Mark A Mark A Mark Manifold gasket Manifold gasket Manifold gasket VJ3000-14-3 VJ3000-14-2 VJ3000-14-1 Difference between SYJ3l3 and SYJ3l4 0 3 0 3 Combination of Blank Plate Ass'y and Manifold Base

RQ

to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 7-7-14 for details on rod end nut and accessories.

0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM.

CNG

A1 E1 L1 I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 +0.058 0 0.2 0.4 8 8 0.2 0.4 10 0.3 0.5 18 16 20 22 +0.4 +0.2 8 16 34 41 42 2 25, 32 40 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 8 10 10 21 11.5 25 30 30 20 34 41 42 8.5 M8 x 1.25 10.3 16 20 36 IY-G02 IY-G03 IY-G04 +0.058 0 10 +0.058 0 10 +0.4 +0.2 10 20 M10 x 1.25 25.6 14 M10 x 1.25 12.8 25, 32 40 10.5 16 +0.5 +0.3 18 M14 x 1.5 41.6

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 8 10 10 14 14 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Applicable pin DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Part No.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Bore (mm) L1 CD CT CU CW CX CZ L RR Inch Inch Metric 5 5 8 10 Metric 14 15.5 18.5 22.5 12 16 20 25 3/16 3/16 5/16 3/8 11.5 11.5 12.5 14.5 4 4 5 5 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 6 6 9 10 Note on dimensions: Except where indicated, metric (mm) dimensions are shown. 1inch = 25.4mm Dimensions indicated with () apply only to inch mounting option (NN thread option

HRX-OM-X071

W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types of Hazard Labels . 9-16 9.8.1 Locations of Hazard Labels . 9-16 9.9 Daily Check . 9-17 Chapter 10 Product Warranty . 10-1 HRR Series HRX-OM-X071 Chapter 1 Safety

Cylinder with Lock Series CNG

I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 34 41 42 10.3 12.8 12 25 30 30 10.3 12.8 12 + 0.058 0 -0.2 -0.4 8 8 -0.2 -0.4 10 -0.3 -0.5 18 16 20 22 34 41 42 11.5 14 14 20 25, 32 40 8.5 10.5 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 16 20 22 8 10 10 16 20 36 21 25.6 41.6 11.5 14 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 25 30 30 8.5 10.5 16 + 0.4 + 0.2 8 IY-G02 IY-G03 IY-G04 20 25, 32 40 + 0.058 0 10 + 0.058 0 10

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model L VXA H M H W E VN LQ1U1A LQ1U2A LQ1U2B LQ1U2C LQ1U3A LQ1U3B LQ1U4A LQ1U4B LQ1U5A LQ1U5B LQ1U6A LQ1U6B 10 11.5 29 10 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 1/2" 3/8" 3/4" 1/2" 1" 3/4" LVC 16.5 14 41 14 15 25 1 LVA 17 17 20 54 23 Class 6 LVH 28 21 21 24 63 LVD 77 26 26 29 39 (E) shows the approximate dimension of the inserted tubing from the end of the nut.

SZ3000

L 20 46 (7.5) L 14 1 8 55 47.04 (35) (25) 5.5 Approx. 10 25 13 2-M2.6 x 0.45 Socket side Rail mounting hole pitch 12.5 Plug connector HDB-CTF Terminal No.

51

Pin M10 x 1.25 10.5 12.8 14 25.6 M14 x 1.5 22 16 12 14 41.6 M18 x 1.5 28 20 16 20 50.6 M22 x 1.5 38 23 21 27 64 M26 x 1.5 44 24 24 31 72 L1 Pivoting Bracket (Order separately) (mm) Material: Iron Applicable bore size (mm) Included retaining ring 20 25, 32 40 50, 63 80 100 Dd9 Part no.

RSQ

1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 T 20 24 36 44 56 U 22.5 24.5 31.5 35 41 V 18 22 20 28 28 W 41.5 48 58.5 66 80 Y 38 47 Z 14 14 19 Bore size (mm) 16 20 32 40 50 Note 4) These figures show the piston rod extended.

CNG

I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 34 41 42 10.3 12.8 12 25 30 30 10.3 12.8 12 + 0.058 0 -0.2 -0.4 8 8 -0.2 -0.4 10 -0.3 -0.5 18 16 20 22 34 41 42 11.5 14 14 20 25, 32 40 8.5 10.5 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 16 20 22 8 10 10 16 20 36 21 25.6 41.6 11.5 14 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 25 30 30 8.5 10.5 16 + 0.4 + 0.2 8 IY-G02 IY-G03 IY-G04 20 25, 32 40 + 0.058 0 10 + 0.058 0 10

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l2 d3 CN S5 K1 G1 G2 EN EU CH H6 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 67 50 23 15 16 9 52 10.5 37 35 21 15 50 12 18 20 11 66 86 11.5 47 40 60 25 18 63 14 27 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 20 30 13.5 94 124 17 70 60 90 37 25 90 20 40 Black color

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ115-M VQ110-L 4-14-19 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-14-20

Thermo-chiller/Rack Mount Type

Power supply 20 Single-phase 200 to 230 VAC (50/60 Hz) 14 HRR Series Specifications: 200 to 230 VAC Air-cooled Refrigeration Model HRR012-A-20 HRR018-A-20 HRR024-A-20 HRR030-A-20 Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge [kg] 0.38 0.47 Control method PID control Ambient temperature/Humidity/Altitude1, 13 Temperature: 5 to 40C, Humidity: 30 to 70%,