VQ

3 SOL. 4 stations 4 SOL. 5 stations 5 SOL. 6 stations 6 SOL. 7 stations 7 SOL. 8 stations 8 SOL. 9 stations 9 A Black White SOL. 10 stations 10 w SOL. 11 stations 11 SOL. 12 stations 12 B SOL. 13 stations 13 q SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 2.9-5 3 Port Solenoid Valve Series

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

5 to 50 46.5 39.5 9 depth 7 40 56.5 49.5 13 16 52 8 M8 x 1.25 69 5 14 7 40 5.5 1/8 11 66 35 14 75, 100 56.5 49.5 10 to 50 48.5 40.5 11 depth 8 50 58.5 50.5 15 20 64 10.5 M10 x 1.5 86 7 17 8 50 6.6 1/4 10.5 80 41 19 75, 100 58.5 50.5 6 Series CQ2Y Mounting bracket dimensions are the same as those of the anti-lateral load type of Series CQ2S.

VXR21/22/23

N 59 60 60 Port size P Rc H F E A N Q L K J B C D M 74 (81) 88 (98) 90 (100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80 (90) 82 (92) Normally open Normally closed VXR215006 04 06 04 VXR2152, 1 1 VXR2262-10 VXR2272-12 80 90 125 101 (112) 119 (136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45

Antistatic One-touch Fittings Series KA

(mm) Q L M D Part No. Soft nylon Polyurethane 4 3.2 KAL23-00 17.5 18 20 9.6 10.4 12.8 15.5 16 17 15.2 18.5 20.9 4.3 4.5 5.3 18.5 21 22 KAL04-00 KAL06-00 11.4 11.4 4.2 4.2 3.4 2.9 39.7 39.7 25.0 25.0 14.9 14.9 7 6 3 8 6 KAL08-00 6 6.8 7.5 23 26.5 28.5 11 17 12 10 KAL10-00 KAL12-00 21 Branch Tee: KAT Effective orifice (mm 2) Weight (g) Applicable tube O.D. (mm) Q L M D Part No.

5 Port Solenoid Valve SY Series

e (EB) 3 (EA) 5 (P) 1 t 2 position double JIS Symbol 2 position double (A) (B) 4 2 q w y u r (P) 1 (EB) 3 (EA) 5 t 3 Position Closed center / Exhaust center / Pressure center JIS Symbol 3 position closed center (A) (B) 4 2 q w y u r 3 position exhaust center 3 position pressure center (EB) 3 (EA) 5 (P) 1 t (This figure shows a closed center type.)

ARJ1020F

5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

KA

(mm) D L1 M L2 P Q Part No.

CEx-OMQ0011

OUTPUT 35 9-3-5. 36 10 3744 11 11-1. 11-1-1. 45 11-1-2. 4548 11-1-3. 48 11-2. 11-2-1. 4952 11-2-2. 53 11-3. 11-3-1. 53 12 12-1. 54 12-2. 54 13 13-1. 5557 13-2. () 5758 14 14-1. 5960 - 1 1 1 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414:Pneumatic fluid powerGeneral rules relating to systems ISO 10218-1:2006Robots for industrial environments-Safety requirements-part1

MGQ

For details, refer to page 8-30-32. 8-20-11

VK300

(S) 42 Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note 1) Mounting direction is fixed, do not mount on opposite side.

IDX-OM-W017

IDFA Series 10-3 10 2 IDX-OM-W017 11 R 11 R R (GFCI) GFCI1GFCI11-2 11-1 1. 2. 3. 4. GFCI 5. 6. 7. 11-2 IDFA4E/6E/8E/11E-23-R 5A 30mA IDFA15E1-23-R 10A 30mA 11-3 1) 2) 3) IDFA Series 11-1 11 1 IDX-OM-W017 11 R 9.5mm L N 6.5mm 11-4 () () 11-5 1-1 IDFA Series 11-4 11 2 IDX-OM-W017 12 T 12 T T 12-2, 12-3 12-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

Cylinder with Lock Series CNS

Ball retainer Taper ring Brake shoe Release piston Brake spring Air pressure exhaust Air pressure supply A Locked condition Unlocked condition 3 Cylinder with Lock Double Acting: Single Rod Series CNS Construction Description Material Note Parts list Description Material Note Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 No. 30 Aluminum alloy

Clean Air Module

) 111 59 71 80.4 41 59 59 Rc 3/8 (NPT 3/8) 521 3.5 (3.5) Note) This port is unavailable.

•

N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

Precision Cylinder Series MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty.

EX500-GPR1A.eng

SI unit for VQC/S0700 series valve ( EX500-Q ) Current consumption Supply current for block Supply voltage for block Connected block station Connected block Solenoid valve ( single, double ) General purpose output block ( EX500-Q 02 only ) Supply current for block 0.65A Max.

125

(R) e r Port 3 (R) Port 2 (A) Port 1 (P) Port 23(P2) (Pilot air port) y i Port 2(A) u r y Port 1(P) t q VEX3320 (Air operated) VEX3420 (Air operated) w e q r y y t w r e u t t 12(P1), 23(P2) Port Port 3(R) y y (Pilot air port) r i Port 2(A) u r Port 1(P) t q Port 1(P) Port 2(A) Port 3(R) Component Parts No.

Angular Air Gripper Series MHC2/MHCA2/MHCM2

8 e q y !3 w !1 !6 !7 !2 t !9 !5 !4 u Parts list No. Description Parts list No.

Flow Control Equipment

4.6 7.5 6 12 7.2 6.6 18 3.3 6.3 6.4 9.3 7.7 15.4 8.5 8.3 21 TMH-06J TMH-06 TMH-08 TMH-10 4.3 7.1 7.2 11 10 20 11 10.6 26.5 TMH-07 TMH-09 TMH-11 4.3 9.5 9.6 14 14 28 14.2 14.6 34 TMH-12 TMH-13 Note 1) Mounting bracket is not available.