7ND9071en

9.4 Adjustment.41 9.5 Removal of the limit switches for accessing the valve controller.41 9.6 Circuit diagrams.41 9.7 Maintenance .41 10 TOOLS.41 11 ORDERING SPARE PARTS .41 12 DRAWINGS AND PARTS LISTS.42 12.1 Exploded view ND9100, ND9400, ND7100 .42 12.2 Exploded view ND9100_/D__, ND9100_/I__, ND9100_/K0_ and ND9100_/B06.43 12.3 Exploded view ND9200, ND9300, ND7200 44 12.4 Exploded view

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

+ + 20 + + + + + 20 stations S F G P R P R A, B port size R port 1/8 R port 1/8 N NPT A B B A M5 M5 x 0.8 A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 T NPTF A, B port M5 x 0.8, C4 C4 One-touch fitting for 4 N3 One-touch fitting for 5/32" Type 41 (5 Port/Base mounted) Applicable solenoid valve SYJ340SYJ343How to Order SS5YJ3 41 05 C4 Type 41 Type S41 ( ) Single solenoid coil is on

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

+ + 20 + + + + + 20 stations S F G P R P R A, B port size R port 1/8 R port 1/8 N NPT A B B A M5 M5 x 0.8 A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 T NPTF A, B port M5 x 0.8, C4 C4 One-touch fitting for 4 N3 One-touch fitting for 5/32" Type 41 (5 Port/Base mounted) Applicable solenoid valve SYJ340SYJ343How to Order SS5YJ3 41 05 C4 Type 41 Type S41 ( ) Single solenoid coil is on

REC

20 RS Q G FX 25 Up to 700 22 19.5 40 17 32 10 13 4 60 75 10 45 26 32 Up to 1000 22 19.5 40 17 32 12 13 4 60 75 11 45 26 20, 25, 32 RS H A 40 Up to 1000 24 21 52 22 41 14 16 5 66 36 82 12.5 50 32 NA NN P S Z ZZ H1 H2 I K MM N RZQ Bore (mm) Stroke range 20 30 M20 x 1.5 Up to 700 1/8 146 37 200 M8 x 1.25 5 8 33.5 5 20 25 MI W S 34.5 M26 x 1.5 Up to 700 1/8 146 41 204 M10 x 1.25 6 8 37.5 5.5

Round Type Hydraulic Cylinder

10 16 12 8 41 5 30 5 M8 x 1.25 13 26 19 15 M22 x 1.5 1/8 13.5 81 14 136 149.5 25 25 f8 Up to 800 19.5 M10 x 1.25 22 17 10 16 12 16 12 8 46 6 32 5.5 13 28 19 15 M24 x 1.5 1/8 14.5 81 15 142 156.5 32 31 f8 Up to 800 21 M14 x 1.5 24 22 12 16 16 19 12 8 53 8 40 7.5 13 36 19 15 M30 x 1.5 1/8 18.5 87 20 160 178.5 40 34 f8 Up to 800 21 M33 x 2 M16 x 1.5 24 24 12 24 18 21 14 11 54 10 48 7.5 19 44

Round Type Low Pressure Hydraulic Cylinder Series CH
M

10 16 12 8 41 5 30 5 M8 x 1.25 13 26 19 15 M22 x 1.5 1/8 13.5 81 14 136 149.5 15.5 25 25 f8 to 800 22 17 10 16 12 16 12 8 46 6 32 5.5 M10 x 1.25 13 28 19 15 M24 x 1.5 1/8 14.5 81 15 142 156.5 19.5 32 31 f8 to 800 24 22 12 16 16 19 12 8 53 8 40 7.5 M14 x 1.5 13 36 19 15 M30 x 1.5 1/8 18.5 87 20 160 178.5 21 40 34 f8 to 800 24 24 12 24 18 21 14 11 54 10 48 7.5 M16 x 1.5 19 44 24 21 M33 x 2

25

Setting ionizer with remote controller IZS 41 IZS 42 May be used to adjust and set several ionizers remotely. Can recognize and control up to 16 ionizers through address setting. The mode can be selected from Manual Run mode which performs adjustment only when connected, and Automatic Run mode which always performs adjustment while connected.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

For details, refer to page 6-16-1.

Profile Design ISO/VDMA Air Cylinder Series CP95

9 16 170 63 75 21 51 4.3 56.5 4 14 60 5 6.5 32 12 45 15 9 16 190 80 95 25 65 4.3 72 4 16 75 5 10 36 16 45 18 11 20 210 100 115 25 75 6.3 89 4 16 85 5 10 41 16 55 18 11 20 230 Mounting type ES Piston rod ball joint to DIN 648K Bore d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 15 16 9 50 65 10.5

REC

150 to 700 20 FX 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 REC 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to1000 26 20, 25, 32 40 36 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to1000 32 RHC NA S Z ZZ NN P H1 H2 I K MM N Bore size Stroke range 1 8 30 20 M20 X 1.5 146 37 200 150 to700 M8 X 1.25 5 8 33.5 5 20 MTS 1 8 34.5 M26 X 1.5 25 146 41 204 150 to700 M10 X 1.25 6 8 37.5 5.5

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

54.5 5 74 65 7 95 86 9 116 107 11 137 128 12 147.5 138.5 13 158 149 14 168.5 159.5 15 179 170 16 189.5 180.5 17 200 191 18 210.5 201.5 19 221 212 31 Series SYJ3000 Manifold Drawings Type 41 Manifold: Side Ported/SS5YJ3-41Station M5T, N3T (mm) Grommet (G), (H) N3T(Built-in One-touch fitting) NPTF (P port) 10 61.9(GZ:62.6) [63.6] 60.9(GZ:61.6) [62.6] 10 10 78.8(GZ:80.2) [82.2] 91.7(GZ:93.1

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

16 9 8.5 75 70 40 94 50 72 36 5 20 10 45 16 16 11 11 95 90 50 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Max.157 70 110 50 7 30 10 60 25 26 13.5 10 Max.157 130 70 Clevis pivot bracket (E) l3 l1 K2 (Max.) l3 (Max.)

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

KP/KPQ/KPG

Union Tee: KPT 3-Applicable tubing D Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS D D KPT04-00 10.4 20.7 4.5 18 4 4 7 4 KPT06-00 12.8 22.8 5.3 19.5 10 10 9 6 KPT08-00 15.2 26.3 6 21.5 26 18 16 8 4.2 8 KPT10-00 18.5 29.4 6.8 24 41 29 25 10 M M KPT12-00 20.9 31.4 7.5 25 58 46 29 12 L L Note 1) D indicates the maximum diameter.

3 Port Air Operated Valve Series SYJA300 1

: VPA744V(A port) Rc 3/8, 1/2 16 119.5 (PA port) Rc 1/8 16 80 67 (R port) Rc 3/8, 1/2 2(A) NO 53 66 PA 40 3(R) 1(P) NC 2-6.2 (Mounting hole) Switch mark 55.8 52 81.5 82.3 33.5 32.5 24 16 (P port) Rc 3/8, 1/2 5-5-20 9 Series VPA300/500/700 Manifold Specifications How to Order 1 04 41 02 3 VV3PA Thread type SA Nil Rc G NPT NPTF VP Air operated manifold F VA N T SA Body size A port size VV3PA7

Modular Type Lubricators Series AL

A NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 10 14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16

Series KP/KPQ/KPG

Union Tee: KPT 3-Applicable tubing D Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS D D 10.4 7 4 4 18 4.5 20.7 KPT04-00 4 12.8 9 10 10 19.5 5.3 22.8 KPT06-00 6 15.2 16 18 26 21.5 6 26.3 KPT08-00 8 4.2 8 18.5 25 29 41 24 6.8 29.4 KPT10-00 10 M M 20.9 29 46 58 25 7.5 31.4 KPT12-00 12 L L Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

Union Tee: KPT 3-Applicable tubing D Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS D D 10.4 7 4 4 18 4.5 20.7 KPT04-00 4 12.8 9 10 10 19.5 5.3 22.8 KPT06-00 6 15.2 16 18 26 21.5 6 26.3 KPT08-00 8 4.2 8 18.5 25 29 41 24 6.8 29.4 KPT10-00 10 M M 20.9 29 46 58 25 7.5 31.4 KPT12-00 12 L L Note 1) D indicates the maximum diameter.

Brake mechanism added

41 41 42.5 41 50.5 85 93 49 42 48 42 85.5 91 93.5 91 41 43.5 41 46 41 49.5 49.5 48.5 51 48.5 59 93.5 101.5 55.5 50 54 50 94 107 102 107 49 51.5 49 54 49 57 58.5 56 59 56 69.5 104 112 63 57.5 62 57.5 104 121 112 121 56 59.5 56 62.5 56 D-A9 and D-A9V cannot be mounted on 50.