Series VQ Base Mounted Metal Seal/Rubber Seal

SY SYJ SX VK VZ VF VFR VP7 VP4 VQ VQ4 VQZ VQD VZS VFS VS VS7 < >: AC type and TV approved type Dimensions (mm) Equation L1=16n+118.5 L2=16n+131 n: Station (Max. 20) L n 20 438.5 451 475 485.5 19 422.5 435 462.5 473 18 406.5 419 450 460.5 17 390.5 403 425 435.5 16 374.5 387 412.5 423 15 358.5 371 400 410.5 14 342.5 355 375 385.5 13 326.5 339 362.5 373 12 310.5 323 350 360.5 11 294.5 307 337.5

S Couplers Series KK/KK13

16.9 KK3P-04E 3.2 16 4 5.6 16.6 3.9 17 40.2 M14 x 1 16.8 -06E 4.7 17 6 12.8 22.3 10.1 18.4 17 1/8 19 43.4 M16 x 1 20 -08E 18.5 8 30.2 15.7 6 22.6 22 24 46.4 M20 x 1 22 -10E 21 10 54.7 22.6 17 47 M14 x 1 16.8 KK4P-06E 4.7 17 6 12.8 30.6 10.1 17 19 50.2 M16 x 1 20 -08E 6.2 18.5 8 22.6 38.2 19.8 25.2 1/4 22 24 53.2 M20 x 1 22 -10E 7.7 21 10 35.3 61.4 27.6 54.2 -12E 9 75.2 40.2 24 27 M22 x 1

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

LJ1H

12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

CNG

25 32 40 Stroke range with rod boot Standard Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 93 1/8 56.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 Up to 200 20 to 200 22 19.5 17 45 103 1/8 66 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 Up to 300 20 to 300 22 19.5 17 45 104 1/8 67.5 20 12 18 2 97 10 25 6.5 9 7 10 6 38 Up to 300 20 to 300 30 27 19 52

Vacuum Pad

0.8 Width across flats 14 17.5 21.5 5 2 5 17 21 20 3 25 3 1.6 ZP3P-T35PTSF-B8 [Weight: 13.2 g] ZP3P-T50PTSF-B8 [Weight: 20.9 g] M8 x 1.25 Width across flats 21 M8 x 1.25 Width across flats 21 8 8 3 22 28 19 25 35 4 50 4 4.5 5 Vertical Vacuum Inlet, With Buffer ZP3P Series How to Order Vertical vacuum inlet With buffer ZP3P 20 J 10 PT T SF B5 Pad diameter Symbol Pad diameter 20 20 25 25 35

70astamb1

19 23 27 4 4 5 9 12 14 15 10.5 11.5 17 6-7-20

mb1

with double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 M10 x 1.25 16 19 24 34 34 M10 x 1.25 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20 30 30 12 M14 x 1.5 M14 x 1.5 12.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M18 x 1.5

Vacuum Pad

10 10 1.5, 2, 3.5 # # # 114.5 59 15 15 4, 6, 8 10, 13, 16 # # 66.5 20 20 # # # # # 124.5 25 25 Wide selection of piping For 2 piping!

HRX-OM-R016

-(BJMT) . 9-5 9.3.2 HRS030-W-20-(BJMT) . 9-5 9.4 Cooling capacity . 9-6 9.4.1 HRS030--20-(BJMT) . 9-6 9.5 Heating capacity . 9-6 9.5.1 HRS030-A-20-(BJMT) . 9-6 9.5.2 HRS030-W-20-(BJMT) . 9-6 9.6 Pump capacity. 9-7 9.6.1 HRS030--20-(BJM) . 9-7 9.6.2 HRS030--20-T . 9-7 HRS Series HRX-OM-R016 Contents 9.6.3 HRS030--20-MT . 9-8 9.7 Required facility water flow (for water-cooled type) . 9-8 9.8

AS-FG/ASD-FG

AS121FG-M5 AS231FG-01 R(PT) 1/8 20, 25, 32 AS221FG-01 AS231FG-02 R(PT) 1/4 20, 25, 32, 40 AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ115-M VQ110-L 4-14-19 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-14-20

Square Tube Type Air Cylinder Series MB1

Note) Pin, cotter pin and flat washer are included with the double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Flat ribbon cable connector SOL.A () (+) 20 1 station SOL.B () 18 (+) SOL.A 20 19 () 16 (+) 2 stations SOL.B 18 17 () 14 (+) 16 15 SOL.A 12 () (+) 3 stations 14 13 SOL.B () (+) 10 12 11 SOL.A 8 () (+) 10 9 4 stations SOL.B () 6 (+) 8 7 Connector terminal no.

AC

Coef. for compensation 20 10 0 10 30 40 50 60 Air temp.

15

Bore size (mm) Contents 6 Set of the nos. 4, 5, 13, 19, 24, 39 CY1S6-Z-PS 10 Set of the nos. 4, 13, 19, 20, 24, 39 CY1S10-Z-PS 15 CY1S15-Z-PS 20 CY1S20-Z-PS Set of the nos. 4, 5, 6, 13, 19, 20, 24, 39 25 CY1S25-Z-PS CY3B CY3R 32 CY1S32-Z-PS 40 CY1S40-Z-PS CY1S CY1S Note 1) Seal kit includes 4, 5, 13, 19, 24, 39 for 6. 4, 13, 19, 20, 24, 39 for 10. 4, 5, 6, 13, 19, 20, 24, 39 are for 15 to

reduces flow setting time

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female

VCC

Cleaning unit Note 2) Unit Standard unit (with gate valve) Part number (Mountable valve number) G06 G04 G02 02 04 06 08 10 12 14 16 18 20 40 U side (OUT port side) Stations Note 1) 4 5 2 3 1 Gate 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 39 40 Description/Model 2 port valve 2 port valve (Sliding type) VCC12-00 D side Valve options 2 port valve (Diaphragm type) VCC12D-00 Blanking

Cylinder with Lock Series CLS

1400 56 53 182 95 23 5 180 132 169 144 40 20 236 118 275 18.5 130 74 M16 x 1.5 to 1400 (mm) Bore size (mm) Stroke range (mm) 125 140 160 K KA M MM N P S W H ZZ 15 31 19 M30 x 1.5 35 1/2 98 110 337 to 1400 15 31 19 M30 x 1.5 35 1/2 98 8 110 337 to 1400 17 36 22 M36 x 1.5 39 3/4 106 9 120 380 to 1400 For long strokes (mm) With rod boot (mm) With rod boot Without rod boot Stroke range (mm)

NCA1

SN 150 (1.5) 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 0.551 1/4-28 2 0.3 3/8 1.26 1.1 9/32 1/4-20 1.43 1 1.71 3 5/8 2.36 4 3/4 5/8 1 15/16 2 1/4 200 (2) 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 0.551 5/16-24 2 1/2 0.3 3/8 1.26 1.06 7/16 5/16-18 1.84 1 1.71 3 5/8 2.4 4 3/4 7/8 1 15/16 2 1/4 250 (2.5) 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 0.551 5/16-24 3 0 3/8 1.3 1.06 19/32 3/8-16 2.19 1 1.75 3 3/4 2.48 4 7/8 1