CRB2/CRBU2/CRB1

(Example) For M4: L2 = 8mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 Shaft type Shaft type L1 = S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Symbol

MHZ

mounting groove (Both sides) (10 only) M5 x 0.8 Piping port Refer to the dimension table.

MHZ

mounting groove (Both sides) (10 only) M5 x 0.8 Piping port Refer to the dimension table.

Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

x 0.8 thread depth 5.5 11 3 Vacuum suction port M5 x 0.8 Operating port 2 x M5 x 0.8 J 10 Maximum 13.5 (With stroke adjuster at retraction end) I 5.5 12 6 12 12 9.5 10 5.5 10 5.5 21 K 5.5 KA 21 NA x M5 x 0.8 thread depth 5.5 Stroke adjuster at extension end Stroke adjuster at retraction end 37.5 (With stroke adjuster at extension end) 12 6 N x M5 x 0.8 thread depth 6 (Insert) 6 4 x M5 x

MXW

MXW20 M5 x 0.8 M4 x 0.7 MXW8 2.1 8 0 0 8H9 + 0.036 depth 9 5H9 + 0.030 depth 4.5 18.5 7.4 MXW25 M6 x 1 M5 x 0.8 MXW12 4.4 10 0 0 6H9 + 0.030 depth 5.5 M6 x 1 6.

SMC

x 0.8 thread depth 5.5 Operating port 2-M5 x 0.8 11 3 Vacuum sunction port M5 x 0.8 J 10 Maximum 13.5 (With stroke adjuster at retraction end) I 5.5 12 6 12 12 9.5 10 5.5 10 5.5 21 K 5.5 KA 21 NA-M5 x 0.8 thread depth 5.5 Stroke adjuster at extension end 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end 12 6 N-M5 x 0.8 thread depth 6 (Insert) 6 4-M5 x 0.8 thread

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

4.5 Note) 30 4 x M4 x 0.7 thread depth 5 (Opposite side: Same) (Opposite side: Same) 4 x M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) 5 10 10 8 46 2 x M4 x 0.7 thread depth 6 (30) (Z) 2 x M5 x 0.8 thread depth 8 5 450.2 8 Note) 11-, 22-: Vacuum suction port Vacuum air from 2 ports on both sides. 10-/12-, 21-: Relief port Exhaust air from a port on one side.

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

MXW Series Long Stroke Slide Table

100, 125, 150 Operating port 2-M5 x 0.8 Width across hexagon socket hole 2.5 (mm) J 12 Scale: 30% 6.5 5H9 +0.03 depth 4.5 0 Width across flats 8 6-M4 x 0.7 thread depth 6 (Helisert) 6 27 58 46 Y 29 26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole 4.2 N-M5 x 0.8 thread depth 10 (N-1) x H G M5 x 0.8 thread depth 10 GG H 6 depth 4.5 5H9 +0.03 Bottom through

CG5-S

(mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8

Sine Rodless Cylinder Series REBR Direct Mount Type

33.5 33.5 45 17 42 19 M5 x 0.8 106 44 71.5 M5 x 0.8 8 125 29 24 63 46 46 61.5 25 58.5 28 M6 x 1.0 138 56 86 M6 x 1.0 10 Model N S TW Z ZZ NL NT P PA PB PP W XB REBH15 REBH25 161 65 194 17.5 15 8 M5 x 0.8 50 62 21 88.5 16.5 209 75 250 23.5 20.5 18 9 Rc 1/8 65 75 27 103 9.5 79 Series REBH Dimensions/25, 32 Dual axis type/REBHT LL 138 4-M thread depth MM PA XB PB 2-Rc 1/8 LW S + Stroke EB

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

MM GA Piping port 2-M5 x 0.8 Cover surface Piping port M5 x 0.8 GB BA CB D LH LB LY With head cover port in axial position (R) LT BB NB A NA X Y LX LZ S + Stroke Z + Stroke H 2-LC Mounting hole (mm) Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20

Magnetically Coupled Rodless Cylinder

M5 6 47 8 61 26 70 9.5 6.0 28.5 41 92 40 M6 x 1.0 M5 6 55 8 71 Note 1) Dimension F provides a clearance of 1mm between the body and the floating joint, but does not consider dead weight deflection of the cylinder tube, etc.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

M5 6 47 8 61 26 70 9.5 6.0 28.5 41 92 40 M6 x 1.0 M5 6 55 8 71 Note 1) Dimension F provides a clearance of 1mm between the body and the floating joint, but does not consider dead weight deflection of the cylinder tube, etc.

60

Under the New Measurement Law, products for overseas use only (SI unit type for use in Japan). 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 ) ) ) ) ) ) ) ) Options Symbol Description ) ) Nil 1 B With bracket Built-in silencer (EXH port) Handle / Bonnet material Symbol Material S A B Flame resistant PBT 3 Aluminum Built-in silencer A spacer or spacer with bracket is required if the valve is combined

0.5

Power supply cable IZS41 IZF CP HS Automatic cleaning unit 21 Power supply cable Nil Power supply cable (3 m) Z Power supply cable (10 m) Model 21 For IZF21 31 For IZF31 X13 02 IZS41 CP Power supply cable length Cleaning arm (for automatic cleaning unit) 01 Total length: 1 m 02 Total length: 2 m IZF M3 21 Model 19 Total length: 19 m 20 Total length: 20 m 21 For IZF21 31 For IZF31 : Available

VH Series, 4 Way Hand Valve

N Options Hand valve R In/Out Reverse Valve model (Cv) Port size (NPT) 2 3 4 6 (0.4) (1.1) (3.2) (10.5) 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Porting and mounting method Code 0 1 2 3 Mounting method Body Panel mount Body Panel mount Note) Only side porting is available for VH200 and VH600 and R port is located on the bottom.

VVXA21/22

Individual SUP type OUT port Pilot port Blanking plate IN port L Dimension Pitch Pitch Model Stations 2 3 4 5 6 7 8 9 10 Symbol L1 L2 L1 L2 100 86 126 108 136 122 172 154 172 158 218 200 208 194 264 246 244 230 310 292 280 266 356 338 316 302 402 384 352 338 448 430 388 374 494 476 VVXA21 VVXA22 A 38 49 B 20.5 [17.5] 26.5 [22.5] Model VVXA21 VVXA22 C 10.5 13 D 11 13 E 25 30 F 32 40 G 36 46

Basic Type/Direct Mount Type

) A B C D Auto Switch Proper Mounting Position 6 to 20 (mm) Auto switch model A B C D D-A9 D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A Bore size (mm) 6 10 15 20 26 30 46 42 26 30 46 42 28 32 48 44 32 48 44 17.5 21.5 76.5 56.5 72.5 60.5 19.5 23.5 87.5 35.5 67.5 83.5 39.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.