Series VQ Metal Seal/Rubber Seal Body Ported

185.5 77.5 88 162.5 173 67 77.5 150 160.5 56.5 67 150 160.5 25 35.5 112.5 123 46 56.5 137.5 148 L1 L2 (L3) (L4) 35.5 46 125 135.5 VQZ VQD Dimensions/Top entry connector [PU] (mm) n L 1 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 VZS 250 260.5 237.5 248 225 235.5 212.5 223 200 210.5 187.5 198 187.5 198 175 185.5 162.5 173 150 160.5 137.5 148 125 135.5 125 135.5 112.5 123 100 110.5 L3 L4 87.5 98

C76

+0.036 0 10 +0.043 0 12 30 0 0.033 M30 x 1.5 G 1/8 30 58 23.8 10 M8 x 1 9 32 40 12.2 M10 x 1.5 38 0 0.039 M38 x 1.5 G 1/4 35 69 28.3 12 M10 x 1 12 14.2 M12 x 1.75 With Rod Boot (mm) AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12

C76

Construction 6-10-46

LEC-OM02704CN

12 .2 12.1 .2 12.2 .3 12.3 .5 12.3.1 .5 12.3.2 .6 12.4 .7 12.5 .8 12 1 12 12 12.1 12.11(A50) 2(A51) 70% 04575 1000 1000 100 100 10 10 [s] [s] 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300 100 ()[] ()[] LECSC-S5 LECSC-S7, LECSC-S8 . ()30r/min100% 12.1 12 2 12 12.2 (1) 12.1 12.1 1 (2)[W] (1) [m2] [kVA] LECSC-S5 LE-S5LE-S60.3 25 15 0.5 LECSC-S7 LE-S70.5 25 15

Speed Controller with Indicator

12 18.5 29.7 40.9 34.5 17 59 AS321FS-G03-06 6 1/4 21 16.6 45 AS321FS-G03-08 8 13.2 22.7 33.9 14.2 46 AS321FS-G03-10 10 15.9 26.7 37.9 28 15.6 47 AS321FS-G03-12 12 18.5 29.7 40.9 26.8 17 49 AS421FS-G04-10 10 1/2 27 15.9 18.8 27.4 41.8 36.2 64.1 62.5 55.1 53.5 15.6 26 29 10 19 80 AS421FS-G04-12 12 18.5 30.8 45.2 35.1 17 82 AS421FS-G04-16 16 23.8 34.8 49.2 32.7 20.6 86 10.4 21.8 33 28.7 55.4

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

L Type Plug Connector (L) 10-32 Nom (M5) 10-32 Nom (M5) 4 porls g .g 3 1 1 . 8 1 I (300)r I 2.0i (St ) -9 :ions (n 7 6 10 11 12 13 14 'i6 17 18 20 L1 1.40 11.41 (35.s) (46) 2.22 2.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36

o

L Type Plug Connector (L) 10-32 Nom (M5) 10-32 Nom (M5) 4 porls g .g 3 1 1 . 8 1 I (300)r I 2.0i (St ) -9 :ions (n 7 6 10 11 12 13 14 'i6 17 18 20 L1 1.40 11.41 (35.s) (46) 2.22 2.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36

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L Type Plug Connector (L) 10-32 Nom (M5) 10-32 Nom (M5) 4 porls g .g 3 1 1 . 8 1 I (300)r I 2.0i (St ) -9 :ions (n 7 6 10 11 12 13 14 'i6 17 18 20 L1 1.40 11.41 (35.s) (46) 2.22 2.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Note 12) For the manufacture of intermediate strokes, please contact SMC.

A

2 (N)AF900 200 488 46 2 H O W T O O R D E R A I R F I LT E R (N)AF800-12 (1 14) (N)AF800-14 (1 12) (N)AF900-20 (2) H O W T O O R D E R A I R F I LT E R W I T H A U T O D R A I N (N)AF811-12 (1 14) (N)AF811-14 (1 12) (N)AF911-20 (2) ACCESSORIES A I R F I LT E R Filter Elements 11345-5B NAF800 11352-5B NAF900 Note) (N)AF AF Japanese NAF North American Courtesy of Steven Engineering, Inc. !

SYJ300/500/700

D: Push-turn locking slotted type E: Push-turn locking lever type (With gasket and screws) Body option Nil: Individual pilot exhaust type Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC M plug connector DIN terminal M8 connector R port P, E port M: Common exhaust for the pilot and main valve MN: Without

Vacuum Unit

VDC to 24 VDC Black OUT + (Analog output) 1 k 12 VDC to 24 VDC rown DC(+) Brown DC(+) Brown DC(+) Black OUT + White LED (Green) Load 12 VDC to 24 VDC For release valve (, +) Load Main circuit Main circuit Load 12 VDC to 24 VDC Black Brown Black Brown + + OUT1 12 VDC to 24 VDC Load 12 VDC to 24 VDC Black OUT 1 Black OUT 1 Load + + 12 VDC to 24 VDC ack OUT + + + Load White OUT 2 White

Integrated Controller

Wiring Examples Operation Data Setting Options Specific Product Precautions EQFS25RH Motor option: With lock (132.5) (16) (2) 3 H9 (+0.025 0 ) depth 15 (Depth of counterbore 12) (172.5) (2) (16) Body mounting reference plane (B dimension range)1 4 x M5 x 0.8 thread depth 20.5 (Depth of counterbore 12) 128 38 3.5 50 22.5 (Depth of counterbore 12) 3 H9 (+0.025 0 ) depth 15 45 64 (102) L +

Vacuum Pad

Buffer Assembly Part No. 10 Series ZP3 4 to 8 Pad diameter Dimensions/With Adapter: Vacuum Inlet Vertical Bellows Pad type ZP3-T04B;-A10-B5 [Weight: 11.0 g] ZP3-T06B;-A10-B5 [Weight: 11.0 g] ZP3-T08B;-A10-B5 [Weight: 11.1 g] M10 x 1 M10 x 1 M10 x 1 Width across flat 14 Width across flat 14 Width across flat 14 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 8 3 3 3 3 8 3 3 12 12 12 14 14 14 22 22 22 8 2

LVQ

Type of fitting Tubing size Symbol Nil 1 Symbol 03 04 05 06 07 06 08 10 07 11 Symbol 10 12 11 13 12 13 19 19 25 Tubing O.D. 1/8" (3) 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" Tubing O.D. 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1". 25 Applicable fitting LQ2 LQ1 Body class Applicable fitting Body class Applicable fitting 4 LQ1,LQ2 2 Body class LQ2 Symbol 2 3 4 5 6 LQ2 Applicable fitting Body class

SMC Pneumatic Clean Series

58 64.5 19 17 155 12 12 27 20 45 11 2 7 114 108 62 39 33 12 12 63 Up to 300 35 32 32 27 20 11 45 2 7 72 76.6 50 Up to 300 35 32 30 M18 x 1.5 M18 x 1.5 44 1/4 46 41 50 1/4 64 161 38 32 14, 20 counterbore depth 14 18, 26 counterbore depth 18 Note) < >: Denotes the dimensions for G port. 45 Actuator / Common Precautions 1 Be sure to read before handling.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

H G I J K L A B C D E F M R Size Tolerance +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 +0.027 0 +0.027 0 +0.027 0 +0.027 0 9 9 16 16 36 38 55 55 16 18 22 22 9 9 12 12 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 12 30 30

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

GE H Size 10 20 30 50 55.4 50 9.5 34.5 27.8 60 4.5 28.5 45 46 20H9 5 15H9 52.9 44.3 33.5 14 97.2 80 8 4 3 4.5 20 15.6 11 7.5 45.2 13 70.8 65 12 46 30 76 6 30.5 60 61 28H9 9 17H9 61.8 55.3 43 18 117.1 100 10 6 2.5 6.5 25 19.5 14 9.5 56.4 17 75.4 70 12 50 32 84 6.5 33.5 65 67 32H9 9 22H9 63.1 60.3 46 19.5 123.4 110 10 4.5 3 6.5 27 21.5 14 9.5 61.5 17 85.4 80 15.5 63 37.5 100 10 37.5 75 77

LJ1H

10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean

Slider Type/Ball Bushing Bearing

2-wire 12 V Connector Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indicator) 5 V, 12 V 24 V Grommet 2-wire Water resistant (2-color indicator) 12 V F7BAV F7BA With diagnostic output (2-color indicator) IC circuit F79F 4-wire (NPN) 5 V, 12 V 3-wire (NPN equivalent) IC circuit A76H 5 V Grommet A72H A73H A80H A72 A73 A80 A73C A80C 200 V 100 V 12