NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

, 42, 43): DXT192-40-1TA Interface regulator (only for type 41, 42, 43): NARBZ3000-00-P Typ 20 NVV5Z3-2O-@1-OOr Stations a otl?

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Analog Output p. 17 IO-Link: Process Data p. 17 Functions p. 17 Internal Circuits and Wiring Examples p. 18 Dimensions p. 20 3-Screen Display High-Precision Digital Pressure Switch ZSE20A(F)/ISE20A Series How to Order p. 11 Specifications p. 12 Set Pressure Range and Rated Pressure Range p. 17 Analog Output p. 17 IO-Link: Process Data p. 17 Functions p. 17 Internal Circuits and Wiring Examples

CXS

Mountable Auto switch Refer to pages 10 through 17.

Wedge Cam Operation Gripper Series MHK2

19.8 MHKL2-12S 90 12 2.0 (9) 11 9 20 3.7 Normally open Normally closed MHKL2-16S 16 3.8 (17) 14 14.6 28.6 5.8 MHKL2-20S 20 7.2 (32) 18 16 34 11.1 MHKL2-25S Single acting 25 11.9 (53) 22 19 41 19.9 MHKL2-12C 12 2.5 (11) 11 9 20 3.7 MHKL2-16C 16 4.9 (22) 14 14.6 28.6 5.9 L1 MHKL2-20C 20 9.0 (40) 18 16 34 11.1 L2 MHKL2-25C 25 14.2 (63) 22 19 41 19.9 Note) At the pressure of 72.5 psi (0.5MPa

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Wiring 17 Setting and Adjustment 18 LED Display 22 Specification 25 Specifications 25 Dimensions 26 End Plate Model Indication and How to Order 27 Summary of Product parts 28 Mounting and Installation 30 Wiring 30 Specification 32 Specifications 32 Dimensions 33 IO-Link Master Unit Model Indication and How to Order 40 Summary of Product parts 40 Mounting and Installation 41 Wiring 41 LED

JXCx-OMT0030CN

JXC-OMT0030CN GWProfibus / LEC-GPR1 1 . 4 2 . 6 21 . 6 22 . 6 23 . 7 24 () . 8 1 . 8 2 . 8 3LEC . 8 4 . 8 5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23

F

13.2 52.2 7.1 1/4 34.5 29.5 20.1 15.5 6 11 48.5 6.3 33.7 28.7 12.4 16.5 11.4 52.2 6.2 3/16 34.6 29.6 24 AS2051F 14.8 15.5 6 11 50.7 6 34.4 29.4 19.4 14.8 17 13.2 54.4 7.1 NAS2051F 1/4 35.5 30.5 25.1 18 8 15.2 59.8 8.1 36.5 31.5 30.3 18 15.2 59.8 8.1 5/16 36.5 31.5 30.3 17 6 13.2 59 7.4 38.3 33.3 40.8 17 13.2 59 7.4 1/4 38.3 33.3 41.2 AS3001F 19.8 18 8 15.2 64.4 8.2 39.1 34.1 45.5 19.8 18

VXZ

33 41 44 52 60 68 73 1 2 3 4 1 17-3-66 7 Series VXZ22/23 Pilot Operated 2 Port Solenoid Valve For Zero Pressure Differential Operation The VX series will be revised shortly.

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

3 Port Solenoid Valve SYJ300/500/700 Series

N.O. 24 VDC 12 VDC Type 41 Type 20 SYJ700 L type plug connector Non-locking push type With light and surge voltage suppressor N.C.

Title not found

, 42, 43): DXT192-40-1TA Interface regulator (only for type 41, 42, 43): NARBZ3000-00-P Typ 20 NVV5Z3-2O-@1-OOr Stations a otl?

VCL

11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class H 17-2-35 8 Series VCL How to Order Manifold How to Order Manifold Assembly VV2C L 2 02 01 Enter the mounting valve and option part numbers under the manifold base

HRX-OM-X037

(Recommended tightening torque178 to 185Nm) Gasket (1) CH1 particle filter Fig. 3-17 CH1 side Installation of particle filter HRL Series 3.3 Installation 3-33 HRX-OM-X037 Chapter 3 Transport and Setting Up 3. Attach the CH1 filter bracket.

HRX-OM-W060

Alarms that allow continuous pump operation are shown in Table 5.4-17 Alarms that allow continuous pump operation (1/2) and Table 5.4-18 Alarms that allow continuous pump operation (2/2).

Compact Guide Cylinder

17 37 37 The value of W in the table means the amount of auto switch protrusion from the body end surface.

IDX-OM-W020

17 11-4 IDFB Series 11 2 IDX-OM-W020 11 T IDFB15E PE 1 2 3 : 0.25inch (6.5mm) : 0.002inch 2 (1.25mm 2) 0.003inch 2 (2mm 2) : 0.0008inch 2 (0.5 mm 2)o 0.003inch 2 17 17 11-5 IDFB4E 11E-11-T R V 11-5 IDFB Series 11 3 IDX-OM-W020 11 T IDFB15E-11-T R V CM FM15 OLR C1 ILS PRS PTC PTC r TB12 MC RY TDR GFCI EDV 11-5 IDFB Series 11 4 IDX-OM-W020 12 V 12 V V 12

70astamb1

MB1 Made to Order Specifications (For details, refer to page 6-17-1.)

mb1

MB1 Made to Order Specifications (For details, refer to page 6-17-1.)

VCB

11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27

Vacuum Unit

) () () () () () () 24 23 22 21 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Release valve Supply valve Supply valve 1 1 2 2 stations Release valve 2 stations Release valve 14 Supply valve 2 Supply valve 3 4 3 stations 15 Release valve 3 stations Release valve 3 5 6 Supply valve Supply valve 16 4 stations Release valve 4 stations Release valve 4 7 8 Supply valve 17 Supply valve 5 5