Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

DKeyway dimensions l b D (g6) D (g6) DD (h9) Port size Rc Model Model A B C F H J K S U W BA BB G M N UU L CA CB 20M8 x 1.25 Depth 8 144 (177) CRA1BW50 CRA1BS50 1/8 62 48 46 15 2.5 36 5 98 17 17 8.5 8.5 13 15 11 20 15 118 14 25 5 0 0.030 25 M10 x 1.5 Depth 12 163 (201.5) CRA1BW63 CRA1BS63 1/8 76 60 57 17 2.5 41 5 117 19.5 20 10 10 14 17 13 22 17 139 16 30 6 0 0.030 30 M12 x 1.75 Depth 13

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

DKeyway dimensions l b D (g6) D (g6) DD (h9) Port size Rc Model Model A B C F H J K S U W BA BB G M N UU L CA CB 20M8 x 1.25 Depth 8 144 (177) CRA1BW50 CRA1BS50 1/8 62 48 46 15 2.5 36 5 98 17 17 8.5 8.5 13 15 11 20 15 118 14 25 5 0 0.030 25 M10 x 1.5 Depth 12 163 (201.5) CRA1BW63 CRA1BS63 1/8 76 60 57 17 2.5 41 5 117 19.5 20 10 10 14 17 13 22 17 139 16 30 6 0 0.030 30 M12 x 1.75 Depth 13

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

21 10 18.5 44.5 35.3 25 23 15.3 AS221F-N01-09SD AS221F-02-04SD 15.2 25.3 32.4 18.5 5/16" 16 4 10.4 25 34.4 25.2 40 AS221F-N02-03SD AS221F-02-06SD 5/32" 10.4 25.2 34.4 16 17 6 12.8 17.7 R 1/4 17 18.5 7.2 1.2 34.7 40 40.2 AS221F-N02-05SD AS221F-02-08SD 3/16" 12.8 25.2 34.5 16.5 36.4 18.5 27.2 8 15.2 42 17.7 AS221F-N02-07SD AS221F-02-10SD NPT 1/4 17.5 18.5 7.2 1.2 34.7 1/4" 13.2 25.2 34.5 17

High Purity Fluoropolymer

CAT.ES70-17 C High Purity Fluoropolymer Fittings & Tubing PAT.

VS 8-2/VS 8-4

SOL.A 1 Station 1 Station 2 Station 3 Station 4 SOL.A 14 SOL.A 2 1 SOL.A 14 15 2 SOL.A 15 3 3 4 5 6 7 8 9 Station 5 16 17 18 19 20 SOL.B 16 SOL.A 4 External pilot port Station 6 SOL.B 17 SOL.A 5 Station 7 21 22 23 SOL.B 18 10 SOL.A 6 11 12 13 Station 8 SOL.B 24 Port plug AXT95419 25 18 mm and 26 mm sizes mixed COM. 13 Connector terminal no.

48

17.5 42 62 M14 x 2 35 M12 x 1.75 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF 80 (56 x 2) 10.6 17.5 10 Rc1/4 NPT1/4 G1/4 24.5 23 37 38 64 55 155 118 184 25.5 42 M12 x 1.75 18 9.5 100 (71 x 2) 12.5 20 12 Rc1/4 NPT1/4 G1/4 31.5 25 38 40 74 71 187 141.5 219 27.5 46 M14 x 2 21 11 9 JMGP Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke

LECA6_C

CN5I/O . 23 6.1 . 23 6.2 (NPNPNP ) . 23 (1) I/O (NPNPNP ) . 23 (2) I/O . 23 6.3 . 24 6.4 I/O . 27 7. . 28 7.1 . 28 7.2 . 31 7.3 . 33 8. . 34 8.1 . 34 8.2 . 34 8.3 . 35 (1) . 35 (2) (). 35 (3) . 35 8.4 . 36 8.5 . 36 9. (). 37 9.1 . 37 9.2 . 38 10. . 39 10.1 . 39 10.2 I/O . 39 (1) . 39 (2) . 40 (3) . 41 (4) HOLD. 42 (5) . 42 2 - 6 . 42 (7) . 43 11. . 44 11.1 . 44 11.2 (). 45 11.3 I/O . 46 11.4

Series CE1

22.5 44.5 49.5 47 43.5 50 58 82 85 88.5 D-F9ll 7 16 20 42 47 44.5 42.5 49 57 81 84 87.5 D-F9lWl 6 15 19 41 46 43.5 4.4-16

Rotary Actuator

[mm] Note 1) Port size A B C D (g6) DD (h9) F H J K With auto switch Without auto switch U W BA BB BC CA CB Note 2) Key dimensions S SB SC SD SE S b L1 Size D50 Rc1/8 62 48 46 15 25 2.5 36 M8 1.25 depth 8 5 156 (189) 1.5 5 14.5 33 144 (177) 98 17 17 8.5 6 9.5 7.5 5 0 0.030 25 63 Rc1/8 76 60 57 17 30 2.5 41 M10 1.5 depth 12 5 175 (213.5) 1.5 5 21.5 33 163 (201.5) 117 19.5 20 10 7 11 8

Air Fittings Fitting Series For Special Environment

12 25 20.5 17 23.3 10 17 28.5 23 29.0 1 2 KRT10-04S 39.5 67.3 32.5 42.5 22 1 4 3 8 KRT12-02S KRT12-03S 38 39.5 17 24 45.2 17 30.5 1 2 KRT12-04S 25.7 42 69.5 12 22 Note: Fitting cover ordered separately.

VM

1 Mechanical Valves Series VM Mechanical Valves Series VM Mechanical Valves SA VA Model VM1000 VM100 VM200 VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA Dimensions (mm) Side ported 11 x 36 x 16 Bottom ported 11 x 28 x 25 Side ported 17 x 44 x 25 Bottom ported 17 x 44 x 30 25 x 40 x 52 21 x 35 x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM Courtesy of Steven Engineering

C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

Slider Type Ball Screw Drive/11-LEFS Series

Note 2) Check SpeedWork Load Graph (Guide) on page 42 for details. Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 10% for each 5 m. Note 3) A reference value for correcting an error in reciprocal operation.

Series KP/KPQ/KPG

17 12 50 20.9 40 31.4 25 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Series KP/KPQ/KPG

17 12 50 20.9 40 31.4 25 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

KP/KPQ/KPG

17 12 25 31.4 40 20.9 50 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Vacuum System Peripherals:

17 Date issued: Photo copying this page is recommended.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

17 12 25 31.4 40 20.9 50 22 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Sine Cylinder Series REC

26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Sine Cylinder Series REC

26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.