Battery-less range1 65 Motor cable (2 x 5)5 [1] 1 E Stroke end [Origin]3 Origin2 65 [Stroke end] 180 (L) F 19.5 20 (2.2) Stroke (G 1) x H 21 B-B H 49 13.7 B 9.5 5.3 56 (37) G x M6 x 1 thread depth 12 6 B 5H9 (+0.030 0 ) depth 5 5H9 (+0.030 0 ) depth 5 J Connector Motor cable 1 This is the range within which the table can move when it returns to origin.
type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05
32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 21 109 63 14 40 to 600 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 21 109 80 22 60 to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 32 130 100 22 60 to 750 40 37 41 60 90 30 29 20 71 16 M12 x 1.75 10 26 33 8 M26 x 1.5 100 1/2 23 32 131 110 (mm) Bore size (mm) Trunnion
1 t !9 !2 !6e q u !4 w !7 !3 @0 !1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !
23 17.5 19.5 22.5 24.5 13 15 11 13 17 19 11 13 15 17 11.5 13.5 14 16.5 11 13 CHN 63 23.5 24.5 20 21 25 26 13.5 14.5 19.5 20.5 13.5 14.5 17.5 18.5 13.5 14.5 80 23.5 26.5 20 23 25 28 15.5 18.5 13.5 16.5 19.5 22.5 13.5 16.5 17.5 20.5 14 17 16.5 20 13.5 16.5 CHM 100 27 31 23.5 27.5 28.5 32.5 19 23 17 21 23 27 17 21 21 25 17.5 21.5 20 24.5 17 21 Note 1) The auto switches listed below cannot
18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 25 to 500 25 to 600 32 to 600 41 to 750 45 to 750 M18 x 1.5 M8 x 1.25 56.5 M18 x 1.5 M10
18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 25 to 500 25 to 600 32 to 600 41 to 750 45 to 750 M18 x 1.5 M8 x 1.25 56.5 M18 x 1.5 M10
2.4 2.3 2.4 2.2 2.2 2.3 0.27 0.32 0.27 0.36 0.32 0.27 0.31 0.59 0.62 0.54 0.66 0.56 0.54 0.59 1/8 1/4 1/8 1/4 Body ported for internal pilot SYJ72 Type SS3YJ7-21 Type SS3YJ7-40 1/8 1/8 1/8 1/8 C6 C8 Type SS3YJ7-41 Base mounted for internal pilot Type SS3YJ7-42-01 SYJ74 1/4 1/4 Type SS3YJ7-42-C6 Type SS3YJ7-42-C8 1/4 Body ported for external pilot SYJ72R 1/4 1/8 2.2 0.34 0.55 2.4 0.32 0.62
9, @0, @1. Seal kit includes !9, @0, @1.
12 5 3 1 45 30 2 x 5.6 Mounting hole Manual override 129 91.5 41.3 32 30.6 27 14.5 G1/2 78.8 41.3 32 30.6 27 14.5 Electrical entry PE X X PE R1 R2 P 15.5 R1 R2 15.5 P 1/8" External pilot port 19.5 (21) 19.5 (21) 1/8" PE. port G1/2 1/8" PE. port 1/4", 3/8" 19.5 (21) 19.5 (21) 31 31 1(P), 4(A), 2(B), 5(R1), 3(R2) port 1/4", 3/8" Electrical entry 31 31 1(P), 4(A), 2(B), 5(R1), 3(R2) port :
(mm) Connection thread R H 1(P) 2(A) B S (Width across flats) Weight (g) L3 L4 L5 L6 M1 Q L1 L2 Model C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-04F-M5 18 2.0 3.4 1.2 19 49 11 21 51 13 4 29.1 31.6 55.4 52.9 M5 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-04F-01S VHK-06F-M5 3.5 11 41 23.8 16.5 15.8 1 8 53.9 29.6 56.9 24.3 32.6 16.5 3.5 16.8 11 7.2 21 50 11 23 53 13 M5 2.0 VHK-B1A 44.5 14.5 1 27 22
;.i Flat type Flat w~h rib (mm) ZPT02 1:6 y H Rat FIalwith rib M_I 1>A 1>8 C 0 E F G 1:4 H ZPT08 ZPno ZPTlOg 10 12 12 21 32.5 56.5 68.5 BaS B9 3 1.7 ZPT13 30 30 30 30 30 30 ZPT13g 13 15 12 21 32.5 56.5 68.5 188.5 89 3 1.8 .
M5 x 0.8 26 68 8 80 14 19.5 20 15 39.5 9 38 4 REAR15 4.3 M4 x 0.7 6 M5 x 0.8 32 84 7 98 18 21 25 18 54.5 14 53 5 REAR20 5.6 M4 x 0.7 7 Rc 1/8 38 95 7 107 17 20.5 40 22 64 11 62 5 REAR25 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 20 21.5 40 28 72 15 70 6 High Precision Guide Type REBH Order Made Auto Switches REAR32 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 26 24 50 35 79 13 76 7 REAR40 7 M6 x 1 11 Rc 1/
Manifold type CE-compliant Stations P, R port thread type 20 21 Type 20 Type 21 -+ -+ -+ -+ -+ -+ -+ -+ Nil Rc G NPT NPTF 2 stations : 20 stations Nil 02 : 20 R P 00F 00N 00T R P Q CE-compliant P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for type 21, supply air to both sides of P port and exhaust air from both sides
8 25 45 8 13 26 120 10 22 5.5 M26 x 1.5 62 19.5 17 32 6 8 33.5 M10 x 1.25 15 30 1/8 32 45 8 13 26 122 12 22 5.5 M26 x 1.5 64 19.5 17 32 6 8 37.5 M10 x 1.25 15 34.5 1/8 40 50 11 16 32 154 14 24 7 M32 x 2 88 21 22 41 8 10 46.5 M14 x 1.5 21.5 42.5 1/4 With Rod Boot l ZZ h Symbol f e B3 Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150
59 3 44 60 3.5 M10 x 1.25 35.5 85 16 6 131.5 1/8 40 to 800 30 27 19 53.5 26 16 19 13 50 8 47 M6 x 1.0 6 14 7.2 30 66 3 54 75 4 M14 x 1.5 44 93 16.5 6.5 150 1/8 50 to 1200 35 32 27 69 32 20 21 14 58 11 58 M8 x 1.25 7 18 10 40 74 4 66 90 5.5 M18 x 1.5 55 109 21.5 11.5 176.5 1/4 63 to 1200 35 32 27 81 38 20 21 14 58 11 72 M10 x 1.5 7 18 12 45 74 4 82 110 7 M18 x 1.5 69 109 21.5 11.5 178 1/4
M10 x 1.25 29 1/8 77 44 12 111 32 Up to 200 22 19.5 17 12 18 2 26 10 32 6 38 10 42.4 9, 14 depth of counterbore 9 21 24 M10 x 1.25 33 1/8 83 45 13 117 40 Up to 300 30 27 19 16 25 2 30 10 39 8 47 14 52.4 11, 17.5 depth of counterbore 12 26 32 M14 x 1.5 37 1/8 94 55 16 135 50 Up to 300 35 32 27 20 30 2 33 12 45 11 58 18 64.5 14, 20 depth of counterbore 14 32 41 M18 x 1.5 44 1/4 108 62 17 155
50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 M12 x 1.75 10 26 33 8 M26 x 1.5 100
50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 10 26 33 8 M26 x 1.5 100 1/2 23 131