(Example) VVEX2-2-7-02N VEX3222-1LN 6 pcs. VEX1-17 1 pc. VVEX4-2-6-A VEX3420 5 pcs. VEX4-5 1 pc.
AV Tightening Torque when Piping Connection thread Applicable torque (Nm) M5 x 0.8 1.5 to 2 1/6 rotation 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 AU Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1 Rc 1 1/4 Rc 1 1/2 Rc 2 AF Model Connection R AN120 AN110 AN200 AN300 AN400 AN500 AN600 AN700 AN800 AN900 Effective area (mm2) AR Courtesy of Steven Engineering, Inc
5 x 10 5 x 20 Symbol Breadth x Length (mm) 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 3507 4010 4020 4030 5010 5020 5030 6010 6020 6030 8020 8030 ZF ZP ZCU Dimensions AMJ Series ZPT Series ZPR Series ZPY Misc.
15 90 100 110 35 80 90 100 1 Different sides 2 Same side 100 100 D-A3 D-G39 D-K39 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 35 + 30(n2) n = 2, 3, 4 Different sides n Same side 10 35 55 80 90 80 90 80 90 1 Different sides 2 Same side 35 + 30(n2) n = 2, 3, 4 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8
For construction, refer to page 6-4-30. Since the dimensions of mounting style is the same as pages 6-4-32 to 6-4-34, refer to those pages. For other specifications, refer to page 6-4-22.
. 1/8 1/8 1/8 1/4 15.5 13 5 15 10 5 M20 X 1.5 9 9 28 18 19 30 14 24 8 M8 X 1.25 24 25 13 8 41 20 20 33.5 M10 X 1.25 19.5 17 6 15 10 5.5 M26 X 1.5 9 9 22 19 30 14 30 10 30 25 13 8 45 25 26 34.5 37.5 M10 X 1.25 19.5 17 6 15 10 5.5 M26 X 1.5 9 9 22 19 30 14 30 12 25 13 8 45 32 26 21 41.2 M14 X 1.5 21.5 42.5 46.5 22 8 15 7 M32 X 2 11 10 24 30 39 18 38 14 16 11 50 40 32 Dimensions by stroke Built-in
pump mounted . 6-2 6.4 Option T1Inverter pump mounted . 6-3 6.5 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.1 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.2 Anti-quake bracket (Optional Accessories) . 6-5 6.6 Option ZRemoved Parts . 6-6 6.6.1 Option ZRemoved Parts . 6-6 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm
(P2) () 3) 4) 5) 23 5 No.VEX-OMY0001 VEX3 3 / DC () 5 20N 1) 2) 1 ()ISO VG32 2 ISO VG32 ,(SDS) 6 No.VEX-OMY0001 VEX3 3 / () 30 ( ) , 1 VG32 2 ()ISO VG32 7 No.VEX-OMY0001 VEX3 VEX3 12,22,32,42 ,300mm DXT170-80-A1) 2) Lmm 2 300 6 600 1 (2 ) AC100V 10 1000 2 (2 ) AC200V 15 1500 3 (2 ) AC 20 2000 DC L 4 :+ :DC 25 2500 DXT170-71-1 30 3000 0.20.33mm ( 1.7mm) DC : M 3.23.7mm
(6) O rings 5 axl$3n0 Sdmd.$ y.6i.tsil.i.d r15/1mV6OH2 aoP'lov60 H: So|mdceps!
(mm) Model Model a 4 6 8 10 b 6 8 10 12 2a 4 6 8 10 12 16 KGL04-00 KGT04-06 KGL06-00 KGT06-08 KGL08-00 KGT08-10 KGL10-00 KGT10-12 KGL12-00 Different Dia. Union "Y" KGU KGL16-00 Applicable tubing O.D. (mm) 2a Union Tee KGT Model a 4 6 8 10 b 6 8 10 12 Applicable tubing O.D. (mm) KGU04-06 Model KGU06-08 4 6 8 10 12 16 KGU08-10 KGT04-00 KGU10-12 KGT06-00 KGT08-00 b KGT10-00 Different Dia.
VQ7-6-FG-DVQ7-6-FG-D-R FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R VQ7-6-FPG-DValve replacement parts FHG FJG FIG FHG FJG FIG Description Material VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.
VVQ10001C AXT661 A Lead wire length 6 43 Lead wire length (mm) Manifold 300 600 1000 1500 2000 2500 3000 20 25 30 300mm 600mm 1000mm 2000mm 3000mm 1 VV5Q11 Connector 4 wire 2 wire 43 44 6 10 15 6 10 20 30 Without connector With connector/4 wire 1 2 With connector/2 wire Blank plate with a connector for individually outputing electricity to drive a single valve or equipment that are not
5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25
30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 47.5 50 50 50 52.5 52.5 52.5 38 47.5 46 47 52 50.5 51.5 23 25.5 25.5 25.5 28 28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium Vacuum, Oil
5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25
968) 526 (250) 5195 13 500 75 7001 (455) (110) 36 50 R2 470 855 (128) IDF Series 6-3 6 2 IDX-OM-W026 6 6-4 IDF22E-20, IDF37E-20 IDF22E-30, IDF37E-30 GFCI GFCI R GFCI R R L1 L3 L2 PE TB N PE L TB PRR ILS THR ILS MC THR MC MC PRR CM C01 MC OLR OLP1 CM OLP2 C11 FM PRS MOV P M C11 FM PRS M P IDF55E-30 IDF75E-30 GFCI R GFCI R GFCI GFCI TB TB PRR PRR THR THR CM CM MC2 MC2 FM FM THP THS THP
-23 P C12 CM FM1 () R GFCI FM2 L N PE MC MC1 MC2 C01 CM C11 FM1 C12 FM2 C21 FM2 PRS PRS1 PRS2 ILS THR PRS2 THS FM2 P OLP 1 THP FM1 THP1 FM1 THP2 FM2 P TB FM2 GFCI EDV V V IDU Series 6-4 6 3 IDX-OM-W029 6 IDU22E37E-30 IDU55E-30 GFCI R R GFCI R GFCI TB TB PRR PRR PRR MC1 THS MC1 CM MC1 CM FM1 M FM2 MC2 FM2 MC2 P PRS FM1 P P IDU75E-30 M For Option R GFCI R GFCI TB CM FM1
7.6 25 5 20.5 20.5 15.5 8 15.5 M4 x 0.7 M4 x 0.7 11 14 6.5 3.3 8 5 26 3 19 2 5 40 30 27 3.5 6 CY1S10-Z 7.5 12 31.5 6.5 25 27 17 13.5 17 M4 x 0.7 M4 x 0.7 10.5 16.5 8 4.4 10 5 33 6 28 2.5 6 40 34 45 4.6 6 CY1S15-Z 7.5 9.5 16.6 38 6.5 28 29.5 20.5 15 20.5 M4 x 0.7 M5 x 0.8 10.5 16.5 5.4 12 2 5 6 52 39 11 60 5.8 28 40 8 CY1S20-Z M6 x 1 M6 x 1 10 9.5 21.6 44 8.5 36 37.5 24 19 20 10.5 22 5.4 16
C6: 6 (SMC) N7: 1/4" (SMC) Applicable tubing O.D. C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.